Mounting: B (Basic Style), Size: 32mm, Stroke: 25mm, Air Cushion: N (w/o Air Cusion on Linear Motion Part), Rotation Angle: A (80°~100°), X: Standard, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 4 pcs. (Or None in the Case of No Switch), Made-to-Order: None, Port Thread: XF (G 1/8)

Mounting: B (Basic Style), Size: 32mm, Stroke: 100mm, Air Cushion: N (w/o Air Cusion on Linear Motion Part), Rotation Angle: B (170°~190°), X: Standard, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 4 pcs. (Or None in the Case of No Switch), Made-to-Order: None, Port Thread: XF (G 1/8)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

C4, C6, M5 VQZ C3: One-touch fitting ass'y for 3 C4: One-touch fitting ass'y for 4 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 M5: M5 thread C6: One-touch fitting ass'y for 6 M5: M5 thread VQD 45.5 2.5 10.5 (5) 21.5 VZS Dimensions Equation L1=11n+20 n: Staion ( Max. 24 stations) 7.5 L n 1 31 50 60.5 2 42 62.5 73 3 53 75 85.5 5 4 64 87.5 98 6 7 8 11 9 10 12 29 18 VFS

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

C4, C6, M5 C3: One-touch fitting ass'y for 3.2 C4: One-touch fitting ass'y for 4 C6: One-touch fitting ass'y for 6 C6: One-touch fitting ass'y for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) 21.5 Dimensions Equation L1 = 11n + 20 n: Station (Max. 24 stations) 7.5 L n 1 2 3 4 5 6 7 8 11 9 10 12 29 18 31 42 53 64 75 86 97 108 141 L1 L2 L3 119 130 152 50 62.5 75 87.5 100 112.5 125 125 162.5

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Symbol NPN output (+ COM) Nil EX510-S002B Stations N PNP output ( COM) EX510-S102B PWB U side D side COM 7 0 1 1 3 2 6 15 14 10-SS5Z3-60S6BD-05U (-Q)1 set (Type 60S6B 5-station manifold part no.) 10-SZ3160-5LOZ-C6 (-Q)2 sets (Single solenoid part no.) 10-SZ3260-5LOZ-C6 (-Q)3 sets (Double solenoid part no.) The asterisk denotes the symbol for assembly.

Fieldbus System

How to Order Manifold Assembly Example (SS5Y3-12S6l-l) 2-position single SY3130-5U1-C6 (3 sets) Digital Output Unit EX600-DYPB Digital Input Unit EX600-DXPD P, E port size (One-touch fittings) SI Unit Note) End Plate Note) 2-position double SY3230-5U1-C6 (2 sets) EX600-SDN1A EX600-ED2 SY3000 8 5/16" SY5000 10 3/8" Symbol Nil N 1 0 PE PE X X A B A B A B A B A B 3/5E 4 A 3/5E For N, sizes

0.

Port size 1(P), 3(R) 2(A) 2 stations: 83 Addition per station: 19 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) Rc 1/8 Side/Top VV3QZ15-lll VQZ115 VQZ100 2 to 20 stations 2 stations: 126 Addition per station: 38 C4 (for 4) C6 (for 6) C8 (for 8) Rc 1/8 Rc 1/4 Side VV3QZ25-lll VQZ2l5 VQZ200 2 to 20 stations 1(P) port Rc 3/8 3(R) port Rc 1/4 2 stations: 209 Addition per station: 60 C6 (

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Application Example qBlow off valve (SYJ llR) 3 5 7 wValve for vacuum control eOperation of a single acting cylinder rDivider valve (SYJ llR) tSelector valve (SYJ llR) yPressure release Valve (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ ll/SYJ ll R) X port X port X port X port X port Tank Tank 0.2MPa (R)3 2(A) (R)3 2(A) 2(A) (R)3 2(A) 2(A) 2(A) (R)3 (P)1 (R)3 (R)3 (P)1 Plug

SZ3000

SZ Port size 4(A), 2(B) port C4, C6, M5 Made to Order Specifications (For details, refer to page 1-3-38.)

SZ3000

Port size 4(A), 2(B) port C4, C6, M5 Made to Order Specifications (For details, refer to page 1-3-38.)

Fieldbus System

*SY3130-5U1-C6 3 sets (2-position single part number) *SY3230-5U1-C6 2 sets (2-position double part number) *EX600-DXPD 1 set I/O Unit part number (Station 1) *EX600-DYPB 1 set I/O Unit part number (Station 2) * For N, sizes are in inches. N 5/16" 3/8" 1/2" i Mounting The asterisk denotes the symbol for assembly. Prefix it to the part numbers of the solenoid valve etc.

