Series: 350 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Table of Contents

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 5 60 or less 1.87 (1.82) Closed center VFR530 VFR531 3 80 or less Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

VZ3000

3-3-7.

VZS

For details, refer to pages 3-7-19 and 3-7-20.

Series VQ Metal Seal/Rubber Seal Body Ported

Note) Note) Example) Lead wire length 1000mm Example) Lead wire length 1000mm ..3 pcs. 3 pcs. 3 pcs 3 pcs VQ11405LOC6 AXT66114A10 VQ1140N5LOC6 AXT66114AN10 Connector ass'y No. (DC) Connector ass'y No. Double No. Socket only (3 pcs.) 300mm 600mm 1000mm 2000mm 3000mm Lead wire length Single/3 position No.

Manifold Specifications

3-3-7.

45

ground Type 3 ground Type 3 ground Type 3 ground b) 3-wire type Wiring with signal ground line (SG) Master unit Slave unit 01 Slave unit 03 Slave unit 75 Type 3 ground Type 3 ground Type 3 ground Type 3 ground Twisted pair with shield Type 3 ground Type 3 ground Type 3 ground Type 3 ground 1-6-113 Type SF1 NKE Corporation Uni-wire System Type SJ1, SJ2 SUNX Corporation S-LINK System Type SG

Air Slide Table Series MXQ

* 3 3 #) Applicable bore size ' ;< /" 6 :)3) #<= ' ;< ;< :)3) ,-!* 3 3 ' 7> -!* 3 3 :)3) #<= ' ? @ . ? 5 ! 5 @ . 2 ) 5 !))5 5 ! 5 ,!

Air Slide Table Series MXS

3 !

Vacuum Unit Ejector / Vacuum Pump System

3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -18No.

Vacuum Unit Ejector / Vacuum Pump System

3 -20 3 1 4 Not specified Not specified 10,000 4 +3 4 5 5 Not specified Not specified 100,000 5 +7 6 +10 -19No.

VCA

OUT (2) Rc G NPT NPTF Nil F N T 1 IN (1) Port size Fluid Symbol 02 03 04 06 Class 3 Class 2 Port size 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 General air Dry air Nil A Voltage 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size Orifice size (mm) 3 4 5 7 10 Symbol 3 4 5 7 10 Class 3 Class 2 Class 4 Consult SMC regarding other voltages.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

1, 2, 3 and 4.

-fl Seies

In case of ptus-in subptare or non ptug-in subptate, and 0.6s tbs., and O.5g tbs. respectvety. St a nd a rd Spe cifi ca t io ns Fluid V9L9P",3!t9 lMin. operating pressurellq ?sr_(9q9q!

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

In case of ptus-in subptare or non ptug-in subptate, and 0.6s tbs., and O.5g tbs. respectvety. St a nd a rd Spe cifi ca t io ns Fluid V9L9P",3!t9 lMin. operating pressurellq ?sr_(9q9q!

Low Profile Air Gripper Series MHF2

Replacement part/Grease pack part no.: Guide unit: GR-S-005 (5g) Cylinder unit: GR-L-005 (5g) 454 Low Profile Air Gripper Series MHF2 Construction @1 MHF2-12D to 20D i q !3 !0 @2 w u !1 !2 !7 !5 @0 o y !9 !8 !4 r t e !6 Component Parts MHZ Note Material Material No. Description No.

VCA

Valve type Thread type (for single unit only) Rc G NPT NPTF Nil F N T OUT(2) 1 IN(1) Port size Fluid Symbol 02 03 04 06 Class 3 Class 2 Port size 1/4 (8A) 3/8(10A) 1/2(15A) 3/4(20A) Class 4 General air Dry air Nil A Voltage 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Orifice size Orifice size (mm) 3 4 5 7 10 Class 3 Class 2 Class 4 Symbol 3 4 5 7 10 Please consult

VQ20/30

Series P port/Thread type VV2Q22-05 1 set VQ21M1-5G-C6 4 sets Manifold part No. Valve part No. (Stations 1 to 4) Valve part No. (Station 5) 2 3 Nil 00N 00T 00F VQ20 VQ30 Rc 3/8 NPT 3/8 NPTF 3/8 G 3/8 VQ21M1-5G-C8 1 set Stations VC 01 1 station is the symbol for assembly. Add a in front of the part numbers for solenoid valves, etc., to be mounted.

Pin Cylinders Series CJP2/CJP

3 !2 t w !5 !4 Component Parts No.