SQ1000/2000

or less 3.2 (0.18) 25 or less 100 Rubber seal SQ1430 26 or less 3.2 (0.18) 20 or less 100 Metal seal Exhaust center SQ1431 33 or less 4.5 (0.25) 25 or less 100 Rubber seal SQ1530 26 or less 2.9 (0.16) 20 or less 100 Metal seal Pressure center SQ1531 33 or less 3.2 (0.18) 25 or less 100 Rubber seal Dual 3 port valve A B C SQ1 31 33 or less 3.2 (0.18) 25 or less 95 Rubber seal JIS symbols

reduces flow setting time

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

20.9 30.2 (30.3) 23 (24) AS221FSG-02-03 (S) 5/32" 8.2 AS221FSG-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FSG-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FSG-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FSG-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FSG-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FSG-02-

LEC-OM02904

B2B2 3 rev 1 (2) (1) 200 TM MR Configurator2 PC02 MBR (MBR)OFF(Tb) 0 ms 0 1000 PC03 *ENRS 0h 0 0 A B AB CCW CW A A 0 B B A A 1 B B 0 1 0 1 PC04 **COP1 C-1 0h 0 0 0 02 14 1()(16) 11.1.2 02 1: 4 116 11.1.2 5 21 5 No.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Type SS5YJ3-20,SS5YJ3-21P The 3 way valve can be used on the 4 way manifold by simply sealing off the unused "R" port with plug VJ3000-33-1.

SYJ300/500/700

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

Metal Seal/Rubber Seal Series VQ Body Ported

C6 C8 One-touch fitting for 6 One-touch fitting for 6 01 02 C6 C8 Name plate N Note) When two or more symbols are specified, indicate them alphabetically.

LEC-OM069xx

Current Capacity Inrush Current Maximum Power Supply Applicable Main Circuit DRIVER Capacity per Control Control Servomotor Power Model Main Circuit Main Circuit DRIVER Supply LECYM2Circuit [Arms] Circuit [Arms] [A0-p] Capacity [kVA] [A0-p] [kW] 0.1 V5 0.3 2 70 0.2 V7 0.7 3 Single-phase, 0.2 33 200 V 0.4 V8 1.2 5 0.75 V9 1.9 9 33 Note 1.

HRX-OM-S004

5.13.1 Temperature unit change. 5-33 5.13.2 Setting/checking of temperature unit change . 5-33 5.14 Pressure unit Change . 5-34 5.14.1 Pressure unit change . 5-34 5.14.2 Setting/checking of pressure unit change . 5-34 5.15 Data reset function . 5-35 5.15.1 Data reset function . 5-35 5.15.2 How to operate reset function . 5-35 5.16 Accumulated Operating Time Reset Function . 5-36 5.16.1 Accumulated

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN200-02 AN200-02 AN200-02 AN110-01 Port plug VVQZ100-CP This is used when changing piping location.

OMU0023

Data No.1 8 02 0106 sent. 9 01 02 004B 0001 01 02 01 Acquires the INP signal information.

Mini Free Mount Cylinder

For Axial Mounting With Auto Switch (Built-in Magnet) For Lateral Mounting A B 27 29 31 33 38 43 48 53 27 29 31 33 38 43 48 53 27 29 31 33 38 43 48 53 C D Cylinder model Mounting bolt size CDUJB6-4 -6 -8 -10 -15 -20 -25 -30 CDUJB8-4 -6 -8 -10 -15 -20 -25 -30 CDUJB10-4 -6 -8 -10 -15 -20 -25 -30 Cylinder model Mounting bolt size CDUJB6-4 -6 -8 -10 -15 -20 -25 -30 CDUJB8-4 -6 -8 -10 -15 -20

PA300/500/700

NO NC 87 (PA port) Rc 1/8 (Mounting hole) 2-7.2 30 PA 41.5 91.4 84.4 91.4 60 16.5 1(P) 41.5 PA (P port) Rc 3/8 (Pitch) 88 31 33 7.5 L2 L1 (PA port) Rc 1/8 PA 61.5 66 2(A) 2(A) 47.5 13.5 (A port) Rc 3/8 n: Station n L L1 L2 Formula L1 = 33 x n + 29 L2 = 33 x n + 14 6 227 212 7 260 245 8 293 278 9 326 311 10 359 344 2 95 80 3 128 113 4 161 146 5 194 179 5-5-23 12 Series VPA300/500/700 Dimensions

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal 77 VQ1400 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Exhaust center VQ1401 25 or less 1.0 0.70 0.30 0.20 0.25 47 or less 0.16 33 or less Rubber seal VQ1500 0.72 0.70 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal 20 or less Pressure center VQ1501 0.65 0.85 0.42 0.20 0.18 47 or less 0.21 33 or less Rubber seal 25 or less VQ2100 2.0

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

or less Rubber seal 77 VQ1400 20 or less 0.72 0.68 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal Exhaust center VQ1401 25 or less 1.0 0.70 0.30 0.20 0.25 47 or less 0.16 33 or less Rubber seal VQ1500 0.72 0.70 0.25 0.15 0.18 40 or less 0.16 26 or less Metal seal 20 or less Pressure center VQ1501 0.65 0.85 0.42 0.20 0.18 47 or less 0.21 33 or less Rubber seal 25 or less VQ2100 2.0

Air Cylinder Series CM2

NT-02 NT-03 NT-04 13 15.0 12.5 M8 x 1.25 5 17 19.6 16.5 6 M10 x 1.25 22 25.4 21.0 8 M14 x 1.5 2 x LD Mounting Nut Applicable pin part no. Part no.

HRX-OM-Q026

5.14.1 Pressure unit change . 5-33 5.14.2 Setting/checking of pressure unit change . 5-33 5.15 Data Reset Function . 5-34 5.15.1 Data reset function . 5-34 5.15.2 How to operate reset function . 5-34 5.16 Accumulated Operating Time Reset Function . 5-35 5.16.1 Accumulated operating time reset function . 5-35 5.16.2 How to operate accumulated operating time reset function . 5-35 5.17 Pump

Table of Contents

Stroke + 334 (364) 33 2-T-slot 2 33 90 62 Stroke + 32 3-8H10 depth 20 92 Body mounting reference plane 90 (T-slot pitch) 3.3 20 5.8 67 1.7 5.3 62 T-slot 1 dimensions (Switch groove) 8-M6 x 1 thread depth 20 92 58 (88) 10 10 11.5 Stroke + 216 45 9.4 4.5 10 18 The body mounting reference plane should be used as a standard when mounting onto equipment.

VP300/500/700

Common exhaust: VV3P3-41Stations 1-02 (G) (E) (T) (D, Y) N.C. N.O.

Modular Type Air Filters Series AF

IN OUT How To Order B VHS 30 N 02 Z X513 EXH Residual Pressure Relief 3 Port Valve Dimensions mm With External Epoxy Coating, Stainless Fasteners B C D E F G H I Model A Body Size Symbol 20 30 40 VHS20 VHS30 VHS40 59 78 107 20 29 39 40 53 70 34 46 63 22 45 55 58 33 42 44 28 30 36 45 55 63 Applicable Model AC21 AC31 AC41 Name Plate In Imperial Units (PSI, F) Caution Thread Type N NPT If