Compact Vacuum Ejector Series ZQ

) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.

ZQ

above dimensions are for ZQ11U-J2 L-F.

AC Servo Motor Driver (CC-Link Type)

selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

Series 12-REA Sine rodless cylinder

Model Elbow type Straight type In-line type 12-REA25 10-AS2001F-06-X214 10-AS2201F-01-06-X214 10-AS2301F-01-06-X214 12-REA32 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 6. Do not use the cylinder with its body fixed. Be sure to secure both head covers (or end covers in case of CY1R) before using the cylinder.

AFF

160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

AMF

R 88 S 3.2 Related poroducts 36 9 205 19 100 106 3 106 10 1 2 3 4 , AMF450 1 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 , , , 1 1 3 4 44 66 96 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 4.5 4.5 6 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AMF550 AMF650 AMF850 1 2 1 2 1 2 1 AMF450SAME,

AME

G AM I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 36 9 205 19 100 106 3 106 10 1 2 3 4 , AME450 Misc. 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 , , , 1 1 3 4 4.5 4.5 6 257 314 406 30 40 30 10 15 15 16 20 24 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 9 11 13 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 5.5 6 6 7 7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 10 10 10 10 10 10 10 10 10 1 8 1 4 3 8 AMG150 , , 1 4 3 8 , AMG250 1 2 3 8

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

AME

BM51 BM52 BM53 BM54 BM55 BM56 BM57 How to Order AME 250 03 R B Option R INOUT reversal Body size HAl Accessories (Options) 150 250 350 450 550 650 850 1/8 1/4 3/8 1/2 3/4 None B AT With bracket IDl Port size 1/8B 01 02 03 04 06 10 14 20 2B 1 Thread 1/4B AMG 11/2 3/8B Rc(PT) F G(PF) N NPT 1/2B AFF 3/4B 1B AMl 11/2B Symbol Related poroducts AME Note) Refer to p.4.7-7 for "How to Order" case

AMG

150 H 166 187 187 218 218 241 241 277 334 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 5.5 6 6 7 7 9 9 9 11 10 10 10 10 10 10 10 10 10 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 100 113 119 145 151 166 173 200 253 13 13 16 16 19 19 22 22 32 159 172 178 204 210 225 232 259 311 AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG150

Soft Start-up Valve AV2000/3000/4000/5000 1

PPA AV5000 AL Large effective area (mm 2) With supply/exhaust function by manual operation AV2000/ 20 (Body size: 1/4) AV3000/ 37 (Body size: 3/8) AV4000/ 61 (Body size: 1/2) AV5000/ 113 (Body size: 3/4) AV5000/ 122 (Body size: 1) Low power consumption Connectable with modular type F.R.L. combination unit Combination with F.R.L. unit F .R.L. combination Soft start-up valve AC20 AC25 AC30

CC

151 70 122 151 48 374 836 52 402 1000 Slide screw + Slider guide: 47 dB (LJ1S) Slide screw + Linear guide: 53 dB (LJ1H) RZQ MI W S CEP1 Low profile, non-coupling type with reduced height and length CE1 Compact Electric Actuator Series LG1 CE2 Series with coupling available Mounting of a non-standard motor is possible.

A

A start-up valve that gradually increases supply pressure during start up and rapidly exhausts system air when the supply air is shut off Large effective area (mm) Manual supply/exhaust function AV2000/ 20 (Body size: 1/4) AV3000/ 37 (Body size: 3/8) AV4000/ 61 (Body size: 1/2) AV5000/113 (Body size: 3/4) AV5000/122 (Body size: 1 ) Low power consumption Modular with F.R.L. combinations F.R.L

Soft Start-up Valve AV2000/3000/4000/5000

A start-up valve that gradually increases supply pressure during start up and rapidly exhausts system air when the supply air is shut off Large effective area (mm) Manual supply/exhaust function AV2000/ 20 (Body size: 1/4) AV3000/ 37 (Body size: 3/8) AV4000/ 61 (Body size: 1/2) AV5000/113 (Body size: 3/4) AV5000/122 (Body size: 1 ) Low power consumption Modular with F.R.L. combinations F.R.L

Series KG Stainless Steel One-touch Fittings

(mm) Weight (g) A D M5 0.8 KGH04-M5 KGH04-01 14 13 9.5 8 17 22 4 4 2.4 9 16 5.6 1 4 KGH04-02 19.5 13.5 14 4 4 1 8 16 18 10 5.6 M5 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 15 18.5 17 11.5 18.5 22.5 23 4 10 12 14 1 8 1 4 6 13.1 13.1 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 24 20.5 15.5 26 27.5 28 26.5 22 30 33.5 14

CL

How to Order CL MLGC Number of auto switches Standard L 100 200 F JN CL1 CNA 2 3 1 n 3 S n CB L 100 200 F JN A33 CDL1 With auto switch CV/MVG Air cylinder with auto switch Auto switch CXW Without auto switch (Built-in magnet) Lock-up Cylinder Refer to table below for auto switch model.

EXxx-OMY0006CN

F_Source/Destination_Address (F-Address) F-Source F-destination F-Address F-Address F_WD_Time F_WD_Time PROFIsafe ms F_SIL SIL F_iPar_CRC i-Prameters F_Par_CRC F-Parameters CRCF-Parameters F-CPU Failsafe controller, safe controller F_Destination_Address F-Parameter (F-Parameter) F-I/O device Failsafe I/O I/O 100 No.EX##-OMY0006CN F-Slave Failsafe slave F_Source_Address F-Parameter