Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

ZP

ZF Symbol S Pad dia. 02 to 16 L 20 to 50 ZP ZCU With buffer AMJ Misc.

CM2

B3 f e 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 17 36 30 68 81 93 106 131 12.5 25 37.5 50 75 198 224 248 274 324 20 17 36 32 72 85 97 110 135 12.5 25 37.5 50 75 206 232 256 282 332 25 17 36 32 72 85 97 110 135 12.5 25 37.5 50 75 208 234 258 284 334 32 19 46 41 77 90 102 115 140

AC Servo Motor Driver

The life of battery is five years from the production date regardless of the connection. (2) Configuration Positioning module I/O module QD75 QX40 41 42 QY40 41 42 50 A1SD75 AX40 41 42 AY40 41 42 FX2N-1GP FX2N-10PG FX2N-10GM FX2N-20GM FX2N(c) series FX3U(c) series Programmable controller Servo amplifier PC or PLC...etc Driver QD75 etc.

LEC-OM07605CN

PB26](_ _ _ 1) 5 28 5. [] PB45 CNHF _ _ x x 5.5 00h _ x _ _ 5.6 0h x _ _ _ 0h 5.5 [Hz] [Hz] [Hz] 00 20 70 40 17.6 01 2250 21 66 41 16.5 02 1125 22 62 42 15.6 03 750 23 59 43 14.8 04 562 24 56 44 14.1 05 450 25 53 45 13.4 06 375 26 51 46 12.8 07 321 27 48 47 12.2 08 281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D

Series VCS

71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option

ZP

Material ZQ Series ZPR Without Buffer ZPR U N 02 04 A5 ZF ZP Mounting thread (Refer to Table (2) for applications.)

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option

PFxx-OMA1007

(Refer to page 40, 41) Standby OFF delay 0 to 9s 0s Common Sensor Sets enabling/disabling of automatic isolation. (Refer to page 40, 41) Auto isolation Enable/Disable Disable Common Isolation delay Sets isolation delay. (Refer to page 40, 41) 0 to 9s 3600s Common Sets whether it is necessary to input the security code or not.

Vacuum Unit

Symbol Type Pressure range [kPa] Symbol Type Note Nil Without option V V B V None (SI unit only) C V V D V None (SI unit only) E Pressure switch for vacuum 0 to 101 B Mounting bracket for single unit (nuts and bolts are included) Bracket V V F V None (SI unit only) H V V J V None (SI unit only) P Pressure sensor 0 to 101 Analog output 1 to 5 V T 100 to 100 N Without pressure switch

70pvpump

kPa 100 to 100 kPa 0 to 500 kPa 0 to 1 MPa 0 to 101 kPa 0 to 101 kPa 101 to 101 kPa 0 to 101 kPa 100 to 100 kPa Set pressure range 12 to 24 VDC (Ripple p-p 10% or less) Voltage 2% F.S. or less (0 to 50C: based on 25C) 3% F.S. or less (10 to 60C: based on 25C) 2% F.S. or less (25C) 3% F.S. or less (25C) Temperature characteristics 0.2% F.S. or less 1% F.S. or less Repeatability 0.3% F.S.

CM2

20 M10 X 1.25 17 32 37 6 8 M26 X 1.5 15 30 10 33.5 22 13 5.5 19.5 7 41 40 4 60 25 75 8 45 26 34.5 M10 X 1.25 17 32 37 6 8 M26 X 1.5 15 12 37.5 22 13 5.5 19.5 7 41 40 4 60 32 75 8 45 26 M14 X 1.5 21.5 M32 X 2 42.5 22 41 47.3 8 10 14 46.5 24 16 7 21 7 45 52 5 66 40 36 82 11 50 32 Dimensions by stroke Boss-cut (mm) (mm) Stroke Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 51 to

7ND9071en

9.4 Adjustment.41 9.5 Removal of the limit switches for accessing the valve controller.41 9.6 Circuit diagrams.41 9.7 Maintenance .41 10 TOOLS.41 11 ORDERING SPARE PARTS .41 12 DRAWINGS AND PARTS LISTS.42 12.1 Exploded view ND9100, ND9400, ND7100 .42 12.2 Exploded view ND9100_/D__, ND9100_/I__, ND9100_/K0_ and ND9100_/B06.43 12.3 Exploded view ND9200, ND9300, ND7200 44 12.4 Exploded view

VCS

71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 30 50 94 41 13.5 17 36 25 23 M5 8 VCS41 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 17-2-45 8 Series VCS How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers under the manifold

Electric Actuator

101 to 400 20 to 100 32 31 22 18.5 40 M6 x 1.0 10 15.6 9.3 60 60 61 1 15.3 101 to 500 Note 1) Range within which the rod can move.

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Free Mount Cylinder for Vacuum Series ZCUK

. 5 41. 5 41. 5 41. 5 42. 5 42. 5 42. 5 48. 5 ZMA DQ HQ HP 12 21 44 15 21 44 18 23 23 46 28 23 46 35 12 24 47 18 25 48 28 29 52 12 25 48 15 18 29 52 22 27 33 56 34 38 61 ZPT-B6 ZC(D)UKC20 ZC(D)UKQ20 21. 5 23. 5 27. 5 32. 5 44. 5 46. 5 50. 5 55. 5 ZQ DQ HQ HP 43 32 57 53 33 58 28 35 60 43 22 27 39 64 34 44 69 43 53 23 29 54 28 29 54 35 ZPT-B8 ZC(D)UKC25 ZC(D)UKQ25 29. 5 42. 5 38. 5 47. 5 51

HRX-OM-X027

Poloneza 89, PL-02-826 Warszawa Portugal SMC Sucursal Portugal, S.A. (351) 22 616 6570 Rua De Eng Ferrerira Dias 452 4100-246,Porto Romania SMC Romania S.r.l. (40)21-3205111 Str.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Dimensions (mm) Recommended flow m3/min (ANR) Model Port size R Effective area (mm2) Weight (g) A B C 1 8 ANB1-02 15 10 51 22 ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 1.2 or less 2.7 or less 3.8 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1

Base Mounted Metal Seal/Rubber Seal Series VQ

With and without sub-plate Nil Without sub-plate 02 With sub-plate (Port size: 1/4) Terminal block In the case of sub-plate alone VQ2000 PW 02 Dimensions 89.4 4 2-4.5 (Mounting hole) (43.8) (A port) (B port) 10.5 10.5 Manual override Indicator light VQ2101 037 45 5 121 (DC) 130.1 (AC) 22.4 (86.3) (AC) (77.1) (DC) 15.5 Clamp screw External pilot port M5 x 0.8 78.5 (AC) 72.6 (DC) 70.7 (A,