Secondary Batteries

min 2 to 16 l/min 5 to 40 l/min 04 20 40 90 Material restriction Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Thread type Nil N F Rc NPT G Lead wire M12 3 m lead wire with connector Without lead wire Nil N Port size 67 Output specification PNP open collector 2 outputs 4 16 40 Port size Applicable model Flow rate (l/min) Symbol 03 04 06 3/8 1/2 3/4 90-PF2W704, 90-PF2W720

KJ

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFT04-01 KFT04-02 KFT06-01 KFT06-02 KFT06-03 KFT08U-01 KFT08U-02 KFT08U-03 KFT08N-01 KFT08N-02 KFT08N-03 KFT10U-02 KFT10U-03

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

V

(mm) 0 stroke Stroke end 2~8 0.8 1.2 10~32 1 3 40, 50 2 5 H O W T O O R D E R S E E N E X T P A G E F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G F L AT T Y P E Flat Flat with rib ZPT10 U C 10 12 12 21 32.5 55.5 68.5 3 1.7 E:M5x0.8 E:M3x0.5 Model A B C Y ZPT13 U C 13 15 12 21 32.5 55.5 68.5 3 1.8 D F D F ZPT16 U C 16 18 12.5 21.5 33 56 69 3.5 1.2 ZPT02U 2 2.6 1.2 3 6 5 8 0.8

VQZ1000/2000/3000

(B), 2(A) port 20 14.6 12 10 10 P 7.2 PE port M5 x 0.8 (Not applicable to standard.) 5-Rc 1/8 1(P), 2(B), 3(R2), 4(A), 5(R1) port 13.4 13.4 1.1 M5 x 0.8 external pilot port (Only external pilot type (R)) L plug connector (L): VQZ1150 1(R)-L-01 M plug connector (M): VQZ1150 1(R)-M-01 Cross section 0.23 mm2 Cover diameter 1.5 (Lead wire length) 54 <59> 300 77 (Metal seal) 75 (Rubber seal)

Series SV

L dimension L dimension 8 6 5 4 3 2 7 1 0 0 7 98 185.5 7 5 4 3 2 1 6 0 1 8 110.5 198 0 7 6 5 4 3 8 2 1 2 9 123 210.5 1 M12 input block (n) 8 7 6 5 4 3 2 3 10 135.5 223 2 L dimension 9 8 7 6 5 4 4 11 148 235.5 3 10 9 8 7 6 5 12 160.5 248 4 Connector type: For M (m + n = 2 to 8) 10 9 8 7 6 173 5 11 10 9 6 1) When a DIN rail other than the above is required, refer to the separate DIN rail dimensions

OMU0023

Check End Details of code error sum code ) 1 byte 2 bytes 2 bytes 2 bytes 2 bytes 2 bytes The MSB of the Problems 01-FF code Note 4) LRC CR, LF function code is changed to 1.

PSxx-OMM0006CN

D ZS-24-D X X X ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A

VS 8-2/VS 8-4

1 F kit P kit T kit L kit M kit !2 !4 !3 !5 !6 !7 The exploded view indicates VV801. 31 Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Manifold Assembly Part No. Housing Assembly, SI Unit, etc. Part no.

HRX-OM-X071

A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal 2 maintenance MT.01 MT.01 to MT.05 D.OUT2 MANT CODE No.20 screen Contact output signal 3 function ALM 1 D.OUT3 SEL No.21 screen Contact output signal 3 operation B A/B D.OUT3 TYPE No.22 screen Contact output signal 3 alarm AL.01 AL.01 to AL.32 D.OUT3

42

(For F, L, S, T kit) VVQ4000 2A 1 Thread type Electrical entry VVQ4000 3A 1 Thread type Electrical entry Nil Rc N NPT T NPTF F G Nil Rc N NPT T NPTF F G L F , L, S, T kit F Note 1) F kit (Connector location on U side) C C kit (Plug lead type) L F, L, S, T kit F Note 1) F kit (Connector location on D side) C C kit (Plug lead type) SV SYJ Option Option Nil Standard W Note 2) IP65 enclosure

