VQ7-6/7-8

Sockets Mounting bolts VQ7-6: M5 VQ7-8: M6 Proper tightening torque Nm 0.8 to 1.2 Receptacle housing Window Coil 41 Series VQ7-6/7-8 Specific Product Precautions 2 Be sure to read before handling. Refer to pages 37 through 40 for safety instructions and common precautions.

Lubrication Equipment

1.17-6 AL1000 to 6000 Dimensions Metal bowl Option specifications/1000cm 3 tank Metal bowl with level gauge Model Metal bowl Metal bowl with level gauge B B AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 81.5 122 142 177 177 254 268 162 197 197 274 288 Model Port size A B C D LL M P E F G H J K Bracket mounting dimensions N 324(374) 334(384) 334(384) 336(386) 336(386) 38 41 39 45 45

Air Slide Table Series MXQ

42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

MXW Series Long Stroke Slide Table

200 186 226 174 216 118 139 6 2 495 24 50 50 149 MXW Series Long Stroke Slide Table Dimensions MXW 20 Stroke: 100, 125 Operating port 2-Rc (PT) 1/8 Width across hexagon socket hole 4 (mm) 144 20 Scale: 20% 10 Width across flats 13 Operating port Rc (PT) 1/8 8-M5 x 0.8 thread depth 13 (Helisert) Operation direction A 6H9 +0.03 depth 5.5 0 7 Taper thread plug with hexagonal hole 48 98 72 41

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

MU

94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Z + Stroke ZZ + Stroke Z + Stroke ZZ + Stroke (mm) (mm) ZZ 116 127 138 171 175 Z 107.5 117 127 155 159 Z 107.5 117 127 155 159 LX RR 8.5 10 11 16 16 LX RR 8 10 10 16 16 LD LU 11 14 15 20 20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

25 36 x 32 32 45 x 40 40 55 x 50 50 68 x 63 63 87 x 80 80 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 145 218 290 363 436 508 581 653 726 MGZ20 10 Foot MGZ-L05 MGZ-L06 MGZ-L08 47 71 94 118 141 165 189 212 236 Flange MGZ-F05 MGZ-F06 MGZ-F08 217 326 434 543 651 760 868 977 1085 MGZ25 12 76 113 151 189 227 265 302 340 378 324 486 648 811 973 1135 1297 1459 1621 MGZ32 16 Switch spacer 121

MTS

377 283 10 8 23 17 40 30 63 47 98 72 161 121 251 188 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 Stud Bolt Part No. 12 Bore size (mm) Part no. 16 8 MT-S8 12 MT-S12 20 16 MT-S16 25 20 MT-S20 25 MT-S25 32 32 MT-S32 40 40 MT-S40 Replacement parts for rod end male thread.

Compact Guide Cylinder

Height (Compared with the current product (MGP-Z)) Overall length (Compared with the current product (MGP-Z)) Current product MGP-Z [mm] Current product CXS [mm] Current product MGP-Z [mm] Current product CXS [mm] JMGP [mm] JMGP [mm] Bore size [mm] Bore size Stroke [mm] 12 26 17 17*1 12-10 stroke 52 43 82*1 16 30 18 20*2 16-10 stroke 56 43 89*2 20 36 22 25 25 42 26 30 32 48 32 38 40 54 41

MU

18 Plate Cylinder Series MU Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint Z + Stroke ZZ + Stroke Z + Stroke ZZ + Stroke (mm) (mm) ZZ 116 127 138 171 175 Z 107.5 117 127 155 159 Z 107.5 117 127 155 159 LX RR 8.5 10 11 16 16 LX RR 8 10 10 16 16 LD LU 11 14 15 20 20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41

MLGP

Spring washer (nominal size 3) 314 283 251 220 188 157 126 94 63 314 OUT 10 20 236 212 189 165 142 118 94 71 47 236 IN 40, 50, 63, 80, 100 BMG1-040 491 442 393 344 295 246 196 147 98 491 OUT 12 25 378 340 302 265 227 189 151 113 76 378 IN 804 724 643 563 482 402 322 241 161 804 OUT 16 32 603 543 482 422 362 302 241 181 121 603 IN 1257 1131 1006 880 754 629 503 377 251 1257 OUT 16 40 1056

MLGP

Spring washer (nominal size 3) 314 283 251 220 188 157 126 94 63 314 OUT 10 20 236 212 189 165 142 118 94 71 47 236 IN 40, 50, 63, 80, 100 BMG1-040 491 442 393 344 295 246 196 147 98 491 OUT 12 25 378 340 302 265 227 189 151 113 76 378 IN 804 724 643 563 482 402 322 241 161 804 OUT 16 32 603 543 482 422 362 302 241 181 121 603 IN 1257 1131 1006 880 754 629 503 377 251 1257 OUT 16 40 1056

4/5 Port Air Operated Valve Series SYJA3000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

See page 5 for How to Order Pilot Valve Assembly See page 5 for How to Order Port Block Assembly SY3000-41-2A (with screw & gasket) SY5000-41-2A (with screw & gasket) Description Pilot valve assembly Port block assembly Note No. 6 7 Die-cast aluminum SY3000 is die-cast zinc 1 Body White ( ) Note) 8 Bottom cover assembly 2 3 4 5 Adapter plate End plate Piston Spool valve assembly White White

MU

59 67 81 84 L 52.5 59 67 81 84 LD LU 13 14 17 23 23 ZZ 116 127 138 171 175 LA 35 41 46 62 62 ZZ Model MUl25 MUl32 MUl40 MUl50 MUl63 lLC 18 22 26 32 32 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 CD-MU02 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 Dimensions L, Z, and ZZ are reference dimensions for installing a single knuckle joint, which may be used as a guide.

V

www.stevenengineering.com I S E E I N S I D E F R O N T C O V E R F O R DETAILS OF YOUR LOCAL SALES OFFICE 6.8 VACUUM VACUUM SWITCH SERIES ZS VACUUM SWITCH SERIES ZSM1 DIAPHRAGM TYPE 100 ms Response Time Compact Size T E C H N I C A L SPECIFICATIONS ZSM1 (VA C U U M E J E C T O R T Y P E) Model ZSM1-115 ZSM1-121 Electrical switch type Solid state NPN Contact (reed switch) Fluid Air, Inert

MGQ

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Applicable solenoid valve Refer to the p.1.2-41.

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric