SMC Corporation of America
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Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

0] [F] 2 2 [-] [F 0] 27 ISE40A MPa ""M ZSE40A(F) kPa ISE40A P ZSE40A(F) psi [[F 1] OUT1 28 ONOFF ISE40A0.500 MPa ZSE40A-50.7 kPa ZSE40AF50.0 kPa ISE40A0.050 MPa ZSE40A5.1 kPa ZSE40AF5.0 kPa ON OFF [F 2] OUT2 31 [F 1]OUT1 OUT1 -25No.PS-OMM0006CN-E [F 3] 33 2.5 ms [F 4] 34 [F 5] / 36 [F 6] 38 0 [F11] 39 1000 [F80] 40 OFF [F81] 41 OFF [F90] 42 OFF [F97] 44 OFF [F98] 46 [

DIN terminal (Y): VQZ2l2l-lYll1-C4, C6 L-type plug connector (L): VQZ2l2l-lLl1-C4, C6 (Lead wire length) Approx. 300 79 [81.2] 28.8 [35.8] 85.4 Max. 10 45.5 Pg7 Applicable cable O.D. 3.5 to 7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC M-type plug connector (M): VQZ2l2l-lMl1-C4, C6 (Lead wire length) 61.4 53.9 42.6 40.1 [47.1] Approx. 300 27.9 69.2 [71.4] 64.2

ZR1-F-100 to 0.5 MPa 5 to 50C 30 m PVF Refer to page 949 and 952 regarding pressure switch for vacuum.

Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.

Refer to page 449 for details of the replacement. 235 Regulator/Single Unit Type Series ARM10 Replacement Procedure is P.453 Construction ARM10 ARM10F E A F D E B D C B C F G A G *BLUE links will lead to purchase pages. Replacement Parts Description Note Material Part no.

mounting (For manifold) F With bracket N With name plate C4 4 One-touch fitting M5 M5 thread C3 3.2 One-touch fitting C4 4 One-touch fitting Note) When multiple symbols are specified, indicate them alphabetically.

SQ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 SQ2000 Applicable tubing O.D. (mm) VQ4 SQ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 Built-in silencer direct exhaust (-S) SSQ1000-SE SSQ2000-SE 3.2 4 6 8 Part numbers above are for a set of ten elements.

Please consult with SMC separately for psi and F unit display specifications.

MY2H G D Za MY3A MY3B 4 x MM E1 E1 MY3M E4 E4 E3 E3 C E2 E2 F B G D Section Za detail (Adjustable range) Section Z detail (Adjustable range) Q P Zb JJ F B3 K B2 H B1 C1 Z B F A L 2 x 2 x LD Section Zb detail (Adjustable range) H A H A holding bolt (mm) B C D F G 90 H A Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 110 110 55 70 126 37 J C2 C 131 130 65 80 149 100 37 K L P Q E3 E4

of maximums rated flow [H_2] Setting of Hysteresis (OUT2) PFM710: 0.3 L/min, PFM725: 0.8 L/min PFM750: 1.5 L/min, PFM711: 3 L/min [F 3] [FLU] Operating fluid [ A i r ] dry air, N2 Page 28 [F 4] [rEF] Reference condition [Anr] Standard condition Page 29 [F 5] [eES] Response time [1.00] 1 second Page 30 [F 6] [dSP] Display mode [inS] Instantaneous flow Page 31 [F 7] [inP] External input [r_

[F 0] Units selection function Page 27 Symbol Model Default setting ISE40A MPa Nil or M ZSE40A(F) kPa ISE40A P psi ZSE40A(F) [F 1] Setting of OUT1 Page 28 Item Description Default setting Output mode Select hysteresis mode window comparator mode or OFF mode. Hysteresis mode Reversed output Select reversed output.

ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL Vacuum Switch/Suction Filter Unit: ZR1-F ZY Specifications ZQ Unit no. ZR1-F Vacuum to 0.5 MPa 5 to 50C 30 m PVF Refer to page 13-3-13 regarding vacuum switch.

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

5 6 E F Circuit diagram Note 1) The above dimensions are for ZQ1 1U-J2 L-F .

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

(F, P kit) Top entry Side entry Replaceable One-touch fittings Single mounting screw, clamp construction SI unit for I/O (DeviceNet, PROFIBUS-DP, CANopen, AS-i, etc.)

Description Material Aluminum die-casted Note Body q Spool/Sleeve Stainless steel Metal seal w Spool valve Aluminum/HNBR Rubber seal Piston Resin e r Pilot valve assembly For How to Order Pilot Valve Assembly, refer to page 4-14-19. 4-14-7 Body Ported 8 Series VQZ100/200/300 Dimensions: VQZ100 Single unit Grommet (G): VQZ115-G-C3/C4/C6/M5-PR C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4