15

Additionally, when running the positioning operation, do not set within 2 mm of both ends. 11LEJS XAH9 XA 32 Up to 114 97.5 13 115 to 190 116.5 191 to 300 134 25ADimensions [mm] Size Motor type FA FB FC FD FE FF FG FH LEC [mm] LEYGlM (Sliding bearing) NZ, NX M4 x 0.7 7.5 46 30 3.7 47 45 NY M3 x 0.5 6 45 30 4.2 47 45 NM1 3.4 17 31 22 2.5 36 45 19 NM2 3.4 28 31 30 3.5 56 45 30 Size Stroke

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

31 31 36 Y 20 20 20 23 Z 8 8 8 10 LD 4 4 4 4 LT LS 25 28 28 30 Bore size 40 47 47 54 13 17 17 22 26 32 32 41 26 26 26 31 41 45 45 50 5 6 6 8 8 8 8 10 21 25 25 27 149 153 155 191 The bracket is shipped together.

REA/REB

Contents Replacement parts: Seal kits 10 REBH15-PS Above numbers 29, 30, 31, 32, 33, 34, 35 15 REBH25-PS 77 Series REBH Construction/25, 32 Dual axis type/REBHT @0 !9 q !4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

DMade to Order Specifications (For details, refer to page 8-31-1.)

MY1

9 Qty. 1 1 2 2 2 4 Material Special resin Stainless steel NBR NBR NBR NBR Description Seal belt Dust seal band Scraper Piston seal Tube gasket O-ring GMY10 P7 5.33 x 3.05 x 1.14 8-11-31 31 Series MY1B Construction: 16 to 100 MY1B16 to 100 t u y w q !1 #0 #1 #2 @4 !9 r @3 #3 i !

SI unit ( device)

30 29 28 27 26 25 24 31 30 29 28 27 26 25 24 Force output 4 24-31 Output 28-31: Setting value F0 1 1 1 1 0 0 0 0 0F 0 0 0 0 1 1 1 1 Hold last state Structure of Output Switching Counts (index 68) The output switching count parameter consists of thirty-two sub-indices that represent bit fields with a size of 32 bits each.

0.55

2 x 5.2 (For mounting) (1/8) 12(PA) port (Mounting groove for M6 thread) (6.4) 12 (63) 64 9.4 38.5 63 56.5 31.5 51.5 31 (60) (74) (43) 3/8, 1/2 1(P), 3(R) port (Distance between ports) 3R 1P NO 40 3 9 M5 x 0.8 (Breathing hole) 42 30.5 100.8 For vacuum/VPA742V-1l (-F) 03 04 A B 3/8, 1/2 2(A) port 51.5 2 x 5.2 (For mounting) NC 33 4.5 2A (2) 31 41 (9) 115.1 2 x 5.2 (For mounting) 1/8 12(PA

5-Port Solenoid Valve

slave modes TB 4 in/4 out, 31 slave modes TC 1 power supply system w Type 8 in/8 out, 31 slave modes TD 4 in/4 out, 31 slave modes Y CANopen (Negative common) ZE EtherNet/IP (Negative common) 10 Side ported 11 Bottom ported*1 * When not selecting an SI unit, the symbol will be nil. *1 The SY5000 manifold base is used for the bottom-ported SY3000.

MXS Series Air Slide Table

31 26 32 32 32 Shock absorber at extension end A Stroke 75 to 125 A Max. 25 Shock absorber at retraction end Other dimensions not indicated are the same as basic model.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11 10 12 14 13 12 J 17 28 40 52 78 105 K 23.5 33.5 43.5 53.5 63.5 88.5 KA 82.5 112.5 NA 4 4 4 4 8 8 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5 108.5 134.5 ZZ 71 81 95 109 134 160 13-/22-MXQ8-10 13-/22-MXQ8-20 13-/22-MXQ8-30 13-/22-MXQ8-40 13-/22-MXQ8-50 13-/22-MXQ8-75 Note) Note) 1322Note) Refer to the bottom view

VM

30.5 20.8 16.1 22 12 10 12 46 62 63 31.5 30.5 21.5 4 21.8 20.8 14 17 3.2 31 32 VHK-B2A 49 17 1 30 25 21.5 31 1(P): Male Thread, 2 (A): One-touch Fitting Effective area (mm2) Bracket assembly no.

