0.4

r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQ1A01 VQ1B01 4(A) 2(B) 2(B) 4(A) 5

42

/set) When supplying two different pressures to one manifold, this is used to shut off between stations with different pressures. 11.8 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked SUP passage blocked Indication labels to confirm the blocking position are attached.

VFR

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)

Body Size: 50, Thread: Rc, Port Size: 1, Handle/Bonnet Material: Flame Resistant PBT, Options: w/Bracket + Built-in Silencer, EXH Port, Semi-Standard: Flow Direction: Right to Left, Made to Order: Body: Red

Body Size: 50, Thread: Rc, Port Size: 10 (1), Handle/Bonnet Material: A (Flame Resistant PBT), Options: BS (w/Bracket + Built-in Silencer, EXH Port), Semi-Standard: R (Flow Direction: Right to Left), Made to Order: X1 (Body: Red)

V

D E R (N)VM400 A C T U AT O R O N LY P A R T N O.

Series VQ Base Mounted Metal Seal/Rubber Seal

R port. 2.

0.4

r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01 2(B) 4(A) 4

VQ5000

Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages

Non-contact Gripper

P PL M ML C D XT661-2A-(R, L) M5 x 0.8 5 M2 x 0.4 3.2 20 XT661-4A-(R, L) M5 x 0.8 5 M4 x 0.7 5 32.8 40 XT661-6A-(R, L) M5 x 0.8 5 M4 x 0.7 5 47 60 XT661-8A-(R, L) Rc 1/8 M4 x 0.7 5 47 80 XT661-10A-(R, L) Rc 1/8 M4 x 0.7 5 47 100 ZP2 ZP2V ZP ZPT ZPR Dimensions [Low Profile Cyclone Type] XT661 XT661 XT661-3A-(R, L)-X260 XT661-2A-(R, L)-X260 1.6 Air supply port 1.6 Air supply port 20 1.8

VQZ1000/2000/3000

(A) AC circuit DC circuit 1 2 1 2 (B) NL: Neon light R: Resister LED: Emitting diode R: Resister Valve Mounting NL R R LED After confirming the gasket is correctly placed under the valve, securely tighten the bolts with the proper torque shown in the table below.

VQ4000

(Refer to pages 2-5-40 to 2-5-43.) 26.4 48.7 3(R2) 5(R1) Rc 3/8 SUP port 54.5 P1 Po 1(P) 25 13.5 Po Circuit diagram Plug-in type Plug lead type SUP/EXH block plate VVQ4000-16A 11.8 When different pressures, high and low, are supplied to manifold, a SUP block plate is inserted between the stations under different pressures. 21.8 R P R R P R R P R SUP/EXH passage blocked EXH passage blocked

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

IIIIIIIIII

Model Number Description R-800-XX-W/K Precision regulator with adjusting knob R-800-XX-W/S Precision regulator with 1/4" adjusting shaft R-800-XX-W/OS Precision regulator with slotted adjusting shaft R-801-XX Factory pre-set regulator R-810-XX-W/K Non-bleed, non-relieving with adjusting knob R-810-XX-W/S Non-bleed, non-relieving with 1/4" adjusting shaft R-810-XX-W/OS Non-bleed, non-relieving

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3C (Tube O.D. 3/8", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT), Packaging: 1 (Standard Packaging Equivalent to Class

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3C (Tube O.D. 3/8", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT), Packaging: 1 (Standard Packaging Equivalent to Class M5.5

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5E (Tube O.D. 3/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male)

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3C (Tube O.D. 3/8", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT), Packaging: 1 (Standard Packaging Equivalent to Class

Fitting Type: B (Branch Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 3A (Tube O.D. 1/4", Tubing Size 3/8"x1/4"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)