VXD21/22/23

FKM/EPDM O-ring e O-ring e 10A to 25A 15A to 25A Diaphragm assembly Diaphragm assembly Stainless steel, Brass, NBR Stainless steel, Brass, NBR r r Stainless steel, Brass FKM/EPDM 32A to 50A 32A to 50A Valve spring Valve spring Stainless steel Stainless steel, Copper Stainless steel, NBR Stainless steel Class B molded Stainless steel Stainless steel, Silver FKM/EPDM, PTFE t t 10A to

VXP21/22/23

steel, Brass FKM/EPDM O-ring e O-ring e 10A to 25A 15A to 25A Stainless steel, Brass, NBR Stainless steel, Brass, NBR Disk assembly Disk assembly r r Stainless steel, Brass FKM/EPDM 32A to 50A 32A to 50A Valve spring Valve spring Stainless steel Stainless steel, Copper Stainless steel, NBR Stainless steel Class B molded Stainless steel Stainless steel, Silver FKM/EPDM, PTFE t t 10A

3

Analog Output Flow rate/Analog output Fluid temperature/Analog output A B B Output Output A C Voltage output 0.6 V 1 V 04/20/40 11 21 C D C Current output 2.4 mA 4 mA 1 V 1.5 V 6 mA 1.4 V 5.6 mA 1.5 V 5.9 mA 5 V Voltage output 4 mA 20 mA Current output C D The values of B vary according to the range.

VNH

240 VAC 50/60 Hz 9 Other Option Accessory Function plate (D sealing, with thread): DXT060-32-4A 17-4-32 3 Series VNH High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111

AIR CYLINDER

In this case, the rigidity of the machinery should also be examined. 9 - 7) How to order 25A D B 125 100 D-M9* C S2 Auto-switch Stroke Bore size Mounting bracket Built-in magnet Secondary battery production facility Air Cylinder Built-in magnet Bore size D Built-in magnet 125 125mm Nil Without magnet 140 140mm 160 160mm Mounting B L *Refer to Maximum stroke table(P5 Table 1) F G Auto-switch

High Pressure Coolant Valve

Accessory Function plate for VO307 (D sealing, with thread): DXT152-14-5A 628 A VNH Series High Pressure Coolant Valve 3.5 MPa, 7.0 MPa Specifications 3 port valve 2 port valve A B Model A B VNH211 -15A A B VNH311 -20A A B VNH411 -25A A B VNH113 -10A A B VNH213 -15A A B VNH313 -20A A B VNH413 -25A A B VNH133 -10A A B VNH233 -15A A B VNH333 -20A A B VNH433 -25A VNH111 -10A Operating fluid

Process Valve

size: 32A, 40A, 50A Applicable cable O.D. 6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below Manual override (Non-locking push type) G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) P1 P2 F E D A B B C A J Main port 1 (A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNA5-32A VNA6

Coolant Valve

) Nil B Note) Note) Only valve sizes 1, 2, 3 and 4.

Fluoropolymer Piping Equipment

Applicable flange size Applicable tubing size (mm) 2 4 4 5 5 5 6 6 6 Size Symbol Applicable flange size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 6 x 4 1/4" x 5/32" 2 2 3 1 2 3 2 3 4 B B C A B C B C D LVW 12 x 10 1/2" x 3/8" LQ1 19 x 16 3/4"

New

Piping A B 1 2 3 4 20A NBR/POM Without Grommet 25A NBR/POM A With A Direct piping type 40A 24 VDC 50A A B Direct piping type B C D E F G H J K L M N P Q R S T U V W 65A 5 100 VAC Grommet Flange type with surge voltage suppressor 110 VAC A B C D Direct piping type 200 VAC Flange type 230 VAC 80A 6 Flange body I type 24 VDC Flange body II type 24 VDC DIN terminal with surge voltage suppressor

53

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

VQ5000

B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22 51 69 117 2-Rc1/8 (external pilot port) With connector on D side (FD) 12 Base Mounted

Lightweight and Compact

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

Proposals for Energy Saving

No. of tubes Color Black (B) Black (B) Black (B) Black (B) Black (B) Black (B) Black (B) Max. operating length m Model O.D. TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 1 1.5 4 2.5 2 1 3 2 1 6 4 1.5 2 1 3 8 5 2 1 Best Pneumatics Best Pneumatics Refer to page 2.5-3 of No. 4 for details.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Applicable piping size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 2 2 3 1 2 3 2 3 4 B B C A B C B C D 6 x 4 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 1/4" x 5/32" 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 12 x 10 1/2" x 3/8" 19 x 16 3/4" x 5/8" 25 x 22 1" x 7/8" Dimensions Union Flange: LQ3F Metric Size (S) T P M L2 L2 L1 L1

DOC1001322

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B !

Compact

B When LECP1, LECP6 or LECPMJ is used.

HRX-OM-W032

1 pc. (4) Barrel nipple 25A 1 pc.

Size: 7 (ø50), Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: A (NBR), Thread: N (NPT), Port Size: 50A (2), Voltage: 3 (110VAC 50/60HZ), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: None, X200: X200