Body Size: 5, Thread: G, Port Size: 1, Handle/Bonnet Material: Aluminum, Options: None, Semi-Standard: None, Made to Order: Body: Red

Body Size: 5, Thread: Rc, Port Size: 10 (1), Handle/Bonnet Material: A (Flame Resistant PBT), Options: BS (w/Bracket + Built-in Silencer, EXH Port)

Body Size: 5, Thread: Rc, Port Size: 10 (1), Handle/Bonnet Material: A (Flame Resistant PBT), Options: S (Built-in Silencer, EXH Port)

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: Rc1, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Size

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: Rc1, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Size

JXCx-OMY0008

In this document TM and (R) are not specified. -EtherCAT is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany. -83No.

KFx-OMV0011

Body Connection Thread Tightening Method Caution (1) Fittings with sealant: R, NPT 1) First, tighten the fitting by hand, then use a wrench appropriate for the hexagon flats of the body to tighten it a further two or three turns. For a tightening torque guide, see the table below. If the fitting is tightened with excessive torque, the fitting may break.

A

D E R S E R I E S ADH 4000 H E A V Y A U T O D R A I N S Y M B O L S ADH4 00 04 T H R E A D .Rc(PT) N .NPT M A X.

Table of Contents

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

Table of Contents

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

Table of Contents

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Digital Flow Switch (Integrated display type)

Example: PF2M710x-xx-Lx-xxx 0x0013 (19) 0 R Product ID Example: PF2M710x-xx-Lx-xxx (20) 0 R Product text FloW sensor 0x0014 Initial value is indicated as 8-digit. 16 octets fixed character string 0x0015 (21) 0 R Serial number Example: "x" (22) 0 R Hardware version HW-Vx.y x: Large revision number y: Small revision number 0x0016 (23) 0 R Software version FW-Vx.y x: Large revision number y

Secondary Batteries

(mm) 1 8 4 Port size R Connection thread R Applicable tubing O.D.

CLA

ack) 0-A54, D-B54, D-A44(C), D-A34(C) 0-A67 Zener <;Siode Reed SWitch , Blue b_ ~ue a, (black) <'ad) H Surge ab$Ol'bef D-A56 D-A33(C) :R~ ~tC h ---R;~~~r-: I-) ~: ( ';' ) L 0 ' , ' : Zener diode : ,--_.

NVEPA|VEFseies

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l l

AC Servo Motor Driver (SSCNET /H Type)

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Electro-Pneumatic Valve NVEP/NVEF Series

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l

IDX-OM-M051

Reference 6.4 Electric wiring diagram [IDF100/125F/150F-30-W] For Option R GFCI PE TB1 THR MC1 CM OLR MC1 HM PRR SWL PLC TB2 Y0 1 MC1 Operation COM0 2 Y3 3 Failure COM3 4 MC1 Y1 X4 5 Remote control PRR COM1 X0 6 THR X1 PRS2 PRS3 X3 P P L N 24V EDV PE Symbol Description CM Refrigerating compressor For Option V OLR Overload relay MC1 Magnetic contactor THR Thermal relay TB1,2 Terminal block

AC Servo Motor Driver (SSCNET Type)

Acceleration/ deceleration time 0 ~ 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min) Move distance 0 ~ 2147483647 pulse Sets movement distance. -35- 6.6.2 Motor speed Configuration Motorspeed (r/min) configuration. * r/min (rpm): Indicated motor rotation speed (motor rotations/min) Rotation speed must be between 0 and the