x 103 1.02 0.93 x 103 Temperature 10C 1.00 4.19 x 103 1.00 1 x 103 10C 1.02 3.91 x 103 1.02 0.93 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18
How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.
Note Platinum silver q Description DXT170-Cu Common with Series VZ 000 1 3 Piston plate Body Resin Resin Black w e O-ring NBR 13 x 11 x 1 i Piston Spool valve r Aluminum, HNBR Black painted t Resin End cover y Stainless steel Spool spring 3-3-56 5 Port Solenoid Valve Body Ported Series VZ5000 2 Position Single Foot bracket VZ5120-01-F VZ5120 Grommet (G), (H) VZ5120-01 G H G H (Mounting hole
AS2201FE-01, AS2211FE-01 AS2301FE-01, AS2311FE-01 AS2201FE-02, AS2211FE-02 AS2301FE-02, AS2311FE-02 AS3201FE, AS3211FE AS3301FE, AS3311FE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-F Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) TMH ASD AS AS-FE AS-FE Number of needle rotations Number of needle rotations Number of needle rotations
Indicated contents F i n e C o n t r o l o f Sets the fine adjusting value to calibrate the internal temp. sensor.
Stations: 10 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc
Stations: 10 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: Rc
1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.
$ ' $ # ' ,*# ./ 01 ( *# ./ 2 01 $ ./ 23 ##4 #1 /47 .81 < :# /4; .71 + + 47 ./1 + /4 ./31 /;3 /;> /3 /3 17-3-4 Series VX / VXZ22/23 VXH22 VXF21/22 VX31/32/33 . !"! !#! !"! !"! !"! 0 !#! 0"!#! !"! 0 !#! 0" #!
Common exhaust port(EXH) and silencer location R Right Side L Left Side B Both Sides Thread type Nil Rc T NPTF F G Note) Right and left side are viewed from the front side of vacuum port (V). G thread The thread ridge shape is compatible with the G thread standard (JIS B 0202), but other shapes are not conforming to ISO16030 and ISO1179.
. (3) Common supply pressure (PV) connecting port size (4) Common vacuum burst pressure (PD) port Note 2) 01 Rc1/8 01N NPT1/8 01F G1/8 M5 M50.8 NIL Without PD port (PV = PD) M5 M50.8 PVPD Note 2)Refer to model indication for single unit (4) for the combinations of supply valve and release valve selectable. 14 - Doc. no.
Prefix it to the part nos. of the solenoid valve, etc. 3-3-74 5 Port Solenoid Valve Base Mounted Series VZ5000 Common SUP/Common EXH How to Order Type 40 VV5Z5 05 40 2 01 1(P) port Rc 1/4 4(A), 2(B) Port size Stations P, R port thread type 02 2 stations 01 Rc1 8 Rc Nil 3/5(R) port G F 20 20 stations Rc 1/4 N NPTF T NPT 4(A), 2(B) port Note) For more than 10 stations, supply air to both
K BN 8-J BC FZ S + Stroke H ZZ + Stroke FT e f 8 l ZZ + l + Stroke h + l With rod boot (mm) Bore size (mm) Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke A AL B1 BC BF BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 15.5 18 13 38 38 93 1/8 44.5 14 8 12 2 85 10 18 5.5 6 4 8 5 26 to 200 20 to 200 19.5 22 17 45 45 103 1/8 51.5 16.5
mounting range GB A F K BN Rc(PT) P TB AL 2-TDe8 (pin O.D.)
FZ NA MLGP BC RLQ MLU e ML1C DZZ + l + Stroke h + l f 8 l -X With rod boot 20Data Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BF BN BP BZ C D E F GA GB GC GK GL GR GQ H1 18 15.5 13 38 38 93 1/8 44.5 14 8 12 2 85 10 (12) 18 5.5 6 4 8 5 Up to 200 201 to 350 20 to 200 201 to 350 22 19.5 17 45 45 103
Diaphragm material 1 VXA PTFE (Fluoro resin) JIS Symbol Style VN Port size 1 3 Built-in solenoid valve Air operated LVC 01 1/8 (6A) FLUID OUT AIR SUP AIR EXH LVA Thread type FLUID IN Nil T Rc NPTF G NPT LVH Built-in solenoid valve F LVD N T, F, N are options.
1 15-5-13 Series KP/KPG Dimensions Male Connector: KPQH, KPGH (M5) (M5) Effective area mm2 Model L D M TPH TPS A Connection thread R D Applicable tubing Applicable tubing O.D. mm H (width across flats) Weight g KPGH04-M5 KPGH04-01 KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06
Cooled substance total volume V Cooling time h Cooling temperature difference T Facility water temperature Circulating fluid : 60 L : 15 min : 20C (20 K) (70C 50C 20C) : 20C (293.15 K) : Fluorinated fluid Density : 1.74 x 103 kg/m3 Example of conventional measurement units (Reference) 0.06 m3 0.25 h 20C 20C Fluorinated fluid Density : 1.74 x 103 kg/m3 Specific heat C: 1.05 x 103 J/(kgK)
Electrical entry q Description 01 02 03 01 02 03 01 02 03 Mounting bolt and gasket are not included. Platinum silver Body C: Conduit VS4010-CSSub-plate Platinum silver Aluminum die-casted w T: Conduit terminal VS4010-TSSpool/Sleeve Stainless steel e U: Grommet, D: DIN terminal VS4010-SReplacement Parts Part no. No.
M14 x 1 Hexagon width across flats 19 M5 x 0.8 5 5 20 D 5 F Hexagon width across flats 21 C Y 2.5 A B Dimensions (mm) A B C D F Y Model ZPT40F-B5-A14 40 43 12.5 18.5 51.5 5 ZPT50F-B5-A14 50 53 13.5 19.5 52.5 6 13-11-103 8 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer/Female Thread Series ZPT How to Order ZPT 20 F GS B01 Vacuum entry/ Mounting thread diameter Pad diameter