Process Gas Diaphragm Valve

Please refer to page 1114. 2 ports Wetted Parts Material Specifications Operating Parameters Status Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Wetted Parts Body Surface finish Diaphragm Seat S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) AZ4542 AZ3542 Normally closed (N.C.)

Series AK1000

Code Connections NPT 1/4 inch 1/4 inch compression 3/8 inch compression Material 4 4T 6T Code Body Brass Poppet Diaphragm Seat material B S SH Code Material PCTFE (Standard) Vespel 3) PEEK 316 SS 316 SS No code VS PK 316 SS Hastelloy C-22 Hastelloy C-22 Ports 3) Not available with SH material.

AP10PA

S SHP SH 316L SS secondary remelt 316L SS Ni-Cr-Mo alloy Ni-Cr-Mo alloy Ni-Cr-Mo alloy Seat material Ni-Cr-Mo alloy H Material PCTFE (Standard) Polyimide 3) PTFE 4) 5) Code No code VS TF Gauge port (Inlete, Outletr) Pressure gauge 1) psig/bar unit MPa unit Surface finish Code Code Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) 3) Not available

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

0.4

kit) Lead wire length 3.0 m SS L1 Manifold Options Manifold Exploded View SW L2 S kit (Serial transmission kit) Single wiring SS Applicable stations How to Increase Manifold Stations 01 1 station S kit (Serial transmission kit) Double wiring COM.

SQ1000/2000

Nil M MB Note 1) For the double solenoid specification, the symbol for Function is "D". Note 2) Only rubber seal types are applicable.

17

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ There are other applicable auto switches other than the listed above. For details, refer to page 1197. For details about auto switches with pre-wired connector, refer to pages 1648 and 1649.

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Option S Gauge port (Inlete, Outletr) Specification Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 Pressure gauge 1) SHP Standard (Cv: 0.09) High flow (Cv: 0.15) No code HF Code psig/bar unit MPa unit Surface finish No gauge port No code Seat material Surface finish Ra 10 in. (0.25 m) Standard 25 in. (0.62 m) Code No pressure

TABLE OF CONTENTS

430F SS NPT NPT EXAMPLE: Inline Filter NPT 60 Micron Brass Body No.F660-A FILTER/STRAINER SPECIFICATIONS: Pipe Size: 1/8 NPT CV=.23 Screen Rating: 43 Micron or 140 Micron Max.

CATALOG VC10

430F SS NPT NPT EXAMPLE: Inline Filter NPT 60 Micron Brass Body No.F660-A FILTER/STRAINER SPECIFICATIONS: Pipe Size: 1/8 NPT CV=.23 Screen Rating: 43 Micron or 140 Micron Max.

Wireless System

Cable core wire colors Brown White Blue Black Green/Yellow 1 2 3 4 5 Connections 19 Accessories EX600-W Series u Power Supply Cable with M12 Connector (B-coded) SPEEDCON PCA1564927 Socket specification, Cable length (L) 1564927 Straight 2 m 1564930 Straight 6 m 1564943 Angle 2 m 1564969 Angle 6 m Straight connector type Angle connector type 50 L 36.3 14.8 50 L 44.5 2 1 5 2 1 5 28 5.9 M12

SL5200

Surface finish Code Surface finish Ra max 10 in. (0.25 m) Standard 7 in. (0.18 m) 5 in. (0.13 m) Pressure gauge unit 3) M V X Code Unit psig/bar MPa Gauge port (Outlete) No code MPA Connections or Pressure gauge 2) psig/bar unit MPa unit No gauge port 1/4 inch face seal (Male) 1/4 inch face seal (Female) No pressure gauge Code Porting Configuration 3) Pressure gauge unit MPa or psig/bar selectable

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Construction Wetted Parts Material AK3542 Wetted Parts S Body 316 SS Diaphragm Ni-Co Alloy Seat PCTFE (Option: Polyimide) Diaphragm Seat Body 1 Diaphragm Valves for General Applications Air Operated Type Series AK3542 & 4542 Specications Operating Parameters AK3542 AK4542 Status Normally closed (N.C.)

1

m is number of I/O Units.

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m. Example) -2M9NL !

Aluminum High Vacuum Angle Valve

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m.

Magnetically Coupled Rodless Cylinder

x mcos + msin P m P 0.1 x m + m P D M 1.6 x D M 5.0 x D M 5.0 x m m m mv P m Pv m L mv Determination of allowable load mass & pressure P L Pv Inclined operation (Refer to page 29) L 1 Review of operating conditions Determination of load factor () = Load mass (m) Maximum allowable load (m max) + Static moment (M) Allowable static moment (Mmax) + Dynamic moment (ME) (Refer to page 27)

•

L M ,. Flat type Flat with rib (mm) Flat type Flat with rib mm M~ .. 'B c l D E Model M 'B C D E F G 1:4 1:6 Y 'A Y .' 1:6 H 1:8 H F G Flat with rib H H Flat Aatwith rib Flat ZPT25g ...

REA/REB

Max. load weight 2 = M/Mmax Review M1, M2, M3. Mmax is the allowable moment. 2. Static moment 3 = Me/Memax Review Me1, Me3. Memax is the allowable moment. 3.

CY1

Lead wire length (m) Note 1) Load voltage Auto switch no.