Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Applications Medical Equipment, Laboratory Instruments, Pick 'n Place, Process Control Specifications Regulator Type: Vacuum Relieving, Wetted Materials: Cast Aluminum, Buna-N, EPDM, Acetal, Polyurethane, Stainless Steel, Supply Consumption: .6 LPM, Max Supply: 30” (760 mm) Hg, Temperature Range: 40° - 150° F (4° - 66° C), Effect of Supply Variation: ± 5% of span, Sensitivity: 5” H2O,

Table of Contents

Body type Plug-in type ARBF5050-00-P-1 Non plug-in type ARBF5050-00-P-2 P port regulation ARBF5050-00-A-1 ARBF5050-00-A-2 A port regulation ARBF5050-00-B-1 ARBF5050-00-B-2 B port regulation Body type Plug-in type AXT512-14-1A Non plug-in type Part no. For details, refer to Serial Transmission catalog separately.

Table of Contents

VX2121-00 VX2221-00 VX2321-00 VX2131-00 VX2231-00 VX2331-00 VX2241-00 VX2341-00 VX2113-00 VX2123-00 VX2223-00 VX2323-00 VX2133-00 VX2233-00 VX2333-00 VX2243-00 VX2343-00 2 2 0.17 4.1 4.1 0.17 3 3 0.33 7.9 7.9 0.33 3.0 3.0 4.5 4.5 0.61 15 15 0.61 6 6 1.1 26 26 1.1 Refer to Glossary of Terms on front matter 10 for details on the max. operating pressure differential and the max. system pressure

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VVFS3000-R-03-1 VVFS3000-R-03-2 VP4 Body type Plug-in type Non plug-in type P port regulation A port regulation B port regulation ARBF3050-00-B-1 ARBF3050-00-B-2 ARBF3050-00-P-1 ARBF3050-00-P-2 S0700 ARBF3050-00-A-1 ARBF3050-00-A-2 VQ SUP block disk When supplying manifold with more than two different pressures, high and low, insert a block disk in between stations subjected to different

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

ARBF4050-00-P-2 P port regulation ARBF4050-00-A-1 ARBF4050-00-A-2 A port regulation ARBF4050-00-B-1 ARBF4050-00-B-2 B port regulation Made to Order Manifold with serial transmission kit Plug-in type Solenoid valve wiring process reduced considerably. Body type Plug-in type AXT634-11A Non plug-in type Part no. For details, refer to page 1198.

2/3 Port Valve

Flow rate Max. operating pressuredifferential MPa Max.system Pressure (MPa) Orifice size (mm) Proof pressure (MPa) (1) Weight (g) Cv Effective area (mm2) Model Air Oil AC DC AC DC 2.0 1.5 1.5 1.5 1.1 0.6 0.5 0.5 2.0 1.5 1.2 1.2 3.0 3.0 1.7 2.0 2 0.17 3 VX2111-00 VX2121-00 VX2221-00 VX2321-00 VX2131-00 VX2231-00 VX2331-00 VX2241-00 VX2341-00 220 220 350 490 220 350 490 350

VFS

Body type Plug-in type ARBF5050-00-P-1 Non plug-in type ARBF5050-00-P-2 P port regulation ARBF5050-00-A-1 ARBF5050-00-A-2 A port regulation ARBF5050-00-B-1 ARBF5050-00-B-2 B port regulation Body type Plug-in type AXT512-14-1A Non plug-in type Part no. For details, refer to Serial Transmission catalog separately.

F

24.5 15.2 13.7 18.5 25.6/17.7 5/32 KQU03-00 10.4 34 18 10.4 9.7 16 3 10 KQU10-00 18.5 48 27.5 18.5 16.1 21 40/28.4 3/16 KQU05-00 11.4 36.5 20.5 11.4 10.6 16.5 3.5 12 KQU12-00 20.9 51 30 20.9 18.1 22 57.4/45.4 1/4 KQU07-00 13.2 38 21.5 13.2 12 17 4.6 5/16 KQU09-00 15.2 42.5 24.5 15.2 13.7 18.5 6 D I F F E R E N T D I A.