5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

mA), 0.5 W DC (21 mA) (4) 24 VDC Power consumption (Current) 1 W DC (83 mA), 0.5 W DC (42 mA) (4) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 12 VDC Metal seal Rubber seal Note 1) Use dry air to prevent condensation when operating at low temperatures.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

REA/REB

Auto switch Phillips head screw driver Hexagon nut (M3) (included) Switch mounting screw (M3 x 8) (included) 42 Sine Rodless Cylinder Series REAH High Precision Guide Type Max.

MGQ

30 56 42 87 156 87 156 138 207 138 207 168 465 278 708 150 37 26 49 36 77 136 77 136 123 182 123 182 151 411 252 627 175 33 23 44 32 69 121 69 121 111 162 111 162 137 368 230 562 200 30 21 40 29 63 109 63 109 101 146 101 146 126 333 211 509 12 16 MX 20 MTS 25 MY 32 40 CY 50 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

JXCx-OMT0030CN

62 . 23 63 . 24 . 25 7CN3: . 26 8CN1:IF CONT . 27 81 . 27 82 . 29 9CN2:TB/PC . 30 91 . 30 10LED . 31 101 LED . 31 102 IF LED . 31 11 . 32 111 . 32 112 . 32 113 . 32 114 . 34 12 . 35 121 . 35 122 IF IN Data . 39 123 IN Data . 39 124 OUT Data . 41 13LEC . 42 131 LEC . 42 132 . 43 14/ . 44 15/ . 45 151 . 45 152 . 46 153 . 46 2 - 154 . 48 155 . 49 156 . 49 16/ . 50 161

Modular F.R.L. Unit

A B C D E F G H I Model How to Order VHS20 VHS30 VHS40 VHS40-06 VHS50 59 78 107 110 134 20 29 39 42 53 40 53 70 75 90 34 46 63 67 78 22 21 26 45 55 58 65 76 33 42 44 50 61 28 30 36 44 54 45 55 63 69 81 30 03 RZ F VHS 3-port valve for residual pressure release Caution 1. Consult P/A when a pressure switch and T type spacer are installed on the outlet of pressure release valve 2.

AC Servo Motor Driver (CC-Link Type)

{(16 A) (54 B) (88 C)} 2304 A: Number of remote I/O stations 64 B: Number of remote device stations 42 C: Number of local stations 26 (d) When the number of units connected is 4, station numbers can be set as shown below.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Dimensions AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 L1 L2 L4 Min.

PF-OMM0004_C

No.PF-OMM0004-D / / PF3W7## SMC 2 11 13 14 16 17 19 21 24 26 26 F1 OUT1 60 F2 OUT2 36 F3 42 F10 43 F20 47 F22 48 F30 50 F80 51 F81 52 F82 53 F90 54 F98 55 F99 56 57 61 61 65 65 71 79 81 88 -1No.PF-OMM0004-D (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

LEC-T1_C

.**. 29 (2-3) LECPLECA .32 1 - (2-3-1) LECPA . 32 (2-3-2) LECPA . 32 (2-3-3) LECPA . 34 5.4 .36 5.4.1 .36 (1) .36 (2) .38 5.4.2 .40 (1) .40 (2) .41 6. .42 6.1 .42 (1) .42 (2) .44 (2-1) LECPLECA .44 (2-2) LECPLECA .45 (2-3) LECPA .46 6.2 .47 (1) .47 (2) .47 (3) .48 (4) .50 (5) .51 (6) .52 (7) .54 (8) .54 6.3 .56 (1) .56 (2) .56 (2-1) .56 (2-2) .56 (3) .57 (3-1) .57 (3-1-a) TB Ver1.**. 57 (

3

With arm Port side M Rotary direction: L During unclamping (Extension end) Rotary direction: R During unclamping (Extension end) 14 With Arm (mm) 10 mm Clamp stroke M 51 35 Model Rod state 20 mm 30 mm Retracted Extended Retracted Extended 32 51.5 32 51.5 42 71.5 42 71.5 52 91.5 52 91.5 MKB20-Z 7 12 to 22 M6 x 1.0 MKB25-Z 16 During clamping (Retraction end) Head flange Rod flange The dimensions

VM

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling. Air Supply Precautions on Design Warning Warning 1.

