Compact Guide Cylinder

100 200 0.1 10 30 50 51 100 200 Stroke [mm] Stroke [mm] L = 50 mm, V = 400 mm/s L = 100 mm, V = 400 mm/s 100 100 50 50 50 50 10 10 40 40 40 40 Load mass m [kg] Load mass m [kg] 32 32 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 0.1 10 30 50 51 100 200 0.1 10 30 50 51 100 200 Stroke [mm] Stroke [mm] 12 MGPK Series L L m m Plate Material Aluminum Alloy /MGPKM Vertical Mounting

VFR

Caution When using exhaust cleaner, mount it downwards. 3-5-88 Manifold with Exhaust Cleaner Plug-in type/Non plug-in type 235.5 204 (72) 70 [71.5] 60 60 24 [23] 11 R5.5 21 B B B B A A A A P = 51 71.5 (Pitch) 71.5 6 [2] 209 250 D side mounting U side mounting P = 51 (Pitch) 6 [2] D side mounting U side mounting n: Stations Stations Formula L1 = 51 x n + 92 L2 = 51 x n + 110 2 194 212 3 245

CG1

Front trunnion (mm) CA1 126 to 200st ZZ Z Bore size (mm) 1 to 50st 51 to 100st 101 to 125st CS1 20 25 32 40 46 131 156 181 51 136 161 186 211 51 138 163 188 213 62 155 180 205 230 Clevis pins and snap rings are attached.

5

RHC With Rod Trunnion With Head Trunnion RZQ Z + Stroke TX CD Z + Stroke TX CD 51 40 3.2 3.2 40 51 6.8 x 3.4 6.8 20.5 7.5 40 57 6.8 20.5 LX LZ LX LZ 7.5 40 57 6.8 x 3.4 (mm) Mounting Part no.

5 Port Solenoid Valve

Bottom 1/4 (Rc,G,NPT/NPTF) Side P: 1/2 ( T kit 1 to 10 stations) VQC400-51 T kit: Terminal block box (Rc, G, NPT/NPTF) R: 3/4 VQC4000 VV5QC41S kit: Serial transmission VQC401-51 ( 1 to 12 stations: EX500) S kit (Rc, G, NPT/NPTF) L kit: Lead wire 1 to 12 stations: EX250 M kit: Circular connector Note 1) One-touch fittings in inch sizes are also available.

Table of Contents

51 Series MHSL3 Dimensions MHSL3-100D, 125D CB CA P (Finger opening port) P (Finger closing port) 3-SA, counterbore dia.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VQ7 EXH block disk SUP block disk 1305 Series VFR5000 Manifold: Plug-in Type/Non Plug-in Type 235.5 Plug-in type (With terminal block): VV5FR5-01TStation 1Bore size 204 (72) 60 11 60 4 U side Manual override (Non-locking) 21 R5.5 B B B B n A A A A B B B A B B B B A A A A 3 A A L2 L1 2 P = 51 11 11 71.5 (Pitch) P = 51 (Pitch) 1 6 [2] 71.5 Stations 24 [23] 20 91 114 179 Light/Surge voltage

Free Mount Cylinder

57 51 60 68 74 10 st 56 62 56 65 73 79 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5 st 51 57 61 70 78 84 10 st 56 62 66 75 83 89 15 st 61 72 76 85 93 99 6 10 16 20 25 32 17 19 Free Mount Cylinder Single Acting, Single Rod, Spring Return/Extend Series CU Dimensions: Single Acting, Spring Extend 6, 10 2-P through M5 x 0.8 Plug with fixed orifice Rod end nut 2-P

MG

100 300 200 0.1 10 20 30 40 50 51 100 300 200 Stroke (mm) Stroke (mm) (15) l = 50 mm, V = 400 mm/s (16) l = 100 mm, V = 400 mm/s 50 50 100 100 100 100 80 80 80 80 63 63 50, 63 50, 63 50 50 10 10 40 40 40 40 5 5 Load weight m (kg) Load weight m (kg) 32 32 32 32 25 25 25 25 20 20 20 20 1 1 16 16 16 16 12 12 12 12 0.1 10 20 30 40 50 51 100 300 200 0.110 20 30 40 50 51 100 300 200 Stroke (mm

Magnetically Coupled Rodless Cylinder

G 3 4 5 6 6 7 7 8.5 8.5 HA 17 24 30 36 41 52 62 80 92 HT 10.5 14 17 24 23.5 29 36 45 51 J x E M4 x 0.7 x 6 M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 M10 x 1.5 x 15 M10 x 1.5 x 15 A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 HR 17 24 30 36 41 51 62 80 90 HS 6 5 8.5 7.5 6.5