3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

Cylinder with Lock Series CLS

27 M30 x 1.5 Up to 1000 3 30 14 35 50 47 161 78 18 110 146 1/4 128 36 90 59 43 16 114 64 110 M14 x 1.5 15 31 27 M30 x 1.5 Up to 1000 5 46 56 53 182 95 23 132 169 1/4 144 40 90 59 43 14 18.5 130 74 120 M16 x 1.5 17 36 30.5 M36 x 1.5 39 Up to 1200 16 30 60 106 118 48 17 135 41 25 39 63 204 36 167 195 3/8 162 45 115 70 18.5 149 86 20 35 M18 x 1.5 M40 x 1.5 5 M12 x 1.75 Up to 1200 21 34

Refrigerated Air Dryers Series IDF/IDU

AFF IDF6E 555 617 I D F 31 IDF-BP300 IDF-BP301 IDF-BP302 IDF-BP304 IDF8E 187 129 3.3 3/4 IDF1E 1.5 56 114 549 440 627 647 AM IDF11E 1.6 3/8 IDF2E 21 628 443 41 1 IDF-BP316 IDU-BP305 IDU-BP306 IDU-BP307 710 210 5.3 136 774 IDF15E IDF3E 642 445 AMD 506 202 100 572 1.6 IDU3E 3/8 I D U 603 175 110 625 2.3 31 IDU4E 1/2 AMH 627 187 129 647 3.3 IDU6E 3/4 AME IDF22E, 37E IDU22E to 75E IDF55E, 75E

3 Port Solenoid Valve/

M12 connector pin number G1/2 terminal number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) 3(R) (31) e (11) q 3(R) (31) e (11) q 3(R) (31) e (11) q 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal

0.4

, 4 in/4 out, 31 slave modes, 2 power supply systems AS-Interface, 8 in/8 out, 31 slave modes, 1 power supply systems AS-Interface, 4 in/4 out, 31 slave modes, 1 power supply systems 1 to 4 stations (8) SDTA VQ 1/2 IP67 compliant 1 to 2 stations (4) SDTB SI unit: EX600 Note) A separate gateway unit and communication cable are required.

HRX-OM-Q026

The displayed circulating fluid temperature is the fluid temperature discharged from the thermo-chiller (31 oC).

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Applicable manifold model DXT154-34-1A VV5F1-31 AN120-M5 VV5F1-31 AN110-01 VV5F1-30 DXT144-13-2A VV5F1-30/31 Description Throttle valve VV5F1-30 VFS Silencer VS4 Blanking plate assembly VQ7 How to Order Manifold Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no. (Example) VV5F1-30-051 1 pc.

ISO Cylinder

31 31 10 6.5 29 29 29 12 7.5 31 31 31 8 5 29.5 29.5 29.5 10 5 27.5 27.5 27.5 12 6 29.5 29.5 29.5 D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV 16 7.5 36 [30] 62 [56] 88 [82] 20 10.5 34.5 59.5 84.5 25 12 34.5 59.5 84.5 16 6 34.5 [28.5] 60.5 [54.5] 86.5 [80.5] 16 2 30.5 [24.5] 56.5 [50.5] 82.5 [76.5] 20 5 29 54 79 25 6.5 29 54 79 D-F7l/J79 D-F7lW D-J79W

CLS

31 36 41 46 56 14 14 14 17 17 20 35 35 39 39 39 49 Up to 1000 3 5 30 46 M14 x 1.5 M30 x 1.5 161 78 18 110 146 128 16 114 64 110 27 Up to 1000 M16 x 1.5 M36 x 1.5 182 95 23 132 169 144 18.5 130 74 120 30.5 Up to 1200 16 21 35 5 5.5 6 30 34 42 25 31 41 M18 x 1.5 M40 x 1.5 204 106 36 167 195 162 18.5 149 86 135 35 Up to 1200 M12 x 1.75 118 226 124 40.5 187 216 182 18.5 165 97 135