Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1 Contents No. q w e r t y u i o !0 !1 !2 !3 !
(For details, refer to page 610.) 605 3 Port Pilot Solenoid Valve 10-SYJ300 Construction 2(A) 2(A) Directional Control Valves Air Grippers Modular F. R. Fittings & Tubing Air Cylinders Rotary Actuators N.C. N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.
42 60 30 36 B N x M5 x 0.8 F N 2 1 x F 29 3 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 0.5 M 7 ZZ Z J I 16.5 Pilot port 3 x M5 x 0.8 (Plug: Width across flats 7) +0.030 5H9 ( 0 ) depth 3 +0.030 5H9 ( 0 ) depth 3 +0.030 5H9 ( 0 ) depth 3 24 G H 24 G H HA 10.7 16.3 A 9.5 5.1 10 A 6 6 NN x M6 x 1 thread depth 9 HB GB GB HB B stroke: 50 mm B stroke: 20 to 40 mm Cross-sectional view
mm) A B C D E F G H J K L M N P Q Port size Model IDU3E IDU4E IDU6E 3/8 455 498 283 275 15 270 1/2 31 42 80 230 32 15 240 80 284 483 13 568 355 300 3/4 485 15 7 9 Series IDF/IDU E Option Specifications 1 Refer to pages 2 and 5 for How to Order of options.
Series: 350 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Molded, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: CE Marked
Series: 350 [3 Port COM (Single Unit)], Voltage: 3 (110VAC 50/60Hz), Electrical Entry: W (Grommet / Molded), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: F (Foot Bracket), CE Compliance: Q (CE Marked)
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300
+ l 2 x Rc P 4 x FD J MM FY BB D E e Air release K F MA l C Width across flats G f Air release 10 NA FT A SS NB B SS + Q + l S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod 32 27 15 M10 x 1.25 25 to 1400 58 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109
1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.
w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQ1501 VQ1500 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2
Series CH2E/CH2F/CH2G/CH2H Limit stroke charts/Bore sizes 32, 40 Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation F F F F F F F F F F F Bore size 32 B rod 2000 5 2 4 8 3 7 1 1000 6 500 Stroke (mm) 100 50 10 0.1 0.5 1 5 10 20 Load (kN) Bore size 40 B rod C rod 2 4 3 7 3 7 5 2000 4 8 1 5 8 6 2 1 1000 6 500 Stroke (mm) 100 50 0.5
E F Flat Flat with ribs H: M5 x 0.8 H: M6 x 1 Y H: M6 x 1 H: M8 x 1 Y Model A B C F G C F G Flat Flat with ribs D E Model A ZPT10 U C ZPT13 U C ZPT16 U C U C U C 10 12 1.7 ZPT40 6.5 15 4.5 40.5 40 43 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5
3 position double check: VFS5600-F 2 position double: VFS5200-F 3 position closed center: VFS5300-F 3 position exhaust center: VFS5400-F 3 position pressure center: VFS5500-F VFN 2-7 mounting hole 219.3 (218) 3 position 227.3 (226) 2-7 mounting hole With light/surge voltage suppressor Pilot valve manual override With light/surge voltage suppressor Direct manual override Pilot valve manual
SS5Y F U 05 U R 3 5 Manifold series 3 SY3000 5 SY5000 Common specification Nil Positive COM N Negative COM Note) Indicate "Nil" for types T, T1, and S.
Thread type Piping port (P, A, B, EA, EB port) Nil Rc G F 06 10 1 3 4 N NPT NPTF T 3-5-95 96 Series VFR6000 Construction 2 position single 2 position double VFR620 VFR610 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA) (P) (EB) 5 1 3 !1 u q t q e i e !1 i u !
m/s 2 in X, Y, Z directions, 3 times each (De-energized) 3% F .S. or less 1000 VAC for 1 min.
6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 No. q w e r t y u i o !
8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 How to Order How to Order AR 30 1N AR 30 BG F X430 03 BG F N X425 03 Regulator Regulator For high/low temperature For high pressure 25 30 40 50 60 20 25 30 40 50 60 Body size Body size X430 X440 Low temperature High temperature Thread type Thread type Nil Rc Nil Rc N NPT N NPT F G F G Port