17

20 30 40 51 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 110 (50) 110 (50) 100 100 100 Load mass m lbs (kg) Load mass m lbs (kg) 80 100 100 80 80 80 100 80 22 (10) 22 (10) 80 11 (5) 10 20 29 30 51 50 300 200 100 11 (5) 10 20 29 30 51 50 300 200 100 Stroke (mm) Stroke (mm) 13 Model Selection Series MGP L L m m Ball Bushing Horizontal Mounting (19

Cylinder with Lock Series MNB

202 202 214 214 401 to 500 227 227 239 239 501 to 600 264 264 601 to 700 276 276 701 to 750 32 40 50 63 80 100 36 23 12.5 12.5 12.5 12.5 12.5 12.5 75 75 75 75 75 75 136 144 152 152 164 164 41 23 51 25 51 25 56 29 61 29 151 to 200 ZZ Bore size (mm) 1 to 50 244 259 289 303 363 383 51 to 100 256 271 301 315 375 395 101 to 150 269 284 314 328 388 408 201 to 300 319 334 364 378 438 458 301 to

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Refer to the Option on page 51 to order it separately.

Fieldbus System

Refer to page 51 for mounting method.

CL

CNA Head Side Flange Style CNS Without rod boot With rod boot Bore size (mm) ZZ 182 198 201 227 ZZ 202 220 223 247 CLS 20 25 32 40 CLQ MLGP Rod Side Trunnion Style Rod side trunnion style: CLG1UN RLQ Without rod boot With rod boot Bore size (mm) BZ TDe8 TE TF TH TR TS TV TW TX TY TZ Z Z TT MLU 8 0.025 0.047 10 0.025 0.047 12 0.032 0.059 14 0.032 0.059 66 73 73 82 46 51 51 62 10 10 10 10 5.5

CNA

40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 Data 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) e l ZZ M MM N P Q H S T V W ZZ f h 40 50 63 80 100 40 50 63 80 100 11 27 1/4 37 to 39.5 51

0.4

VQC2100-51 2 sets (Single solenoid part no.) VQC2200-51 6 sets (Double solenoid part no.) Manifold base (8 stations) VV5QC21-08C8FD0-S Specify the part numbers for valves and options together beneath the manifold base part number.

CNA

40 10 102 17 67 20 18 12 15 11 M10 x 1.25 7 18 Up to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 x 1.75 11 22 Up to 750 Data 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) e l ZZ M MM N P Q H S T V W ZZ f h 40 50 63 80 100 40 50 63 80 100 11 27 1/4 37 to 39.5 51

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5 CY1R50 25 110 8.6 10 M8 x 1.25 15 Rc 1/4 159 48 42 60 41 10 50 113 176 82 30 CY1R63 24 118 8.6 10 M8 x 1.25 16 Rc 1/4 171 60 48 70 47 10 60 121 188 94

JXCx-OMT0023

Analog CH data time [ms] length [ms] CH1 (trigger) CH2 CH3 CH4 (64 points) CH1 Servo motor speed [r/min] 51 51. CH2 Torque [%] ALM EM1 MBR RD 56.8 3600 CH3 Effective load ratio [%] CH1 Servo motor speed [r/min] 52 52. CH2 Torque [%] ALM EM1 RD TLC 3.5 227 CH3 Droop pulses [pulse] (unit: 100 pulses) CH1 Servo motor speed [r/min] 61 61.

1.63

200 10 100 50 51 200 Stroke (mm) Stroke (mm) (19) L = 50 mm, V = 400 mm/s (20) L = 100 mm, V = 400 mm/s 100 100 63 63 50 50, 63 50, 63 50 10 10 40 40 Load mass m (kg) Load mass m (kg) 40 40 32 32 32 32 25 25 25 25 20 20 20 20 1 1 0.1 0.1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) 508 Model Selection MGPW Series L L m m Horizontal Mounting Ball bushing MGPWL20 to 25, MGPWA20

