Interface Regulator for VQ4000 5 Port Solenoid Valve

-A ARBQ4000-00-B 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1600 1600 0 0 200 400 600 800 1000 1200 1400 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0

KA

(mm) Polyurethane Soft nylon D L M Part No. 4 3.2 KAH23-00 31.5 32.5 34.5 18.5 21 22 15.5 16 17 15.2 18.5 20.9 9.6 10.4 12.8 46.1 46.1 29.5 29.5 18.0 18.0 4 3 3 KAH04-00 KAH06-00 13.1 13.1 5.6 5.6 3.4 2.9 8 6 38.5 42.5 44.5 KAH08-00 6 11 12 10 KAH10-00 KAH12-00 14 Different diameter straight: KAH Tube O.D.

VVXA21/22

5"5 VVXA211-stations VVXA212-stations VVXA221-stations VVXA222-stations 7 %1 % = > = > 3 1 VXA21 -00 . ; < Construction/ Principal Parts Material 3 1 VXA22 -00 ; Common SUP type Solenoid Valve for Manifold " 5 '* #5 5 # I ,+!J ! #5 " 0"8 1 E F 4 " 4 % " 4 4 4 4 7 %1 % 3 VXA212-00 VXA213-00 VXA223-00 VXA224-00 = < .G < < * 4.5 . >< * < * 6 < * $ /H"3 % .

4/5 Port Air Operated Valve Series SYJA3000

3 0 3 0 3 Round head combination screw SY100-33-3 (M1.7 x 17, Matt nickel plated) Applicable manifold base Type SS5YJ3-20 Type SS5YJ3-21P Applicable manifold base Type SS5YJ3-31 Type SS5YJ3-S31 Type SS5YJ3-32 Type SS5YJ3-S32 Type SS5YJ3-32P Applicable manifold base Type SS5YJ3-41 Type SS5YJ3-S41 Type SS5YJ3-46 Type SS5YJ3-S46 Manifold base Manifold base Manifold base A Mark Manifold gasket

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Specifications 0.4 SYJ 0.3 SX 0.2 ARBYJ7000 ARBYJ5000 Interface regulator VK SYJ7000 SYJ5000 Applicatable solenoid valve 0.1 VZ P P Regulating port 0 50 100 150 200 0 Proof pressure 1.5MPa VF Flow rate (l/min(ANR)) Max. operating pressure 1.0MPa VFR (1) Setting pressure range 0.05 to 0.7MPa PARBYJ7000-00-P (2) Ambient and fluid temperature 5 to 60C VP7 Thread size for connection 0.6 M5 X

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-7 7 Series ZM Vacuum Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM) Vacuum Switch ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSM1-015 Diaphragm ZSM1-021 Model ZSE1-00-14 Solid state Electronic circuit 0 to 101 kPa 3% full span or less (Fixed) 1 to 10% of the set pressure (Changeable) 1 to 10% of the set pressure

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

(Refer to section 7.6.) 0h Refer to Name and 0 0 function column.

JXCx-OMY0004

Movement Speed Position Acceleration Deceleration Force Value speed Speed Area 1 Area 2 In pos force force mode mm/s (mm) mm/s2 mm/s2 (mm) (mm) (mm) mm/s 0 1 Absolute 100 50.00 1000 1000 0 0 0 100 0 0 0, 1 2 Relative 50 10.00 1000 1000 0 0 0 100 0 0 0, 1 (E.g.) Flow chart Controller (1) Select/input Step No.1.

Modular F.R.L. Units

0 !1 q r e w t i u y o !0 !

NCM

0.003 0 0.003 0 0.003 0 0.003 0 0.003 0 0.003 0 0.003 0 0.003 0 0.003 0 0.003 Note 1) F dimension for NCME150 not applicable.

ZR

-00---X105 ZSE4E-00---X105 Part no.

Modular Type Air Filters Series AF

MPa 0.06 0.06 0.06 P1 = 0.1 MPa 0.04 0.04 0.04 0.02 0.02 0.02 0 0 2000 4000 6000 00 00 5000 10 15000 2000 4000 6000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AF60 Rc1 0.10 0.08 Pressure drop (MPa) P1 = 0.7 MPa P1 = 0.5 MPa P1 = 0.3 MPa 0.06 P1 = 0.1 MPa 0.04 0.02 0 0 5000 10 15000 Flow rate (l/min (ANR)) Specific Product Precautions Be sure to read before handling

Standard Combinations

0.15 0.15 0.15 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 00 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure (MPa) Inlet pressure (MPa) Inlet pressure (MPa) Specific Product Precautions Piping Selection Warning Caution 1.

H/DL/L/LL

(mm) Model Effective area (mm2) Weight (g) 3-connection thread M L 8 6 4 DT04-00 32 DT06-00 36 10 10 10 12 15 16 5.7 14 23.5 23.5 DT08-00 47 12 14 16 25 24.5 DT10-00 10 12 26.5 70 DT12-00 28.5 14 17 70 17 19 49 55 17 17 Female Connector: DHF H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Vacuum System Peripherals:

Power supply voltage S L Straight type 3 m Right angle type 3 m Without cable connector Flow Characteristics 0 1 24 VDC 12 to 15 VDC N 0 Option Input signal 10 Bracket 0 1 2 3 4 Current type 4 to 20 mA DC Current type 0 to 20 mA DC Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Preset input 20 Output pressure (kPa) Nil B Without bracket Flat bracket L-bracket 30 40 C Option 50 Monitor

7.5

Straight fitting Nil Component module Elbow fitting (Upward) 0 Communication connector spec.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VZ VZ 3 5 0 X20 ( ) VF VFR Entry is the same as standard products.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Rc G NPT NPTF Nil F N T A, B port 1/8 Stations Symbol Note A B 8 6 4 2 0 03 3 stations Applicable solenoid valve Refer to page 326. Applicable blanking plate assembly Refer to page 329.

Modular Type Air Filter Series AF

0 !1 Drain q r e w t i u y o !0 !

VQ7-6/7-8

0 !0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!