AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Table of Contents

8 9.5 11 11 ZB 7.4 11.4 13.4 17.4 21.4 TB 8 8 10 10 12 YB 8 8 10 12 12 SC 7 7 8 8 8 WB 2 2 2 2.5 3 Q 11 12 14 17 20 VB 4 4 5 6 6 UB 10 10 12 16 16 ZA VA TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 UA M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Model MHSH3-32D MHSH3-40D MHSH3-50D MHSH3-63D MHSH3-80D

Refrigerated Air Dryers

[C] Correction factor 5 to 30 1.41 35 1.21 40 1 45 0.92 50 0.75 55 0.63 60 0.53 Inlet air temp. [C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp.

SMC Pneumatic Clean Series

5 8 8 8 50 45 45 41 36 31 31 31 6 6 6 6 6 6 5 M26 x 1.5 M26 x 1.5 M20 x 1.5 108 82 80 80 15 11.5 10.5 8.5 40 32 25 20 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 55 40 40 40 75 55 55 55 27 25 25 21 122 120 120 3.2 3.2 3.2 24 22 22 18 22 17 17 13 41 32 32 26 14 12 10 8 1/8 21 19.5 19.5 15.5 35.5 17.5 4 4 4 11 8 8 16 13 13 1/4 1/8 1/8 7 6.8 6.8 191 155 153 35.5 17.5

IDU/IDF

Applicable dryer Dryer IDF1D IDF2D IDF3D IDF4D Dryer IDF6D IDF8D IDF11C IDF15C Dryer IDF22C1 IDF37C1 IDF55C IDF75C Symbol 1 2 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 Dryer IDF1D IDF2D IDF3D IDF4D Dryer IDF6D IDF8D IDF11C IDF15C Dryer IDF22C1 IDF37C1 IDF55C IDF75C Symbol 1 2 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 Cannot be mounted on models with option "A" (IDF6D to 75C). 21 Accessories

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

F 6.8 4 LC LZ X Y Z ZZ 1/8 8 8 8 42.5 34.5 30 24 46.5 37.5 33.5 28 7 5.5 5.5 5 88 64 62 62 22 17 17 13 41 32 32 26 6 6 5 50 45 45 41 40 32 25 20 24 22 22 18 14 12 10 8 171 137 135 131 21 19.5 19.5 15.5 M26 x 1.5 M26 x 1.5 M20 x 1.5 27 25 25 21 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M10

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Table of Contents

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

Air Fittings & Tubing

3.4 16 17 1 8 1 4 32 34 10 14 10 18 18.5 M5 X 0.8 M6 X 1.0 3.4 3.4 27.5 8 8 6 17 1 8 12.8 33 35 36.5 10 14 17 12 14 17 8.7 6.9 10 1 4 18 3 8 22 26 28 37 39 41 1 8 1 4 20.5 18.5 8 12 15.2 19.7 19.7 3 8 24 27 29 33 27.5 29.5 33.5 32 35 42 43.5 45 47.5 45.5 47.5 49.5 55 56.5 1 8 1 4 17 18.5 24 21 17 30.9 23.2 10 3 8 1 2 22 1 4 17 20.9 17 25 22 12 3 8 1 2 3 8 1 2 44.5 35.1 22

ISO Cylinder

0.8 12 17 8 38 14.2 5 M6 x 1 24 8 18.3 16 13 10 9 22 20 20 M22 x 1.5 8 8 G1/8 16 20 8 44 17 6 M8 x 1.25 32 11 24 22 11 13 12 24 25 22 M22 x 1.5 10 8 G1/8 16 22 8 50 20 8 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 64.5 (70.5) 82.5 (88.5) 94.5 (100.5) 104.5

Modular F.R.L. Units

8, 1/4 AF30-A 1/4, 3/8 Bracket (Except AF10-A) AF40-A 1/4, 3/8, 1/2 5 Float type auto drain AF40-06-A 3/4 AF50-A 3/4, 1 AF60-A 1 Pages 43 to 54 Mist Separator AFM Series AFM20-A 1/8, 1/4 AFM30-A 1/4, 3/8 Bracket 0.3 AFM40-A 1/4, 3/8, 1/2 Float type auto drain AFM40-06-A 3/4 Pages 55 to 63 Micro Mist Separator AFD Series AFD20-A 1/8, 1/4 AFD30-A 1/4, 3/8 Bracket 0.01 AFD40-A 1/4, 3/8, 1/2

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

8 Tube gasket Steel wire Spring pin NBR !1 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 CRA1 2.5 4 5 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 4 5 6.8 6.8 8.5 10.3 8 X W1 L1 max L3 max Size 30 50 63 80 100 CRQ2 6.8 8.5 10.3 8 11 X 2 X 2.5 X 2.5 X 3 X 4 8.5 to 25 12.5 to 36 13.5 to 41 16.5 to 50 21 to 60 1 to 2 1 to 5.5 1 to 6.5 1 to 8 1.5 to 10.5 L1 2 L1 2 L1

CM2

40 15 30 62 22 10 55 20 13 8 8 25 45 25 34.5 37.5 5.5 M10 X 1.25 1to450 19.5 17 32 6 8 6.8 104 3.2 M26 X 1.5 137 47 4 28 40 15 64 22 12 55 20 13 8 8 25 45 32 21 7 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1to500 22 41 8 10 134 3.2 171 54 4 30 55 88 24 14 75 23 16 10 11 27 50 40 With rod boot (mm) Symbol h Z l Stroke e f 1 to 50 51 to 100 1 to 50 1 to 50 101 to 150 151 to 200 201 to 300 301 to 400

SMC

extension end KA 25 12 25 6.5 K NA-M6 x 1 thread depth 6.5 12 6.5 6.5 Vacuum suction port Rc, G, NPT1/8 15 14 14 8 15 7.5 J 12 Maximum 14.5 (With stroke adjuster at retraction end) I Operating port 2-Rc, G, NPT1/8 13 3 2M6 x 1 thread depth 6.5 5H9 depth 5 +0.030 0 5H9 depth 5 +0.030 0 HA GA NN-M6 x 1 thread depth 12 6 B A 9.5 11 11 1.5 30 5.1 B A 11.5 29 11.5 29 H G (NN1) x H Section AA

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

50 152 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 50 45 150 22 21 25 11 90 170 56 120 152 37 115 194 103 50 55 182 M10 x 1.5 depth 20 M14 x 2 depth 25 17 depth 12 Long Stroke Bracket Mounting Stroke Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V P U Y T R S O R Q 20 20 20 250 to 400 157 80 30 40 48 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/

Round Type Hydraulic Cylinder

27 70 12 8 46 6 8 32 5.5 13 28 25 f8 32 Up to 800 21 M14 x 1.5 24 50 22 38 16 19 7 9 55 33 72 12 8 53 8 9 40 7.5 13 36 31 f8 40 Up to 800 21 M16 x 1.5 24 60 24 41 18 21 9 9 66 36 84 14 11 54 10 11 48 7.5 19 44 34 f8 (mm) Bore size (mm) NB NC NN S ZZ P 20 19 15 M22 x 1.5 1/8 81 138 25 19 15 M24 x 1.5 1/8 81 143 32 19 15 M30 x 1.5 1/8 87 159 40 M33 x 2 24 21 1/4 108 183 321 CHM Series Dimensions

Pin Clamp Cylinder Series CKQ/CLKQ

1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !