Stability of suction position,

0 % b % b % b % b e u e u y e u y e u e o ZP3 u y y y ZP3E ZP3E % a % a % a % a % a ZP2 q w q w q w q w q w ZP2V Male thread (for direct mounting) With male thread adapter (Vacuum inlet: Vertical) With male thread adapter (Vacuum inlet: Lateral) With female thread adapter (Vacuum inlet: Vertical) With female thread adapter (Vacuum inlet: Lateral) ZP ZPT ZPR Component Parts (Male thread) Component

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Compatible Fluid: Coolant, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～50, Driving Type: Pilot Type, Orifice Diameter(Ø): 25, Voltage: 24 V DC, Sealing materials

Size: 4 [ø25(ø16)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: A (NBR seal), Thread: Rc(PT), Port Size: 25A (1), Voltage: 5 (24VDC), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 4 [ø25(ø16)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: A (NBR seal), Thread: Rc(PT), Port Size: 25A (1), Voltage: 5 (24VDC), Lead Wire: D (DIN Terminal), Manual Override: Non-locking Push Style, Bracket: B (Bracket)

Size: 4 [ø25(ø16)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR seal, Thread: Rc(PT), Port Size: 1, Voltage: 24VDC, Lead Wire: DIN Terminal, Manual Override: Non-locking Push Style, Bracket: Bracket, CE Compliant: -

Size: 4 [ø25(ø16)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR seal, Thread: Rc(PT), Port Size: 1, Voltage: 100VAC 50/60HZ, Lead Wire: Conduit Terminal w/Light, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: 4 [ø25(ø16)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR seal, Thread: Rc(PT), Port Size: 1, Voltage: 100VAC 50/60HZ, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: 4 [ø25(ø16)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR seal, Thread: Rc(PT), Port Size: 1, Voltage: 200VAC 50/60HZ, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: 4 [ø25(ø16)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR seal, Thread: Rc(PT), Port Size: 1, Voltage: 100VAC 50/60HZ, Lead Wire: Conduit Terminal, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: 4 [ø25(ø16)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR seal, Thread: Rc(PT), Port Size: 1, Voltage: 110VAC 50/60HZ, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: 4 [ø25(ø16)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR seal, Thread: Rc(PT), Port Size: 1, Voltage: 24VDC, Lead Wire: Conduit Terminal w/Light, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: 4 [ø25(ø16)], Valve Type: 1 [NC (Operating Pressure 0.5MPa)], Sealant: NBR seal, Thread: Rc(PT), Port Size: 1, Voltage: 24VDC, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Electric Actuator/Slider Type

How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Air Slide Table

the MXQ6(A, B).

2/3 Port Valve

steel body Aluminium body S B Refer to table q for application.

High Power Cylinder:

Q Q Q Connector 5V 12V 24V IC C80C Q Q Q No Q A33 PLC Q 12V Terminal conduit A34 Q 100V 200V 12V Yes DIN terminal Relay PLC A44 Q Grommet Diagnostic indication (2 color) B59W Q Q 3 wire (NPN) 3 wire (PNP) H7A1 Q q Q 5V 12V IC H7A2 Q Grommet q Q H7B Q q Q 2 wire 12V H7C Q Q Connector Q Q Solid state switch 3 wire (NPN) 2 wire 5V 12V G39 IC Q Terminal conduit K39 12V 3 wire (NPN