VQ5000

Lead wire length L O: Approx. 600mm L 1: Approx. 1500mm L 2: Approx. 3000mm 2-Rc1/8 (external pilot port) Plug-in type Plug lead type 46.8 59.2 15.5 17 22 51 69 83.5 117 U D U D U D 184.5 (3 position, metal type) 117 83.5 69 51 22 17 15.5 9 9 200 (3 position, metal type) 179 (single, double, 3 position, rubber type) 194.5 (single, double, 3 position, rubber type) 123.3 106 D side U side D

NCG/CG1

CG1 Rod Side Trunnion Style mm TV TV ZZ + Stroke 126 to 200 st ZZ Z Bore size (mm) 1 to 50 st 51 to 100 st 101 to 125 st Clevis pin and snap ring are shipped together. 20 25 32 40 46 131 156 181 Head side trunnion style: NCGTN/CG1TN 51 136 161 186 211 Bracket mounting range 51 138 163 188 213 62 155 180 205 230 2-TD8 (Pin O.D.)

AC Servo Motor Driver

TROUBLESHOOTING Display Name Definition Cause Action (Note 2) Alarm details AL.51 Overload 2 Machine collision or the like caused a continuous maximum current for a few seconds. Change the driver. 1. Driver fault. The servo motor is disconnected on the machine side and then the servo motor is test-operated. The alarm (AL.51) does not occur.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

63 RQ m1: Weight of cylinder operating part kg m2: Load weight kg V: Piston speed m/s 10 50 MU 40 32 5.0 4.0 3.0 (g) Table (2) Weight of Cylinder Movable Parts/Without Built-in Magnet D25 Cylinder stroke (mm) 2.0 Bore size 20 16 (mm) 5 10 15 20 25 30 35 40 45 50 75 100 -X 1.0 5 6 7 8 10 11 12 12 209 11 13 15 17 19 16 0.5 0.4 0.3 15 18 21 24 27 31 34 37 40 44 20 Data 24 28 33 37 42 46 51

Hydraulic

57 104 59 51 93.5 100 63.5 58.5 65 114 70 58.5 104 114 Hydraulic Cylinders Auto Switch Specifications Specific Product Precautions Be sure to read auto switch precautions on pages 139 through 141 before handling auto switches.

SX

Manifold block assembly q (Metric size) SX5000-51-2A (Inch size) SX5000-51-16A R, P port SX3000 (Metric size): With One-touch fittings for 8 (Inch size): With One-touch fittings for 5/16" R, P port SX5000 (Metric size): With One-touch fittings for 10 (Inch size): With One-touch fittings for 3/18" SUP/EXH block assembly (Metric size) SX3000-51-2A (Inch size) SX3000-51-16A w End block assembly

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P (51) (6) 3 3 t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 G P MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.) 10 (Clamp stroke) 0 d0.05 0 d0.05 Z D E E G 6 51 77 67.5 10.5 Diamond type Round type (Guide pin dia.: 17.5 or more) H

Air Cylinder

M8 x 1.25 6 7 7 14 18 18 22 26 11 11 14 17 17 Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 11 11 13 16 M10 x 1.25 M12 x 1.75 M12 x 1.75 102 116 10 10 100 Stroke range Bore size Without rod boot With rod boot N MM P S WA (mm) (mm) H ZZ d e f h L ZZ 40 50 63 80 Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 18.5 18.5 51

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PB45] 0 Notch depth Command notch filter setting frequency Depth Setting Setting Setting Setting Frequency Frequency Frequency [dB] [Hz] [Hz] [Hz] value value value value 0 1 2 3 4 5 6 7 8 9 -40.0 -24.1 -18.1 -14.5 -12.0 -10.1 00 01 02 03 Disabled 20 21 22 23 24 25 26 27 28 29 70 66 62 59 56 53 51 48 46 45 43 41 40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Lead wire length L O: Approx. 600mm L 1: Approx. 1500mm L 2: Approx. 3000mm 2-Rc1/8 (external pilot port) Plug-in type Plug lead type 46.8 59.2 15.5 17 22 51 69 83.5 117 U D U D U D 184.5 (3 position, metal type) 117 83.5 69 51 22 17 15.5 9 9 200 (3 position, metal type) 179 (single, double, 3 position, rubber type) 194.5 (single, double, 3 position, rubber type) 123.3 106 D side U side D