C95

-100 Hub 1-50 Hub 151-200 Hub 201-300 Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 42 43 52 52 58 65 23 23 25 25 29 29 12.5 12.5 12.5 12.5 12.5 12.5 25 25 25 25 25 25 37.5 37.5 37.5 37.5 37.5 37.5 50 50 50 50 50 50 75 75 75 75 75 75 75 75 87 87 103 103 88 88 100 100 116 116 100 100 112 112 128 128 113 113 125 125 141 141 138 138 150 150 166 166 32 40 50 63 80 100 1.11-8 Series

CY1

7 29 M8 x 1.25 x 10 10.5 CY1R40 10 11 6.5 5 2 43 7 65 63.5 67 62 36 66 36 62 8 36 M8 x 1.25 x 10 13 CY1R50 14 14 8.2 5 2 53 8.5 83 81.5 85 80 45 84 45 80 9 45 M10 x 1.5 x 15 17 CY1R63 15 14 8.2 5 3 66 8.5 95 93.5 97 92 51 96 51 90 9.5 51 M10 x 1.5 x 15 18 K L LD M MM N P Q QW TC W WP WS X Y Z PW T Model CY1R 6 7 34 3.5 3.5 M3 x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10

Direct Solenoid

Perl t Nns 4024 ilVS /1034 l'll/S 4044 2 PGition 3 Podtoo 2 Posilion 3 Poition 2 Poition 1121.42244324,4424 r13,,42344334, 4/|i|{ 4144,4244 12 VDC A06-51 AO9-51 A07-51 A10-51 A08-51 24 VDC A06-52 409-52 A07-52 A10-52 A08-52 48 VDC A06-53 A09-53 A07-53 A10-53 A08-53 Powar Conaumptlon: (13.2 WEtts) D.C. solenoidE alwaF draw the same amount of powsr, regardless of th6 posltlon of the plunger

45

Manifold block assembly q (Metric size) SX5000-51-2A (Inch size) SX5000-51-16A R, P port SX3000 (Metric size): With One-touch fittings for 8 (Inch size): With One-touch fittings for 5/16" R, P port SX5000 (Metric size): With One-touch fittings for 10 (Inch size): With One-touch fittings for 3/18" SUP/EXH block assembly (Metric size) SX3000-51-2A (Inch size) SX3000-51-16A w End block assembly

CNA

20 40 10 102 17 67 20 18 12 15 11 M10 X 1.25 7 18 to 600 40 37 102 32 139 1/4 1/4 78 25 52 14 123 21 83 20 23 18 17 13 M12 X 1.75 11 22 to 750 40 37 116 41 160 1/4 1/4 92 30 52 14 144 21 98 22 25 20 19 16 M12 X 1.75 11 26 to 750 With rod boot (mm) (mm) Bore (mm) 40 50 63 80 100 Bore (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h ZZ 11 M14 X 1.5 27 1/4 37 to 39.5 51

Stainless Steel 316 Fittings

KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 8 14 8 14 10 16 18 24 36 34 41 67 33 40 66 33 40 66 30 38 63 51 67 19.4 23.8 19.4 23.8 20.9

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

P = 51 SYJ Stations SZ VP4 D side Plug assembly VVFS2000-30A(Option: Refer to page 1227.)

4/5 Port Solenoid Valve

size Plate fixing screw Manual override Body Option Rated voltage Light/surge voltage suppressor Lead wire Note) Do not loosen plate fixing screw. 23 Series SYJ5000 Flow Characteristics/Weight Flow characteristics Note 1) Weight (g) Note 2, 3) Port size Valve model Type of actuation 1 4/2 (P A/B) 4, 2 (A, B) 1, 5, 3 (P, EA, EB) 4/2 5/3 (A/B EA/EB) L/M plug connector 47 66 M8 connector 51

Plug-in/Plug Lead: Single Unit

(Noise reduction of 35 dB or more) VQC SQ VQ0 VQ4 VQ5 VQZ VQD Plug-in type Plug lead type Lead wire length LU D0: 600 mm LU D1: 1500 mm LU D2: 3000 mm 2-Rc 1/8 (External pilot port) 184.5 (3 position, metal type) 200 (3 position, metal type) 194.5 (Single, Double, 3 position, Rubber type) 123.3 106 15.5 17 22 51 69 83.5 117 179 (Single, Double, 3 position, Rubber type) 117 83.5 69 51 22