4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SY3000-37-46A SYJ3 1 LO Z 1 3 2 3 For AC: SY3000-37-47A Double solenoid, 3 position type Type of actuation A, B port size 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 110 VAC (115 VAC) Symbol Nil M3 Port size Base mounted M3 x 0.5 Single solenoid SY3000-37-54A SY3000-37-55A Double solenoid, 3 position type Rated

VCW

Series VC 2 3 4 Class 2 Class 3 Class 4 OUT port size VDW Port size 1/8 (6A) Symbol 01 02 Stations Uside D side 1/4 (8A) Material VQ Stations 1 2 3 4 5 n 02 2 stations All IN ports are 3/8.

VCL

Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Port size 1/8 (6A) 1/4 (8A) All IN ports are 3/8.

3 Port Solenoid Valve Series SYJ300/500/700

(For details, refer to page 8.) 3 Series SYJ300 Construction (A) 2 (A) 2 N.C. N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

CJ2X/CUX/CQSX/CQ2X/CM2X

: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM-01 ASD430FM-02 Model 6, 8 8, 10 6 Metric size 4, 6 J Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/4", 5/16" 3/8" 3/16", 1/4" Inch size DAir flow (l/min (ANR)) 7 12 38 Controlled flow -X Effective area (mm2) 0.1 0.6 0.2 Air flow (l/min (ANR)) 175 350 75 295 Free flow 20Effective area (mm2) 1.1 5.3 2.7 4.5 Note) Supply pressure

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Vacuum Unit

Fig.1 Fig.2 Fig. 3 Protrusion of junction box B Fig. 2 Clip in. Fig. 3-A When ordering ejector for vacuum pump system, spacer is included.

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

VZ1000

Refer to page 3-3-14.

ZQ-OM01301

class is 2:6:3 of ISO08573-1:2010JISB83921:2012 .

Manifold Specifications

Refer to page 3-3-14.

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

90

No. 3 4 5 6 7 8 9 Note) When ordering a manifold ZZK2---A on page 3, q to e are delivered as a set.

Compact Vacuum Unit

Note 3) Only the push-locking type (no symbol) is available for the latching type. Note 4) Refer to for the accessories. Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs. Table 3 Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs. Mounting screw (M1.7 x 0.59 inch (15 mm)) 2 pcs. !3 Pressure sensor assembly Mounting screw (M1.7 x 0.87 inch (22 mm)) 2 pcs.

3M/SMseries

Series/Port Size Type of Actuation 2 position 2 position single double @ ]zNPTF w %NPTF titvF30(X) NVF3q)O 3 Dosition 3 po6ition 3 pogition closed cnter exhaust center pressue center . t : ' . " i : , : stlfm'JNfils #Nll;117.h ainnMh HlfFinlh NVF5000 NVF5000 2 pBition 2 position 3 position single double closed center M 3 position 3 posilion exhaLrst center Plessule centl %NPTF ffi^ 4il7h

CG1-OM0227

P.1320 16 / 17 3. 3-1. 1 2 3 4 5 6 7 8 9 10 3-2. 2040 50100 18 3-2-1. 02 50 3-2-2. 1 6 2 7 6. 7. 3 19 3-2-3. GR-S-010(10g )GR-S-020(20g ) (XC85,X446)P25 1 2 3 4 8 1 100 83(g) L100mm 1 2 1mm 8. 8. g 20 25 32 40 100st 2 3 3 34 50st 0.5 0.5 0.5 1 20 3-2-4. 1) 8, 9 2 ( 8,) 10 3( 8,) 1mm 9. 10. 3-3.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the?miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers, medical equipment and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

lVFl 10

Wl00-3-2 (s-sta.) Mounting screws: MT624-26 fincluded with manitold bar) Blank station kit: WFl00-02 Hol'VTO ORDER NVV3F1-30OO1 -01T-F ---T---_ T _ T I loptions | -None To order assembled manifold and valves: Ex.