Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 Bore size (mm) O M J E D B Part no. 100 YU-10 YA-10 YB-10 160 K (Width across flats ) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB

VFR

Note) Do not change the rated voltage. VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

Booster Regulator/Air Tank

VEX SRH Product Not Applicable to the ASME Standard ASME Standards Compliant Product SRP VBAT 05 N A 1 E V X105 Product not applicable to the ASME standard VBAT 05 N 1 A X11 SV SRF ITV Tank internal capacity Tank capacity Option Symbol Internal capacity 05 5 L 10 10 L 20 22 L 38 38 L Material Option IC Symbol Option Nil None V Drain valve Symbol Internal capacity 05 5 L 10 10 L Symbol Option

10

DO 4 x DR DU DU DA DL Rubber Bumper [mm] Part no.

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

*Do not wipe with alcohol, etc.

High Purity Fluoropolymer

Do not use in locations having an explosive atmosphere. 2. Do not operate in locations where vibration or impact occurs. 3. In locations near heat sources, block off radiated heat. 1. Operate within the range of the maximum operating pressure. Caution 1. After a long period of non-use, perform inspections before beginning operation. 2.

SZ3000

If the tubing is inserted without holding the elbow, excessive force can be applied to the valve and fitting assembly, causing air leakage or damage, etc. 1) Nylon tubing within 0.1 mm 2) Soft nylon tubing within 0.1 mm 3) Polyurethane tubing within +0.15 mm, within 0.2 mm Do not use tubes which do not meet these outside diameter tolerances.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Some piping conditions may have negative effects on the flow accuracy. * Products with tiny scratches, marks, or display color or brightness variations which do not affect the performance of the product are verified as conforming products.

Series VQ Base Mounted Metal Seal/Rubber Seal

Series/Manifold Option VQ1000 05 12 VQ0 VQ0 VQ1000 Option Symbol Plug lead unit Check for prevention Style (2) B of back press.

VM

Straight Plunger/VM120-01-05, VM130-01-05 JIS Symbol 2 port Panel mounted hole 3 port 23N F.O.F. 0.5MPa supply 2mm P.T. 1.5mm O.T. 3.5mm T.T.

C95

When in a locked condition, do not apply a load accompanied by an impact shock, strong vibration or turning force, etc.

KJ

How to Order KQ2 H 05 S 02 With thread seal One-touch fittings Nil Without seal S With thread seal Applicable tubing O.D.

CNA

W1 B DX Z + Stroke DDH10 hole 90 B 4-DT B DS A DH DF DU DU DL DA 4-DR DO DO DC DE Rotating Angle Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Part no.

CNA

W1 B DX Z + Stroke DDH10 hole 90 B 4-DT B DS A DH DF DU DU DL DA 4-DR DO DO DC DE Rotating Angle Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Part no.

C95

CJ1 q Do not apply more than the allowable rotating torque to the piston rod. If more than the allowable rotating torque is applied, the non-rotating guide will be deformed and there will be a significant loss of rotational accuracy. This may cause damage to the machinery.

MGG

(Do not tighten it with pliers or other tools.) BA 32 BA 04 BA 05 BA 06 BA 08 BA 10 BA 01 BA 02 BM1 01 BM1 02 BM1 32 BM1 04 BM1 05 BM1 06 The following stainless steel mounting screw kits (including set screws) are available for use depending on the operating environment. (Order the mounting band separately, as it is not included.)

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Safety Instructions Warning Do not disassemble, modify (including changing the printed circuit board) or repair. An injury or failure can result. Do not operate or set with wet hands. This may lead to an electric shock. Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result.

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Inch' size I0 1/4" 03/8' 05/16" 05/16" diameter . . 03/S' 051160 1/2" Flbw."rate tlin\~ 330 750 350 C ,oP/rolled flow . (A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 . N01e} The iMicaled 110w rate values are al a pressure 01 O.5MPa and a temperature 01 20 Q C. 1 Speed Controller 5 .

Cylinder with Lock

Do not turn the piston rod with the rod boot kept locked. When turning the piston rod, loosen the band once and do not twist the rod boot.

Electric Actuator with Integrated Guide

Do not operate beyond the rated voltage range. If applying voltage over the rated voltage range, equipment may be damaged. 2. Avoid incorrect wiring such as polarity of power supply. Otherwise, equipment may be damaged. 3. Do not short circuit the load. (Do not connect to power supply.) Otherwise, equipment may be damaged.