SMC Corporation of America
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Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

{Tl1i--i6y\^ + . l l l . 1 " . l \ l l + + l l l , i l l l \ i l + . * 4 l i ; . ; i i : Body Ported Type (5 Port) 3 Position 3 Positjon Closed Center Exhaust cntet Common EXH. Optional Accessory/Bracket &e w #",^"^", ss M NVJ3e2-&&66-M3-F NVJ302M-069a-M3-F NVJ312-&6e-M3-F (For Single Solenoid Only) NVJ332b-6694-M3-F 4 (Fo. Double Solenoid) Common EXH.

{Tl1i--i6y\^ + . l l l . 1 " . l \ l l + + l l l , i l l l \ i l + . * 4 l i ; . ; i i : Body Ported Type (5 Port) 3 Position 3 Positjon Closed Center Exhaust cntet Common EXH. Optional Accessory/Bracket &e w #",^"^", ss M NVJ3e2-&&66-M3-F NVJ302M-069a-M3-F NVJ312-&6e-M3-F (For Single Solenoid Only) NVJ332b-6694-M3-F 4 (Fo. Double Solenoid) Common EXH.

{Tl1i--i6y\^ + . l l l . 1 " . l \ l l + + l l l , i l l l \ i l + . * 4 l i ; . ; i i : Body Ported Type (5 Port) 3 Position 3 Positjon Closed Center Exhaust cntet Common EXH. Optional Accessory/Bracket &e w #",^"^", ss M NVJ3e2-&&66-M3-F NVJ302M-069a-M3-F NVJ312-&6e-M3-F (For Single Solenoid Only) NVJ332b-6694-M3-F 4 (Fo. Double Solenoid) Common EXH.

Silencer Weight Max. 44% reduction*2 Suction: 300 L ZL3 Suction: 600 L *2 ZL212 (Existing model): 700 g \ ZL3: 390 g ZL6 Max. 60% reduction*3 Suction: 100 L ZL1 Silencer Pressure switch for vacuum with energy saving function *3 ZL112 (Existing model): 450 g \ ZL1: 180 g Max. suction flow rate: 300 L/min (ANR) ZL3 Series Max. suction flow rate: 100 L/min (ANR) ZL1 Series Series Vacuum pressure

3.5 Mounting hole 2201: R(PT) 1/8 T1: NPTF1/8 01: R(PT) 1/8 T1: NPTF1/8 M5 X 0.8 Depth 5 M5 X 0.8 Depth 5 13 13 Dimensions/Base Mounted Style: ZSE2-0R Grommet style/ZSE2-0R-15 Connector style/ZSE2-0R-15C Pressure setting Pressure setting Indicator light Indicator light trimmer trimmer 15 15 9 9 L H L H 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 30 25 30 (3000) (3000) 3 40 9.5 3 40

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: N (NPT), Material: L (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Note With pins With pins Note 1) Mounting nuts are not included with the integrated clevis, single clevis, and double clevis types. Note 2) Trunnion nuts are included with the front trunnion and rear trunnion types.

6) 7) 20 No.ZL3-OM00801-A 9. 9.1 ZL3 ZL3M ZL3H [mm] 1.9 1.5 [MPa] 0.35 0.50 *1 -91 -93 [MPa] 280 [L/min(ANR)] + *2 300 [L/min(ANR)] 150 135 [MPa] 0.20.6 [] -550() 2] *2 20 [m/s 2] *3 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270 [MPa] 0.20.6 [] -550() 2] *

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) Operation Warning 1. The speed may not be controllable during low speed operation with the meter-out controller. Caution 1. For Series CUX10, up to 0.1Nl/min (ANR) of internal leakage is anticipated due to cylinder structure. 4

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: Brass Body, FKM Seal, Class B Coil, Option: None, CE Compliance: CE Marked

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil), Option: F (Foot Bracket)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil), Option: F (Foot Bracket)