3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Series SV

(With 2 input blocks) With external pilot specification 46.5 (Pitch) 15.8 9.5 16.5 20.5 17.5 P = 16 M3 M12 11.9 9.2 17.7 25.2 30.6 3 3 4 A 4 A 4 A 4 A 4 A 3 3 3/5 E PWR 49.9 42.7 4 A 4 A 4 A 4 A 4 A E 3/5 3/5 E PWR 2 2 E 3/5 63.5 2 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 1 1 1 1 1 P P 1 BUS 0 P 1 1 P BUS 0 0 0 X PE PE x One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, N3 6

Series AP500

Ports 2 ports 3 ports 4 ports Code 2PW 3PW 4PW Porting Configuration r r e 1) Refer to gauge guide (P.94) for gauge specifications. Pressure gauge unit 2) w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port AP1001S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 2PW 3PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable.

VEX1

P A R mm2 02 02 03 04 04 06 10 10 12 14 20 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 4 3 8 1 2 1 2 3 4 There were not many appropriate large capacity 5 port valves of a closed center.

Secondary Batteries

Standard Type 1(P): One-touch fitting 2(A): One-touch fitting Applicable tubing O.D. (mm) Bracket assembly no. 1(P) 2(A) 4 90-VHK-B1A 4 4 6 90-VHK-B1A 6 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): One-touch fitting 6 8 90-VHK-B1A 8 2(A) Applicable tubing O.D. (mm) 2(A) Applicable tubing O.D.

Modular Type Regulator Series AR

A y OUT 2 I N 1 SMC A t e IN OUT r q w Parts list Material Note Description No.

AR20-B to AR60-B

AR20K-B to AR60K-B A-A w A 2 OUT 1 I N C SM A w w Pressure in diaphragm chamber Inlet pressure (IN) Pressure in diaphragm chamber Inlet pressure (IN) r r IN OUT IN (Inlet pressure) OUT (Outlet pressure) q q e e Figure 1 Normal Figure 2 Backflow When the inlet pressure is higher than the regulating pressure, the check valve w closes and operates as a normal regulator (Figure 1).

Series VQ Base Mounted Metal Seal/Rubber Seal

P (2) AXT100-2-F (2) AXT100-2-TB1 (4) AXT100-2-TB2 (4) SY SYJ q SX VK VZ VF U S U S U S w e r t U S VFR Note 1) S kit is composed of a flat cable housing ass'y (AXT100-2-PU20) of q SI unit and q P kit (20 pin).

Booster Regulator/Air Tank

Model VBAT05A-SV-Q VBAT10A-SV-Q VBAT20A-RV-Q VBAT38A-RV-Q Accessory kit Safety valve Drain valve VBAT5A-Y-2 VBAT-S (Set pressure: 2 MPa) VBAT-V1 VBAT10A-Y-2 VBAT20A-Y-2 VBAT-R (Set pressure: 1 MPa) The Accessory Kit is a Set of Nos. q to t. VBAT20A-Y-2 VBAT10A-Y-2 Model Description No.

Vacuum

19 Cylinder bore (mm) 5 1 0 '15 lo a O o a a o 16 o a a a o a N a o o a o a o o 2 3 : a o o a o o o o t2 o a o o a a a a t0 4 0.66 1.9(4.2) 3.3(7.3) 4.6(10.1) 6 1 .73 5 . 1 { 1 1 . 2 ) 8.6(18.9) 12.1Q6.61 I 2.64 7.9(17.4)13.1(28.8) 18.4(40.5) '10 4 . 1 2 12.3(27.1 20.6(45.3) 28,8(63.4) 1 2 6.91 20.7t45.5\34.5(75.9) r8.3(106.

Vacuum

19 Cylinder bore (mm) 5 1 0 '15 lo a O o a a o 16 o a a a o a N a o o a o a o o 2 3 : a o o a o o o o t2 o a o o a a a a t0 4 0.66 1.9(4.2) 3.3(7.3) 4.6(10.1) 6 1 .73 5 . 1 { 1 1 . 2 ) 8.6(18.9) 12.1Q6.61 I 2.64 7.9(17.4)13.1(28.8) 18.4(40.5) '10 4 . 1 2 12.3(27.1 20.6(45.3) 28,8(63.4) 1 2 6.91 20.7t45.5\34.5(75.9) r8.3(106.3 Cylinder-Applicable Pad (See also section for ZP Vacuum Pads, p

Stainless Steel One-touch Fittings Series KG

(mm 2) Weight (g) A Applicable tube O.D.

Series KG Stainless Steel One-touch Fittings

(mm 2) Weight (g) A Applicable tube O.D.

Vacuum Pad: Ball Joint Type

Q 8 3 5 Y Applicable tubing O.D.Q R R F F Hexagon width across flats 12 Hexagon width across flats 10 Hexagon width across flats 2 E Hexagon width across flats 3 E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) B (mm) B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 12.5 15.5 29.3 46.5 10.5

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Note Bracket A ZS-46-A1 Tapping screw: Nominal size 3 x 8 L (2 pcs.) Bracket B ZS-46-A2 Tapping screw: Nominal size 3 x 8 L (2 pcs.)

0.4

(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 i r i t y w w e !0 !0 !2 !5 o !0 !4 q q y u !1 !3 r t !1 M5 type U10/32 type M5 type U10/32 type !1 y !2 u !4 !3 i !5 u e r r t w e o !0 i o q q t y !0 !2 w !

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

2 Component Parts Description No. Material PBT PBT Brass Brass Note White Black (1) Body A Handle Body B Needle 1 2 3 4 !1 q i !

EX500-GPR1A.eng

) SI Unit Part Names Dimensions ( unit: mm ) ( EX500-Q 01 ) SI unit for VQC/S0700 series SI unit for SV series 2.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,