CG5-S

(mm) 4 Connection threads Model -01 R 1/8 -02 R 1/4 KGD06-M5 M5 x 0.8 KGLU04-M5 M5 x 0.8 -01 R 1/8 4 -01 R 1/8 6 -02 R 1/4 -02 R 1/4 -03 R 3/8 KGLU06-M5 M5 x 0.8 KGD08-01 R 1/8 -01 R 1/8 6 8 -02 R 1/4 -02 R 1/4 -03 R 3/8 -03 R 3/8 KGD10-02 R 1/4 KGLU08-01 R 1/8 10 -03 R 3/8 -02 R 1/4 8 -04 R 1/2 -03 R 3/8 KGD12-02 R 1/4 KGLU10-02 R 1/4 -03 12 10 R 3/8 -03 R 3/

VCC

Note) Part number for sub-base For 2 port: VCC12-S02 02F [Rc1/4] [G1/4] 02 02F [Rc1/4] [G1/4] Note 2) For 3 port: VCC13-SVCC12(D)-02(F) VCC13-02(F) Manifold 06 VV CC1 M 06 C4 Standard Type (Passage number) Pilot port fitting size 4 One-touch fitting (Antistatic) 6 One-touch fitting (Antistatic) C4 C6 2 3 M 2 port valve, Cleaning valve 3 port valve 2/3 port valves mixed mounting 2 port valve

VQZ1000/2000/3000

for 8 01 02 C6 C8 Rc 1/8 Rc 1/4 F With bracket N Name plate Note) When two or more symbols are specified, indicate them alphabetically.

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

VQ4000

port (21) (21) 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 ( ): Rc 3/8 3 position double check: VQ465 0 1 2 position double: VQ425 3 position closed center: VQ435 3 position exhaust center: VQ445 3 position pressure center: VQ455 0 1 0 1 0 10 1 G H G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator

5 Port Solenoid Valve

compliant VQC 4/5 VQC 4/5 VQZ SQ VFS 1/4 3/8 (Rc, NPT, NPTF, G) 1/4 3/8 (Rc, NPT, NPTF, G) VFR VQ7 1/2 (Rc, NPT, NPTF, G) 1/2 (Rc, NPT, NPTF, G) C6 (for 6) C8 (for 8) C10 (for 10) C12 (for 12) N7 (1/4") N9 (5/16") N11 (3/8") 1/4 3/8 1/4 (Bottom ported) ^{1/2 (Rc, NPT, NPTF, G) V V V V V Page 626 Page 628 Page 630 Page 632 Page 634 3/4 (Rc, NPT, NPTF, G) (Rc, NPT, NPTF}

LEC-OM02704CN

8C 8D 8E 1 8F ABS 90 91 14 13 14 (6) ([4][0]) [4][0] [0][1][F][F] (16)10 8 (7) ([5][0]) [5][0] [0][1][F][F] (16)10 8 (8) ([5][4]) [5][4] [0][1][F][F] (16)10 8 (9) ([5][8]) [5][8] [0][1][F][F] (16)10 8 (10)(DWELL)([6][0]) [6][0] [0][1][F][F] (DWELL) (16)10 8 (11)([6][4]) [6][4] [0][1][F][F] (16)10 8 (12)([1][F]) [1][F] [0][0] 4 (13) ([0][0]) [0][0] [1][2] 0() 0001JOG 0002 0003 0004

Smooth Cylinder/Low Speed Cylinder

Foot: CS2YL H K A AL F S + Stroke With rod boot Width across flats KA Port REA V W G G 2 x P (Rc, NPT, G) 4 x J Cushion valve MM REB REC D B E e LH LY CY CY 4 x LD CX f l LX Y N X LS + Stroke N X Y LT MQ B C ZZ1 + l + Stroke h + l ZZ + Stroke RHC (mm) RZQ Bore size (mm) Stroke range (mm) B C A AL B D E F G J V W K KA LD LH LS 125 140 160 50 47 143 143 115 32 71 43 15 M14 x 1.5 15 17 15 27

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

T2 H D1 T1 D2 D3 L3 L4 L1 L2 9 4.7 10 31 10.3 0.7 27.4 13 AS220-N01-SD NPT 1/8 12.7 NPT 1/8 AS220-F01-SD G 1/8 AS220-01-SD Rc 1/8 12 14.3 R 1/8 14.6 7.2 18 34.7 13.2 1.2 31.6 33 AS220-N02-SD NPT 1/4 17.5 NPT 1/4 AS220-F02-SD G 1/4 AS220-02-SD Rc 1/4 17 18 R 1/4 19.5 7.2 27.2 40.2 17.5 1.2 36.7 72 AS320-N02-SD NPT 3/8 NPT 1/4 AS320-F02-SD G 3/8 AS320-02-SD Rc 3/8 19 22.5 R 1/4 24.3 9.8 30

