5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 SQ2000 Applicable tubing O.D. (mm) VQ4 SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE 3.2 4 6 8 Part numbers above are for a set of ten elements.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

M5 F Option None IN side port side OUT side port side DIN rail mounting (for manifold) With bracket With name plate D M5 thread One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 C4 C6 One-touch fitting for 4 One-touch fitting for 6 M5 C3 C4 C6 F N Drop prevention Stop in the middle Note) When specifying more than one option, combine symbols in alphabetically.

Modular F.R.L. Units

Please consult with SMC separately for psi and F unit display specifications.

Mechanically Jointed Rodless Cylinder Series MY1

MY2H G D Za MY3A MY3B 4 x MM E1 E1 MY3M E4 E4 E3 E3 C E2 E2 F B G D Section Za detail (Adjustable range) Section Z detail (Adjustable range) Q P Zb JJ F B3 K B2 H B1 C1 Z B F A L 2 x 2 x LD Section Zb detail (Adjustable range) H A H A holding bolt (mm) B C D F G 90 H A Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 110 110 55 70 126 37 J C2 C 131 130 65 80 149 100 37 K L P Q E3 E4

Digital Flow Switch (Integrated display type)

of maximums rated flow [H_2] Setting of Hysteresis (OUT2) PFM710: 0.3 L/min, PFM725: 0.8 L/min PFM750: 1.5 L/min, PFM711: 3 L/min [F 3] [FLU] Operating fluid [ A i r ] dry air, N2 Page 28 [F 4] [rEF] Reference condition [Anr] Standard condition Page 29 [F 5] [eES] Response time [1.00] 1 second Page 30 [F 6] [dSP] Display mode [inS] Instantaneous flow Page 31 [F 7] [inP] External input [r_

Digital Pressure Switch

[F 0] Units selection function Page 27 Symbol Model Default setting ISE40A MPa Nil or M ZSE40A(F) kPa ISE40A P psi ZSE40A(F) [F 1] Setting of OUT1 Page 28 Item Description Default setting Output mode Select hysteresis mode window comparator mode or OFF mode. Hysteresis mode Reversed output Select reversed output.

ZR

ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL Vacuum Switch/Suction Filter Unit: ZR1-F ZY Specifications ZQ Unit no. ZR1-F Vacuum to 0.5 MPa 5 to 50C 30 m PVF Refer to page 13-3-13 regarding vacuum switch.

Compact Manifold Regulator Series ARM5

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

This is a legacy product, and replaced bySY124A-5LZ, VALVE,PILOT(NORM OPEN), VALVE, VJ100 SOL VALVE 3-PORT, 2B, VJ100 NO SIZE RATING, 0.0286 lb

This is a legacy product, and replaced bySYJ312R-5LZ-M3, VALVE, SOL, BODY PT *LQA, VALVE, SYJ300 SOLENOID VALVE 3-PORT, 1A, SYJ300 OTHER SIZE RATING, .23460 lb

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

5 6 E F Circuit diagram Note 1) The above dimensions are for ZQ1 1U-J2 L-F .

Manifold Specifications

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

VQC

(F, P kit) Top entry Side entry Replaceable One-touch fittings Single mounting screw, clamp construction SI unit for I/O (DeviceNet, PROFIBUS-DP, CANopen, AS-i, etc.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Description Material Aluminum die-casted Note Body q Spool/Sleeve Stainless steel Metal seal w Spool valve Aluminum/HNBR Rubber seal Piston Resin e r Pilot valve assembly For How to Order Pilot Valve Assembly, refer to page 4-14-19. 4-14-7 Body Ported 8 Series VQZ100/200/300 Dimensions: VQZ100 Single unit Grommet (G): VQZ115-G-C3/C4/C6/M5-PR C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(M): VQZ115-lMl-C3, C4, C6, M5-PR (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 60.5 65.5 300 55.5 59 (Lead wire) Indicator light Indicator light 40.5 41.5 Cover dia 1.5 Cross section 0.23mm2 : AC : AC 2.10-8 VQZ100/200/300 Body Ported VQZ200 Valve single unit 2-C4, C6, M5 Grommet (G): VQZ2l2(R)-lGl-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 2-3.5 Mounting

7.5

C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position 3 position 4 position 73 69 57 65 69 46 42 Note) Please contact SMC for the weight of elbow fittings. 2 position SJ3l60-M5 M5 x 0.8 3 position 4 position 65 Note) Please

Secondary Batteries

B L F G D *Mounting brackets are shipped together, (but not assembled).

VZ3000

plug connector (M) VZ3220-M-M5 300 (Lead wire length) 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3220-D-M5 C4 C6 Built-in One-touch fittings VZ3220-MAX. 10 C4: MAX. 7 C6: MAX. 7.5 Applicable cable O.D. 3.5 to 7 2-One-touch fitting (A, B port) Applicable tubing model C4: T0425 C6: T0604 3-3-22 5 Port Solenoid Valve Body Ported Series VZ3000 3 Position Closed

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 4) Except valves. 581 A 5 Port Solenoid Valve/Plug-in Unit 10-SQ1000 Kit (D-sub connector) F Directional Control Valves Air Grippers Modular F. R.