VFR

Bottom ported: VV5FR2-01 Station 2Port size FD1 FU1 C6, C8 Light/Surge voltage suppressor (At FZ) 2-Rc 1/8 (PE port) C6: Max. 6 C8: Max. 6.5 6-Rc 1/4 (P, EA, EB port) For wiring specifications, refer to page 3-5-8. n: Stations Stations L L1 L2 Formula L1 = 28 x n + 47 L2 = 28 x n + 56 1 75 84 2 103 112 3 131 140 4 159 168 5 187 196 6 215 224 7 243 252 8 271 280 3-5-21 22 Series VFR2000 Non

4/5 Port Air Operated Valve Series SYJA3000

size Thread type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 3 position exhaust center 5 3 position pressure center 2 position single 2 position double (B) 2 (A) 4 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position closed center 3 position exhaust

42

: L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) Dimensions Formula: L1 = 25n + 63, L2 = 25n + 76 n: Stations (Maximum 16 stations) n L 1 2 3 4 5 6 7 8 L1 88 113 138 163 188 213 238 263 L2 101 126 151 176 201 226 251 276 n L 1 2 3 4 5 6 7 8 L1 88 113 138 163 188 213 238 263 L2 101 126 151 176 201 226 251 276 n L 9 10 11 12 13 14 15 16 L1 288 313 338 363 388 413 463 463 L2

SYJ300/500/700

Station n L1 L2 3 78 68 Station 20 401 391 6 135 125 8 173 163 10 211 201 Station 2 59 49 4 97 87 5 116 106 7 154 144 9 192 182 11 230 220 12 249 239 13 268 258 14 287 277 15 306 296 16 325 315 17 344 334 18 363 353 19 382 372 4-4-47 48 Series SYJ700 N7 N9 C6 C8 [ ] for AC Type 42 Manifold: Side Ported/SS3YJ7-42Stations -01, , Grommet (G) For (Built-in One-touch fitting) N7 N9 C6, C8,

VZS

(N) VVZS2000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS2000-1A-3-Bore size (-X12) For VZS3000 New block assembly part no. (N) VVZS3000-1A-3-Bore size-1 (-X12) Conventional block assembly part no. (N) VVZS3000-1A-3-Bore size (-X12) Note) -X12 shows the part no. for all common style.

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 3 78 68 Station 20 401 391 6 135 125 8 173 163 10 211 201 Station 2 59 49 4 97 87 5 116 106 7 154 144 9 192 182 11 230 220 12 249 239 13 268 258 14 287 277 15 306 296 16 325 315 17 344 334 18 363 353 19 382 372 4-4-47 Series SYJ700 N7 N9 C6 C8 [ ] for AC Type 42 Manifold: Side Ported/SS3YJ7-42Stations -01, , Grommet (G) For (Built-in One-touch fitting) N7 N9 C6, C8, 63.5

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

x 3/8", 1/2" Stations (A, B port) 1 60 3 14 18 157 58 Max. 3 D side 72 (A, B port) 92 Grommet with terminal Bottom ported: VV5FR4-10Station 2Port size External pilot port 2 x 1/8" (PE port) EB 3 EA 5 X 12 P 1 63.5 Stations n: Station 45 26 18 2 156 168 3 199 211 4 242 254 5 285 297 6 328 340 7 371 383 8 414 426 9 457 469 10 500 512 PE Formula L1 = 43 x n + 70 L2 = 43 x n + 82 L L1 L2 24

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Note 3) When two or more symbols are specified, indicate them alphabetically. 2-3-7 8 Series SQ1000 Manifold Option Blanking plate SSQ1000-10A-3 Individual SUP/EXH spacer SSQ1000-PR1-3Name plate (-N) SSQ1000-N3-n External pilot specifications (-R) P. 2-3-44 P. 2-3-45 P. 2-3-47 P. 2-3-48 C6 L6 External pilot port SUP/EXH block SSQ1000-PR-3-C8 (-S) SUP block plate SSQ1000-B-P Blanking plug

5 Port Solenoid Valve

Thread type Nil Rc F G T NPTF N NPT Port size Symbol Port size C6 6 C8 8 C10 10 C12 12 N7 1/4" N9 5/16" N11 3/8" 02 1/4" 03 3/8" B 1/4" bottom ported Kit type Wiring specifications 2 F, P, T, S (EX126, EX250, EX600) kit 3 L, M, S (EX260, EX500) kit D Double wiring S Single wiring Note 3) Note 3) Single wiring is available only for 1 station.