Series VQ Base Mounted Metal Seal/Rubber Seal

(Including the mounted valves. ) 1.10-148 Manifold optionsSV5Q11OP, #1 to #3 VQ 1000/2000 Plug-in Unit Base Mounted EXH block base assembly VVQ1000-19A-(C3, C4, C6, M5) F P L Manifold block ass'y Electrical entry F1 F2 F3 P1 P2 P3 L0 For F kit (2 to 12 stations)/Double wiring For F kit (13 to 24 stations)/Double wiring For F kit (2 to 24 stations)/Single wiring For P, G, T, S kit (2 to 12

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Made to Order (Refer to page 717 for details.) 716 AS-FM Series Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) How to Order AS 2 2 0 1 F M 01 06 Lock nut option Nil J Hexagon lock nut Round lock nut AS-F Body size TMH 1 2 M5 standard 1/8, 1/4 standard Made to Order Refer to the below for details.

HRX-OM-X084

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 2 Select function 17. Press the [] key. Displays screen for setting the function for the Contact output signal 2. Contact output signal 2 function DOUT2 SEL(Alternately displayed) Displays the function for the Contact output signal 2.

VEX1

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

5 Port Solenoid Valve SY Series

-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2 SY5120-D(-F ) 60.9 Applicable cable O.D. 3.5 to 7 (Lead wire length) Approx. 300 95.8 [98] 53.4 28.1 [35.1] 104.9 Max. 10 42.1 12.7 27 32.6 M8 x 1 15.1 (Lead wire length) 39.2 [46.2] Approx. 300 Pg7

7ND9071en

Lo (La) = 10 uH Co (Ca) = 10 nF 1 + 1 + 2 Ui (Vmax) 3.53 V Ii (Imax) 12.6 mA Pi (Pmax) 11.1 mW 2 3 CNT CNT 4 3 Limit Switches I02, I09, I57, I60 I45 I41, I58 D44 11 L 11 L 11 L (SOL1) L+ 12 13 L+ 12 NOTE 8 (SOL2) Ex i Barrier 13 L+ (SOL PWR1) (SOL PWR2) TOP SW+ TOP SW BTM SW+ BTM SW Ui (Vmax) Ii (Imax) Pi (Pmax) Li Ci L 14 L 13 NOTE 8 L+ L 14 16 L+ 14 Uo (Voc) Ui (Vmax) Io (Isc) Ii

Modular Type Regulator Series AR

type GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS GC3-10AS Pressure gauge G36-2-01 G36-2-01 G36-2-01 G46-2-02 G46-2-02 Round G46-2-02 G46-2-02 0.2MPa Note 4) Square embedded type GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

Flow Control Equipment

Metric size 4 4 6 230 260 390 460 660 790 920 1580 1710 Controlled (Free)flow 180 Air flow (l/min(ANR)) Effective area (mm2) 2.7 3.5 4 6 7 10 12 14 24 26 Indication of air flow direction on body Note) Supply pressure: 0.5MPa, Temperature: 20C. How to Order 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 3/8 1/2 Sealant Applicable tube O.D.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

l h + l ZZ + l + 2 stroke With rod boot at both ends l l + Stroke h + l + Stroke S + Stroke h + l ZZ + 2 (l + Stroke) Stroke range (mm) Up to 350 Up to 400 Up to 450 Up to 800 Up to 1200 Up to 1200 Up to 1400 Up to 1500 Bore size (mm) I J GA F AL C D E H1 S A B1 K KA MM NA P 15.5 19.5 19.5 27 32 32 37 37 14 16.5 20 26 32 38 50 60 8 10 12 16 20 20 25 30 5 6 6 8 11 11 13 16 26 31 38 47