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Model AS1ll1FSGl-M5 AS2ll1FSGl-01 AS2ll1FSGl-02 AS3ll1FSGl AS4ll1FSGl Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Prevents Micro-Bubbles

SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking type Locking type 60 C (H1) (H2) A B SMC E J B 2-P (mm) Dimensions A B C D E F G H1 H2 J K L M N P Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 Stainless steel 36 47 81 13 19 110.5 112.5 37 26 37 Rc 1/4, 3/8, NPT

High Purity Chemical Valve

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

5 Port Air Operated Valve

493 526 559 128 161 194 227 260 293 326 359 392 425 458 491 524 557 1517 5 Port Air Operated Valve VFA3000/5000 Series Manifold Base Mounted How to Order Manifold VV5FA 3 40 02 2 05 Common exhaust F Series Stations 02 Thread type Nil F N T Series VFA3000 VFA5000 P, R Port size 1/4 3/8 2 stations Symbol 3 5 A, B Port size 1/4 1/4 Rc G NPT NPTF 20 20 stations Up to 10 stations for VV5FA5

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

1/2 1.29 3/4 Bottom-ported 3/4 3/4 1/2 Thread type 3/4 Horizontal Rc Nil F T 1.50 3/4 1 G 1/2 Bottom NPTF 3/4 3-11-2 3 Series EVS7Manifold Specifications How to Order Control unit type Symbol VK Nil A AP M MP F G C E Control component VZ Air filter with auto drain Air filter with manual drain VF Regulator Air release valve VFR Pressure switch Blanking plate (Air release valve) 2(B), 4

Intrinsically Safe Valve

Nil F N T Rc Thread piping A, B port size 2-position single only 53-SY9000 G NPT Symbol Port size Applicable series Type of actuation NPTF 01 02 02 03 53-SY5000 1/8 2-position single (A) 4 2 (B) 53-SY7000 1/4 1 1/4 53-SY9000 1 (P) (EA) 5 3 (EB) 3/8 One-touch fitting (Metric size) Note) 2-position double F2: With side bracket 2 (B) (A) 4 Symbol Port size Applicable series 2 C4 C6 C8 C8 C10

Pilot Operated

terminal: T J I Cable 6 to 12 J 19.5 H 32 19.5 (7.5) (1.6) (5.5) (A) 25 (7.5) (1.6) (5.5) 44 31.5 G 1/2 G H E OUT IN G (A) E OUT IN Bracket (67) (56) 50 C B (28) F 40 G 1/2 Bracket B C (28) 50 (56) (67) 40 F I 2 x Rc 1/4, 3/8, 1/2 2 x Rc 1/4, 3/8, 1/2 VXD2130-04 2-M5 x 8 18 (mm) Grommet Electrical entry (DC, AC/Class H coil) Model Port size P A B C D E F G H 32 34 62 64 Conduit H 54.5 56.5

VZ5000

) 01 02 01 02 300 (Lead wire length) 300 DIN terminal (D) VZ5140-D: With light/surge voltage suppressor 01 02 MAX. 10 Applicable cable O.D. 3.5 to 7 3-3-71 Series VZ5000 2 Position Double VZ5240 Grommet (G), (H) VZ5240G H 01 02 Manual override (Non-locking) (Mounting hole) (Lead wire length) G: 300 mm H: 600 mm (PE port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) 2-Rc 1/4 (5(R1), 3(R2) port) L

VM

Push Button (Mushroom)/VM220-02-30R, B, G, Y/VM230-02-30R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 52N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T. 3.5-22 VM200 Series VM200 Push Button (Extended)/VM220-02-32R, B, G, Y/VM230-02-32R, B, G, Y Panel mounted hole JIS Symbol 2 port 3 port 52N F.O.F. 0.5MPa supply 4.9mm P.T. 1.6mm O.T. 6.5mm T.T.

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

VCL

VCHm Dimensions: Bracket VDW VQ A J LVM 4 x G C 1.5 VCA VCB VCL B D L E VCS VCW 4 x H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) B C D E F G H J L A Bracket part no.