Mechanical Valves Series NVM, NVFM, NVZNI

Parentheses A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42

IIIIIII

T.T 90" .75 PSIG (5 Kgf/cm2) #4n 2V,,tay 3 Way F O F , 3 31 lbs. (1.5 kg ) T T 45" A B c D E F G H J K tl N 3.44 '473' 2.24 '56.81 1.25 31.8) 1.20 0.06 (1.5) 0.12 (3) 0.86 t22.51 1.57 {rto) t.42 361 1.26 (321 1.20 0.24 (6) Millimeters in Parenlheses Millimelrs in Parenthses MECHANICAL VALVES HOWTO ORDER DIMENSIONS Series NVM HOW TO ORDER NVM 220 N02 065 TT t l I LRoller Material (01,02,06,07

Series VQ Base Mounted Metal Seal/Rubber Seal

Ambient and fluid temperature Note) Effective area (Cv factor) Max. operating fraquency Note) As per JISB8375-1981 (Supply pressure: 0.5 MPa) Dimensions Single Manifold Dimensions Equation L1=11n+20 n: Station (Max. 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 L1 L2 L3 31 50 60.5 86 112.5 123 108 125 135.5 119 137.5 148 141 162.5 173 97 125 135.5 130 150 160.5 152 175 185.5 53 75 85.5 64

VQ

11 142 153 173 200 210.5 3 62 73 93 112.5 123 12 152 163 183 212.5 223 4 72 83 103 125 135.5 13 162 173 193 212.5 223 5 82 93 113 137.5 148 14 172 183 203 225 235.5 7 102 113 133 162.5 173 6 92 103 123 150 160.5 15 182 193 213 237.5 248 8 112 123 143 162.5 173 16 192 203 223 250 260.5 9 122 133 153 175 185.5 17 202 213 233 262.5 273 10 132 143 163 187.5 198 18 212 223 243 262.5 273 L1 L2

42

5 Port Solenoid Valve VQ4000/5000 Series Metal Seal Rubber Seal VQ4000 SV VFS3000 Installation volume 42% SYJ SZ Reduction VF VP4 123 96.5 Installation area 26% VQ 1/2 VQ 4/5 VQ 4/5 Reduction 201 VQC 1/2 163 240 VQC 4/5 185 Compact and large flow capacity VQZ SQ Possible to drive cylinders up to 160 VQ4000 VQ5000 VFS Possible to drive cylinders up to 180 When the average speed is 200 mm

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(28.5) 15.5 (22.5) 17.5 (25.5) 19.5 (27.5) 25 30 30 29.5 27 29 25.5 27 31 24 30 17 (25) 22.5 (30.5) 21.5 (29.5) 15.5 (23.5) 18.5 (26.5) 20.5 (28.5) 32 33.5 33.5 33 30.5 30 26.5 28 32 25 31 19 (28) 24.5 (33.5) 23.5 (32.5) 19 (26.5) 20.5 (29.5) 22.5 (31.5) 40 38 38 37.5 35 34.5 31 32.5 36.5 29.5 35.5 24 (36) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 50 43.5 43.5 43 40.5 42

PF-OMN0009_C

63 48 28 18 3.5 14 S T U V W WX Y Z PF3W504 24 22 32 40 50 4.5 5 1.5 PF3W520 28 22 32 40 50 4.5 5 1.5 PF3W540 34 30 42 48 58 4.5 5 1.5 PF3W511 44 36 48 58 70 5.5 7 2 -41No.PF-OMN0009CN-F PF3W521 2X A AA B DD E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W521 56 76.6 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78 35 56 43.5 -42No.PF-OMN0009CN-F PF3W504/520/540/511/

MY1

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153