E-P HYREG ® Series VY1

mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02

VFM300

0 Polyacetal Guide bushing NBR Mini Y packing @1 !1 Urethane rubber Cushion 3.5-54 VFM200 Series VFM200 Basic/VFM250-02-00 JIS Symbol 16N F.O.F. 0.5MPa supply 1mm P.T. 2mm O.T. 3mm T.T. Roller Lever/VFM250-02-01, VFM250-02-01S JIS Symbol 8N F.O.F. 0.5MPa supply 2.2mm P.T. 4mm O.T. 6.2mm T.T.

Speed Controller: Standard Type Series AS In-line Type

8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 R 1/8 14.3 14.6 7.2 18 35.6 14.1 1.2 31.6 AS220-N02-SD NPT 1/4 17.5 NPT 1/4 AS220-F02-SD G 1/4 AS220-02-SD Rc 1/4 17 R 1/4 18 19.5 7.2 27.2 40.7 18 1.2 36.7 AS320-N02-SD NPT 1/4 NPT 1/4 AS320-F02-SD G 1/4 AS320-02-SD Rc 1/4 19 R 1/4 22.5 24.3 9.8 30 55.3 22.4 1.2 49.3 AS320-N03-SD NPT 3/8 NPT 3/8 AS320-F03-SD G 3/8 AS320-03-SD Rc 3/8

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Rc 1/8, 1/4 300 (Lead wire length) EVS VFN ( ): Rc 1/8 01 02 01 02 01 02 01 02 3 position double check: VZS3650-FZ01 02 2 position double: VZS3250-FZ3 position closed center: VZS3350-FZ3 position exhaust center: VZS3450-FZ3 position pressure center: VZS3550-FZ149.5 (3 position: 157) 300 (Lead wire length) 300 (Lead wire length) Other dimensions are the same as the single type.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Speed controller System figure System Solenoid valve SYJ7l40-01 Rc(PT)1/8 (S = 12.6mm2) AN110-01 (S = 35mm2) 4 X 1/8 AS2301F-01-04 A 02 03 AS3301F-06 6 X 1/4 B q 02 03 AS3301F-08 SYJ7l40-02 Rc(PT)1/4 (S = 12.6mm2) 8 X 1/4 C AN200-02 (S = 35mm2) 02 03 AS3301F-10 10 X 1/4 D 12 X 1/4 12 X 1/2 AS4001F-12 w E 1.2-53 Series SYJ7000 How to Order Light and surge voltage suppressor

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

VV317 05 1 A 02 02 CE-compliant Base type: 1/4 Nil Q CE-compliant VV317-02-051-02-A VT317 manifold Option Please indicate manifold base type, applicable manifold valve and blanking plate when ordering. Nil A Without mounting bracket With mounting bracket Common exhaust type only Thread type Ordering example: VV317-02-051-02-A 1 pc. (5-station manifold base) VO317-1G 4 pcs.

VFA3000

1 8 1 4 1 8 1 4 1 8 1 4 VFA32302 position double 0.17 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3330-X1 3 position closed center 0.32 1 8 11.7 (0.65) 14.4 (0.8) 01 02 Base mounted (EXH: ) 1 8 VFA3430-X1 3 position exhaust center 0.32 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3530-X1 3 position pressure center 0.32 1 8 14.4 (0.8) 9.9 (0.55) 16.2 (0.9) 10.8 (0.6) 01 02 (EXH: ) 1 8 1 4 3

0.55

/Dimensions Standard/VPA344-1l 01 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 11.2 30 18.5 1/8, 1/4 3(R) port 1/8 12(PA) port 2A NO 35 43 NC 12 12 3R 1P NC (1/8) 12(PA) port 12 6.7 58.2 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port For vacuum/VPA344V-1l 01 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 18.5 1/8, 1/4 3(R) port

Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

0.01

Metal Case 1 10 SFD 1 02 Metal case suitable for an atmosphere exposed to organic solvents and chemicals HAA HAW AT Clean air filter Port size Connection size Rc 1/4 NPT 1/4 G 1/4 Symbol IDF IDU Size Max. flow rate 100 L/min (ANR) 02 N02 F02 Symbol 1 Specifications IDF FS The SFD2 is not applicable. The metal case is not available with a clean One-touch fitting.

Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

24 (58) VF (C10) (02) VFR VP7 38.5 31.5 24.5 3 VP4 23.4 Mounting holes 48 (58) 15 15 1.5 1.5 VQ P 3 5 1 2-PE port 2-Rc(PT)1/8 R port VQ4 22.2 Die cast hole For manifold gasket positioning Rc(PT)1/4 P port VQZ VQD 3 4 5 3 4 5 0 1 0 1 DIN connector (Y): VQZ3 2 (R)wYwC6, C8, C10, 02 L plug connector (L): VQZ3 2 (R)wLwC6, C8, C10, 02 VZS 155.5 <157.5> 300 (Lead wire length) 71 <72> VFS Indicator

Vacuum System Peripherals:

C1 Model (Stock item) Pressure range Note) Model Unit Connecting Note (kPa) GZ46-K-01 to 02 100 to 0 1 8 1 8 1 4 kPa R , kPa With covering assembly GZ46-K-01 to 02-C, C1 100 to 0 R ,1 4 1 8 1 4 kPa GZ46-K-01 to 02M 100 to 0 GZ46-K2K-01 to 02 100 to 200 R , M5 (Female thread) kPa GZ46E-K-01 to 02M 100 to 0 1 8 1 4 R , M5 (Female thread) R , 1 8 1 4 kPa Note) Do not apply pressure that exceeds

5 Port Air Operated Valve

2 position single VFA5120(-P) 02 03 2 position double VFA5220(-P) 02 03 119 110 94 97.5 44 44 28.5 (28.2) (28.2) (Distance between ports) (Distance between ports) 4A 4A 3 24 32 24 32 3 2B 2B 28 2 x 4.3 (For mounting) 1/8 (Pilot port: Upward) 1/4, 3/8 [4 (A), 2 (B) port] 36.5 28 2 x 4.3 (For mounting) 1/8 (Pilot port: Upward) 1/4, 3/8 [4 (A), 2 (B) port] 1/8 [Pilot port: Lateral (-P)] 1/8

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

VZ5000

) 01 02 01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01 02 MAX. 10 Applicable cable O.D. 3.5 to 7 3-3-71 Series VZ5000 2 Position Double VZ5240 Grommet (G), (H) VZ5240G H 01 02 Manual override (Non-locking) (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm (PE port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) 2-Rc 1/4 (5(R1), 3(R2) port) L

Fieldbus System

2 stations M12 Double wiring Note 1) Double wiring Note 1) PROFIBUS DP 16 02 08 02 16 stations 2 stations 8 stations 2 stations D-sub Note) Specified layout Note 2) (Available up to 32 solenoids) Specified layout Note 2) (Available up to 16 solenoids) CC-Link M12 24 16 24 stations 16 stations Note 1) Double wiring: 2-position single, double, 3-position and 4-position valves can be used on

Table of Contents

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

High Purity Chemical Valve

LVN Valve type Material TL/TIL 0 1 2 N.C. N.O. Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.