Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

02 1/4, 1/8 port (A port) 25 12 12 G: Approx. 300 H: Approx. 600 (Lead wire length) 48.5 70.7 [72.9] A 18 20 27 34 R P Manual override 2-4.5 (For mounting) 40 4 (Light/surge voltage suppressor) M5 x 0.8 (SYJ714R: X port) + 58 [65] 54.5 42.6 26 20 X 1/4, 1/8 (P, R port) 23 15 48 L plug connector (L): SYJ74-LM plug connector (M): SYJ74-M01 02 01 02 DIN terminal (D): SYJ74-D01 02 M8 connector

VM

only) 0.5 MPa supply L Model A 1.5 mm P.T. 20 N F.O.F. 7.5 VM120-01-00 VM130-01-00 32.5 1.5 mm O.T. 3.5 VM121-01-00 VM131-01-00 28.5 2-4.6 mounting hole 3.0 mm T.T.

Series AS-FM/AS-M/ASD-FM

Flow Rate and Effective Area JIS symbol AS221FM-01 AS231FM-01 Models AS121FM AS131FM AS221FM-02 AS231FM-02 6, 8 3.2, 4 3.2, 4, 6 8, 10 4 6 Metric size 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" Tube O.D. 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 12 7 38 Flow rate l/min (ANR) Controlled flow 0.2 0.1 0.6 Effective area mm Flow direction symbols on body 230 180 100 460 260 390 Flow rate

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Mechanical Valves Series NVM, NVFM, NVZNI

Rmrye her @kd*d and molnt lcvor in rny po.lllon 36C 1 1 Series NVM MECHANICAL VALVES DIMENSIONS NVM830-N01-01 Steel Roller F O F ' 4 4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' 'Length from center to cenler of r o l l e r = 1 5 i n ( 3 8 1 m m ) 0 0 4 ( 1 ) A B c D e F G H J 4.46 113.4 0.57 14.6) 2.34 t59.5) 1 . 5 7 (40) 1.30 (33) 1.03 '26.2)0.59 (15) 1.03 (26.2\ 1.00 '25.4 A B c o E F G

IIIIIII

Rmrye her @kd*d and molnt lcvor in rny po.lllon 36C 1 1 Series NVM MECHANICAL VALVES DIMENSIONS NVM830-N01-01 Steel Roller F O F ' 4 4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' 'Length from center to cenler of r o l l e r = 1 5 i n ( 3 8 1 m m ) 0 0 4 ( 1 ) A B c D e F G H J 4.46 113.4 0.57 14.6) 2.34 t59.5) 1 . 5 7 (40) 1.30 (33) 1.03 '26.2)0.59 (15) 1.03 (26.2\ 1.00 '25.4 A B c o E F G

Stainless Steel One-touch Fittings Series KG

(mm) Weight (g) A D M5 0.8 KGH04-M5 KGH04-01 14 13 9.5 8 17 22 4 4 2.4 9 16 5.6 1 4 KGH04-02 19.5 13.5 14 4 4 1 8 16 18 10 5.6 M5 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 15 18.5 17 11.5 18.5 22.5 23 4 10 12 14 1 8 1 4 6 13.1 13.1 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 24 20.5 15.5 26 27.5 28 26.5 22 30 33.5 14

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M A L1 H/DL L/LL D1 D2 L2 KC H Connection threads KK Male Branch: KPQU, KPGU (M5) KK130 Effective area mm2 D Model L TPH TPS A (M5) 2 x Applicable tubing Connection thread R M H (width across flats) Note1) Applicable tubing O.D. mm Weight g P M P DM D M5 x 0.8 1/8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGU04-M5 KPGU04-01 KPGU04-02 KPGU06-M5 KPGU06-01 KPGU06-02 KPGU08-01 KPGU08-02

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

-02 AS321F AS331F AS421F AS431F Model 3.2, 4, 6 8, 10 Metric size 6, 8, 10 3.2, 4 4 6 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8" 5/32" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 230 180 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 3.5 2.7 4 6 7 10 12 14 24 26 Effective area (mm2) Note)

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

17 10.5 PE port (Rc(PT)1/8) (Rc(PT)1/8) VP 3-Rc(PT)1/8,1/4 10 (Rc(PT)1/4) 18 P/A/R port (Rc(PT)1/4) VQ DIN terminal (Y): VQZ2l5(R)-lYl01 02 01 02 L plug connecter (L): VQZ2l5(R)-lLlVQZ VZ Indicator light 83(84) 300 VS (Lead wire) Cover dia 1.5 Cross section 0.23mm2 Pg.7 53(56.5) 87 MAX.10 Applicable cord O.D.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" O.D. 5/32" 5/32" 1/4" 5/16" Meter-out type Meter-in type Inch size 5/16" 3/8" 3/16"

E-P HYREG

(VY1901 only) 1/4 external pilot port Pressure gauge (Option) G46-10-01 Applicable cable O.D. 4 to 6.5 AN210-02 Silencer (Option) 1/4 Pilot EXH port Pg.7 1/8 Gauge port (For bracket mounting) 4 x M6 thread depth 12 4 x 7 Mounting hole Bracket (Option) VEX9-32A Hexagon socket head cap screw M6 L = 15 (4 pcs.)

HRX-OM-W002

4 4 BL 2 2 BR 1 1 FAN 3 3 1 9 18AWG BK 18AWG BK BR 1 9 FAN 4 7 18AWG BK 18AWG BK BK 4 7 1 1 5 8 18AWG BK BL 18AWG BK 18AWG BK 5 8 (CN5) 2 6 18AWG G/Y G/Y 2 6 Standard Option U 18AWG G/Y G5 [ ] 18AWG G/Y 3 2 1 4 WH 3 RD 3 2 1 3 1 18AWG BK 18AWG BK 20AWG BK 3 2 22AWG BR YL 2 18AWG BK FAN 6 1 22AWG BL BL 1 Condenser Tach GND 10V/PWM +10V 20AWG BK 4 7 18AWG BK BL 7 Option U C2 Standard L N PE

HRX-OM-X084

. 4-1 4.2 Starting and Stopping . 4-2 4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List

KJ

(inch) Model D1 L M Weight (g) Applicable tubing 5 32 KQ2C03-00 KQ2C07-00 KQ2C09-00 KQ2C11-00 17 18 1 2 3 6 10.4 13.2 15.2 17.9 16 17 18.5 21 1 4 5 16 20.5 3 8 22.5 Plug: KQ2P, KQP Applicable fitting size d (inch) Weight (g) Model Note) D L A KQ2P-01 KQP-01 KQ2P-03 KQP-03 KQ2P-05 KQP-05 KQ2P-07 KQP-07 KQ2P-09 KQP-09 KQ2P-11 KQP-11 KQ2P-13 KQP-13 1 8 5 32 3 16 1 4 5 16 3 8 1 2 5 6 6.8 8.5

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Flow Direction Symbols on Body Flow Rate and Sonic Conductance Meter-out type Meter-in type Indication symbol Symbol AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8"

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled