HRX-OM-X037

Standard N *2 F *2 Chiller side 1 union Circulating fluid outlet port Filter side Rc1 NPT1 G1 CH1 Circulating fluid return port Rc1 NPT1 G1 Port size Tank drain port Rc3/4 NPT3/4 G3/4 Chiller side 3/4 union Circulating fluid outlet port Filter side Rc3/4 NPT3/4 G3/4 CH2 Circulating fluid return port Rc3/4 NPT3/4 G3/4 Tank drain port Rc1/4 NPT1/4 G1/4 1 Cooling capacity will decrease as pump

HRX-OM-S004

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Option B [Earth leakage breaker] . 4-2 4.2.3 For HRS100/150-**-20-B1,HRS100/150-**-40/46 . 4-3 4.2.4 Setting of circulating fluid temperature . 4-3 4.3 Preparation of circulating fluid . 4-4 4.4 Operation Start and Stop . 4-7 4.4.1 Starting the product . 4-7 4.4.2 Stopping the

ISO Standard Hydraulic Cylinder

(n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) Related Products 2 (Different surfaces and same surface), 1 25 125 165 155 150 145 140 (n 4) 2 (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-F5NT 25 + 55 125 + 55 140 + 55 145 + 55 150 + 55 155

HRX-OM-Y098

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Operation screen (home screen) . 4-3 4.3 Preparation of the Circulating Fluid Supply to the User's Equipment . 4-4 4.4 Operation Start and Stop . 4-6 4.4.1 Setting of circulating fluid temperature . 4-6 4.4.2 Setting of the pump operation mode . 4-7 4.4.3 Starting the Product

Brake mechanism added

+ 40 (n 4) 2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 15 + 40 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 55 60 65 D-A9V (n 2) 2 10 50 50 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 55 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8,

HRX-OM-W060

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Operation screen (home screen) . 4-3 4.3 Preparation of Circulating Fluid Supply to User's Equipment . 4-4 4.4 Operation Start and Stop . 4-6 4.4.1 Setting of circulating fluid temperature . 4-6 4.4.2 Setting of pump operation mode . 4-7 4.4.3 Starting the Product . 4-7 4.4.4

HRX-OM-Q026

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Option B Earth leakage breaker . 4-2 4.2.3 HRSH--20-B1 HRSH--20-S and HRSH--40. 4-3 4.2.4 Setting of circulating fluid temperature . 4-3 4.2.5 Setting of pump operation mode . 4-3 4.3 Preparation of Circulating Fluid Supply to Users Equipment . 4-4 4.4 Operation Start and Stop

HRX-OM-T002

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Option B [Earth leakage breaker], HRS090--40/46. 4-2 4.2.3 Setting of circulating fluid temperature . 4-3 4.3 Preparation of circulating fluid . 4-4 4.4 Operation Start and Stop . 4-7 4.4.1 Starting the product . 4-7 4.4.2 Stopping the product . 4-8 4.5 Check items during startup

A-HEC-OM-J004

Set-up . 4-1 4.1 Set-up, Transport and Transfer. 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.2 Piping . 4-2 4.2.1 Preparation of Cooling Water . 4-3 4.2.2 Quality of Cooling Water . 4-5 TOC-1 A_HEC-OM-J004-4 Table of Contents 4.2.3 Preparation of Recirculating Fluid .4-6 4.2.4 Draining the Recirculating Fluid .4-7 4.3 Wiring. 4-9 4.3.1

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

DOC1001322

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Operation screen (home screen) . 4-3 4.3 Preparation of the Circulating Fluid Supply to the User's Equipment . 4-5 4.4 Operation Start and Stop . 4-7 4.4.1 Setting of circulating fluid temperature . 4-7 4.4.2 Setting of the pump operation mode . 4-8 4.4.3 Starting the Product

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

HRX-OM-I051

fluid . 4-2 4.3.2 Supply of circulating fluid . 4-3 4.4 Requirement for System Startup . 4-4 4.4.1 Turning ON power. 4-4 4.4.2 Circulating fluid temperature setting . 4-5 4.5 System Startup and Shutdown . 4-5 4.5.1 System startup . 4-5 4.5.2 System shutdown . 4-5 Chapter 5 System Operation . 5-1 5.1 Operation Display Panel . 5-1 5.2 Flow Chart of Operation Screen. 5-2 5.3 Operation Screen

HRX-OM-X010

and Shutdown . 4-1 4.1 Pre-check . 4-1 4.1.1 Installation condition . 4-1 4.1.2 Cable connection . 4-1 4.1.3 Installation of circulating fluid and facility water piping . 4-1 4.1.4 Operating signal from your system . 4-1 4.1.5 Check emergency off [EMO] switch . 4-1 4.2 Opening of Facility water Valve . 4-1 4.3 Supply of Circulating Fluid . 4-2 4.3.1 Preparation of circulating fluid . 4-2

HRX-OM-W032

Starting the Product . 4-1 4.1 Before Starting . 4-1 4.2 Preparation for Start . 4-2 4.2.1 Power supply . 4-2 4.2.2 Setting of circulating fluid temperature . 4-2 4.3 Preparation of Circulating Fluid Supply to Users Equipment . 4-3 4.4 Operation Start and Stop . 4-6 4.4.1 Starting the product . 4-6 4.4.2 Stopping the product . 4-7 4.5 Check Items during Startup . 4-8 4.6 Adjustment of Circulating

HRX-OM-K003

Shutdown . 4-1 4.1 Pre-check . 4-1 4.1.1 Installation condition . 4-1 4.1.2 Cable connection . 4-1 4.1.3 Installation of circulating fluid and facility water piping . 4-1 4.1.4 Operating signal from your system . 4-1 4.1.5 Check emergency off [EMO] switch . 4-1 4.2 Opening of Facility water Valve . 4-1 4.3 Supply of Circulating Fluid . 4-2 4.3.1 Preparation of circulating fluid . 4-2 4.3.2

HRX-OM-T004

checking . 4-4 4.4 Communication sequence . 4-7 4.5 Message configuration . 4-8 4.5.1 Message format . 4-8 4.5.2 Message example . 4-9 4.6 Function codes . 4-10 4.7 LRC . 4-10 4.8 Explanation of function codes . 4-11 4.8.1 Function code03 Reading multiple registers . 4-11 4.8.2 Function code06 Writing registers . 4-12 HRS090 Series HRX-OM-T004 Contents 4.8.3 Function code16 Writing multiple

HRX-OM-Q033

checking . 4-4 4.4 Communication sequence . 4-7 4.5 Message configuration . 4-8 4.5.1 Message format . 4-8 4.5.2 Message example . 4-9 4.6 Function codes . 4-10 4.7 LRC . 4-10 4.8 Explanation of function codes . 4-11 4.8.1 Function code03 Reading multiple registers . 4-11 4.8.2 Function code06 Writing registers . 4-12 HRSH Series HRX-OM-Q033 Contents 4.8.3 Function code16 Writing multiple

HRX-OM-S010

4-3 4.3.2 Setting and checking . 4-4 4.4 Communication sequence . 4-7 4.5 Message configuration . 4-8 4.5.1 Message format . 4-8 4.5.2 Message example . 4-9 4.6 Function codes . 4-10 4.7 LRC . 4-10 4.8 Explanation of function codes . 4-11 4.8.1 Function code03 Reading multiple registers . 4-11 HRS100/150 Series 1.1 Communication mode and operation method 1-1 HRX-OM-S010 Chapter 1 Read before