Vacuum System Peripherals: R L B 01 1 Nil F G Rc 1 8 ... ...
0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF5050-00-A ARBF3050-00-A ARBF4050-00-A 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 0.1 0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 3-5-6 7 Series VFR2000/3000/4000/5000/6000 Caution
C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct
Porting specifications 4(A), 2(B) port Port size Applicable valve model Wiring Base model 1(P), 5(R1) 3 (R2) 4(A) 2(B) Stations Plug-in type VV5ZS2-51F VV5ZS2-51G 2 to 16 stations With D-sub connector With attachment plug lead wire Rc VZS250-FZ 1 8 Rc 1 8 Side Grommet L plug connector M plug connector K plug connector C4 VZS250G L M KZ Non plug-in type VV5ZS2-51 2 to 24 stations C6
0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for
VVQ2000-P-1-C8 Port plug VVQ0-58A (For VQC1000) VVQ1000-58A (For VQC2000) EXH block plate assembly Elbow fitting assembly VVQ1000-F-L VVQ2000-F-L Electrical wiring specifications [-K] C3 C4 C6 M5 VVQC1000-19AD S C6 (SUP port) D-sub connector Terminal no. 6 One-touch fitting SOL.
How to Order Manifold Assembly Example (SS5Y3-12S6l-l) 2-position single SY3130-5U1-C6 (3 sets) Digital Output Unit EX600-DYPB Digital Input Unit EX600-DXPD P, E port size (One-touch fittings) SI Unit Note) End Plate Note) 2-position double SY3230-5U1-C6 (2 sets) EX600-SDN1A EX600-ED2 SY3000 8 5/16" SY5000 10 3/8" Symbol Nil N 1 0 PE PE X X A B A B A B A B A B 3/5E 4 A 3/5E For N, sizes
How to Order Manifold Assembly Example (SS5Y3-10S6l-l) SS5Y3-10S6Q42-05B-C6 1 set (Type 10 5-station manifold base part no.)
PF2M7 10 C6 L M q w r t y u i e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min w Flow adjustment valve/Piping entry direction With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02, N1, N2, F1, F2 Straight Symbol Port size Rated flow
O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3
C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct
"":'0 'v' L-4-L-,j-i) . ., :2 ~ Interface ~ ~ i!i regulator .:;,.~ E ... ~ .. SUP gallery block disc: AXT634-10A EXH gallery block disc: AXT634-11A Cb"''lC ~~E i~ ~ L . .
VFN DIN Rail Manifold Common SUP/Common EXH How to Order Type 45 (Non plug-in type) Applicable solenoid valve C D 45 05 C6 VV5Z3 G L M D G L M D VZ34Stations 4(A), 2(B) port size VZ3502 2 stations Applicable blanking plate assembly VZ3000-69-2A 20 One-touch fitting for 4 One-touch fitting for 6 20 stations C4 SUP/EXH block mounting position C6 DIN rail length specified B D U Both sides:
Flow range Sensor 0.2 l/min 0.5 l/min 1 l/min 2 l/min 10 l/min 25 l/min 50 l/min 100 l/min 0.2 l/min 10 l/min (5 l/min) PFM710 PFM510 0.2 l/min 10.5 l/min (5.2 l/min) 10.5 l/min (5.2 l/min) 0 0.5 l/min 25 l/min (12.5 l/min) PFM725 PFM525 0.5 l/min 26.3 l/min (13.1 l/min) 26.3 l/min (13.1 l/min) 0 1 l/min 50 l/min (25 l/min) PFM750 PFM550 1 l/min 52.5 l/min (26.2 l/min) 52.5 l/min (26.2 l/
L plug connector (L) (Made to order) 100V AC 200V AC 110V AC 220V AC 0.6 0.7 M plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.
5 Lead wire housing assembly VVQC1000-L25-0-1 L kit with 0.6 m lead wire VVQC1000-L25-1-1 L kit with 1.5 m lead wire VVQC1000-L25-2-1 L kit with 3.0 m lead wire !6 Circular connector housing assembly VVQC1000-M26-1 M kit, 26 pins 677 VQC5000 Series Manifold Assembly Part No. D-side end plate assembly Manifold block assembly !8 Manifold block assembly part no. !
L plug connector (L) VQ 2.0 3.0 M plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.
A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37 0.45 0.55 0.36 0.50 0.35 0.32 0.38 0.36 0.32 0.37 2.2 1.4 1.7 2.1 1.4 1.8 1/8 1/8 1/8 1
entry L plug connector D DO With connector Without connector DIN terminal 3 Note) Do not replace V111 (G, H, L, M, W) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only.
Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch