modular-press-e

G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard G27-10-R1 y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch

Modular F.R.L. Pressure Control Equipment

G36-2-01 G36-10-01-L G36-2-01-L G46-10-02 G46-2-02 G46-10-02-L G46-2-02-L G27-10-R1 Note 3) G27-10-R1 Note 3) 0.02 to 0.2 MPa setting Standard G27-10-R1 y IN OUT Round type Note 2) Pressure gauge u r t i (with color zone) 0.02 to 0.2 MPa setting Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] GC3-2AS [GC3P-010AS (Pressure gauge cover only)] ISE35-N-25-MLA [ISE35-N-25-M (Switch

SMC Electronic Switch Series Variations

ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 10, 12 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Flow rate (L/min (ANR)) 180 230 100 260 390 660 790 460 920 1580 1710 Controlled

Speed Controller with Indicator

Port size U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 Needle Valve/Flow Rate Characteristics AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 01, 23 300 03, 04 100 200 01, 23 100 0 0 5 10 0 0 5 10 Number of needle

3 Port Solenoid Valve Metal Seal Series VZ200 1

Type G, L and M: Lead wire 300 mm 4-15-2 3 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ200 Construction (Body ported) N.C.

HRX-OM-X071

MT.01 to MT.05 D.OUT2 MANT CODE No.20 screen Contact output signal 3 function ALM 1 D.OUT3 SEL No.21 screen Contact output signal 3 operation B A/B D.OUT3 TYPE No.22 screen Contact output signal 3 alarm AL.01 AL.01 to AL.32 D.OUT3 ALARM CODE No.23 screen Contact output signal 3 maintenance MT.01 MT.01 to MT.05 D.OUT3 MANT CODE 5.3 List of parameters HRR Series 5-10 HRX-OM-X071 Chapter

Table of Contents

flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM-01 ASD430FM-02 Model 8, 10 6 6, 8 Metric size 4, 6 J Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" Inch size DAir flow (l/min

This is a legacy product, and replaced byVFS2110-6G

This is a legacy product, and replaced byVFS2220-6G-02T

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(Built~in magnet) Mounting Number 01 auto swItches ",B"', Basic . L Foot "', 2 pes. :3: 3 pes. F ' Rod !Ian e S 1 pc.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Flow Rate and Sonic Conductance AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 Model AS121FM AS131FM Symbol Metric size 6,8 8,10 1/8",5/32",3/16",1/4" 3/16",1/4" 5/16" Tubing O.D. 3.2,4 3.2,4,6 4 6 1/4",5/16" 3/8" Inch size 1/8",5/32" 5/32" 3/16" Air flow (L/min(ANR)) 12 38 7 Controlled flow Sonic conductance dm3/(sbar) 0.04 0.12 0.02 Flow Direction Symbols on Body Critical pressure ratio 0.25

VM

01 VM1000-4N-01 Side ported 3 port 2 port T.T.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

IIIIIII

VM OTBS 1 ) vM oTAS (2) Toodc Lcuar vM 088 (1 vM 08A (2) RrCr Butlon{uCrmn' vM 30A' vM 30A. (1) Pnch Button-Ertandd' vM 32A' vM 32A' (1 ) Pnlh BdfotFlurh' vM 33A. (1 vM 33A. (1 ) Sclec{or 90'lUm' vM 34A'(1) vM 34A. (1) S.Lctor l(.y l-ock vM 364 (1) vM 36A (1) Roffat l-eY, Arrl sil. vM 0r F (3) Rolh.Adl. l-.nrAnn sil. vM 13F (3) Rod 4.il. bv.r Antr vM 14F (3) 'Speoify Butbn Color (black, red

Mechanical Valves Series NVM, NVFM, NVZNI

VM OTBS 1 ) vM oTAS (2) Toodc Lcuar vM 088 (1 vM 08A (2) RrCr Butlon{uCrmn' vM 30A' vM 30A. (1) Pnch Button-Ertandd' vM 32A' vM 32A' (1 ) Pnlh BdfotFlurh' vM 33A. (1 vM 33A. (1 ) Sclec{or 90'lUm' vM 34A'(1) vM 34A. (1) S.Lctor l(.y l-ock vM 364 (1) vM 36A (1) Roffat l-eY, Arrl sil. vM 0r F (3) Rolh.Adl. l-.nrAnn sil. vM 13F (3) Rod 4.il. bv.r Antr vM 14F (3) 'Speoify Butbn Color (black, red

Series AS-FM/AS-M/ASD-FM

Flow Rate and Effective Area JIS symbol AS221FM-01 AS231FM-01 Models AS121FM AS131FM AS221FM-02 AS231FM-02 6, 8 3.2, 4 3.2, 4, 6 8, 10 4 6 Metric size 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" Tube O.D. 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 12 7 38 Flow rate l/min (ANR) Controlled flow 0.2 0.1 0.6 Effective area mm Flow direction symbols on body 230 180 100 460 260 390 Flow rate

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L plug connector (L) (Made to order) 100V AC 200V AC 110V AC 220V AC 0.6 0.7 M plug connector (M) (A) 2 1 (P) 3 (R) M plug connector (M) N.O.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Approx. 600 (Lead wire length) 31.5 [38.5] 70.6 [72.8] (Light/surge voltage suppressor) 2-3.2 (For mounting) 23.5 10.9 74.2 [76.4] + 28 25 16.1 21 31.5 [38.5] 18 10 (Bracket) 3.6 1/8 (P, R port) R P 28 8 1.6 (PE port) 14.5 16 L plug connector (L): SYJ72-L-01 (-F) M plug connector (M): SYJ72-M-01 (-F) DIN terminal (D): SYJ72-D-01 (-F) M8 connector (M0): SYJ72-W0-01 (-F) Approx. 300 (Lead wire