ISO Cylinder

rod end fR [N] (40)1 (40)1 (40)1 (40)1 (100)1 0.5 89 W W W Rod (side) 10.0 (40)1 (40)1 (40)1 0.7 36 74 93 (40)1 0.3 33 37 26 54 69 Head ( side ) 0.5 39 25 27 19 41 52 C8525 C8520 0.7 32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40

Air Fittings & Tubing

1 8 17 23 23 29 37 55 63 81 75 92 14 4 10.4 10.4 8 17 17 18.5 15.2 1 4 6 26.1 18.0 3 8 1 4 22 18.5 21 10 3 8 1 2 3 8 1 2 7 22 36.3 29.5 24 24 20.9 22 8 12 46.1 16.1 Reference dimensions after R(PT) thread installation.

Table of Contents

1 !7 !7 !4 !1 !6 !6 !8 !8 AS w q w q ASP @0 e @0 e ASN @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !

Refrigerated Air Dryers

[C] Correction factor 5 to 30 1.41 35 1.21 40 1 45 0.92 50 0.75 55 0.63 60 0.53 Inlet air temp. [C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp.

CV/MVGQ

1 !2 !3 !4 !5 !6 !7 !8 !

LEC-OM02704CN

6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (8) (2) 150 RDN 7 7 7 7 7 7 8 8 8 8 8 8 6 6 6 (6) (6) (6) 1.

CM2

40 15 30 62 22 10 55 20 13 8 8 25 45 25 34.5 37.5 5.5 M10 X 1.25 1to450 19.5 17 32 6 8 6.8 104 3.2 M26 X 1.5 137 47 4 28 40 15 64 22 12 55 20 13 8 8 25 45 32 21 7 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1to500 22 41 8 10 134 3.2 171 54 4 30 55 88 24 14 75 23 16 10 11 27 50 40 With rod boot (mm) Symbol h Z l Stroke e f 1 to 50 51 to 100 1 to 50 1 to 50 101 to 150 151 to 200 201 to 300 301 to 400

Compact Manifold Regulator Series ARM5

5/16 3 11.5 19.5 20 23 1/4 1/4 10, 3/8 10, 3/8 7 11.5 22 22 26 1/4 1/4 19 20.5 515 Series ARM11A/B End Block Pressure Gauge ARM11E L Part no.

Modular F.R.L. Units

units: psi, F *7 *7 *7 *7 *7 *1 Drain guide is NPT1/4. *2 Drain guide is G1/4. *3 A bracket is not assembled and supplied loose at the time of shipment.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 8 42.5 34.5 30 24 46.5 37.5 33.5 28 7 5.5 5.5 5 88 64 62 62 22 17 17 13 41 32 32 26 6 6 5 50 45 45 41 40 32 25 20 24 22 22 18 14 12 10 8 171 137 135 131 21 19.5 19.5 15.5 M26 x 1.5 M26 x 1.5 M20 x 1.5 27 25 25 21 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M10 x 1.25 M32 x 2 23 10 8 M14

C95

4 @3 #5 t @7 $5 !5 @4!8@0!7!9 i@2 q r y #0$0 $2 w $3 #8 @9 A C CJ1 CJP CJ2 B CM2 Section A !2 !2 !22 $1 e $8 o $7!1@1!6 @5 u!0 $6 #7 #6 $4@8#9 @6 #4 C85 with through piston rod C76 100 80 63 50 40 32 CG1 #1 #2 Section B Section C MB MB1 80, 100 80, 100 CP95 Description Material Note Parts list Description Material Note Parts list No. q w e r t y u i o !

Magnetically Coupled Rodless Cylinder

6 @4 @1 @8 $0 #9 #3 @2 #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.

ZP

flats 7 Hexagon width across flats 7 Hexagon width across flats 7 Flat with ribs Flat with ribs Applicable Tubing Flat/Flat with Ribs Flat/Flat with Ribs G: M5 x 0.8 Y G: M6 x 1 G: M6 x 1 Y Applicable tube O.

SMC

Grade 4 M4.5 ISO class 6 10 M5.5 ISO class 7 0.1 0.5 1 1 M6.5 ISO class 8 Particle diameter (mm) Selection procedure (1) Required clean room cleanliness? Class M2.5 or Class M3.5 or Class M4.5? Diagram 1 Air flow (2) Air flow to the workpiece (Refer to Diagram 1.) Workpiece A The air flow is blocked before it reaches the workpiece.

Vacuum System Peripherals:

0.9 MPa VG342 Model 3 position valve Series VEX3 Piping specifications Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22

Programless controller Step motor (servo 24 VDC)

[1] After confirming that OUT2 and OUT3 are turned on, turn on IN0 to IN2 to start (1) move to the position No. 7. (1)Reset stops during (2) (3)STOP (4) [2] When the operation starts, BUSY is turned on and NO.7 To NO.8 during NO.7 To NO.9 OUT0 and OUT1 are turned off.

Free Mount Cylinder Series CU

ANR)) 290 130 Free flow 1.5 7 3.5 Effective area (mm2) 4.5 2 Note) Supply pressure: 0.5 MPa, Temperature: 20C Elbow Type (Metal body) Air Flow/Effective Area AS220M-02 AS120M AS220M-01 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Tube side Rc 1/8 Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420

JXCx-OMU0004

.67 RESET 87 STOP 9 53 97 NO.6 No.6 (3) NO.7 No.7 No.7 (1) NO.7 No.8 NO.8 (4) No.9 NO.9 (2) (1) 6 7 9 7 (2) 8 9 7 (3) 8 7 5 3 (4) 7 9 9 7 *1 PLC I/O 1No.7 (3)No.7 (1)NO.7 (3)NO.7 [1] OUT23 ONIN02 STOP 2 (4) (2) (4) RESET No.8 No.9 ON7 (1) NO.8 NO.9 RESET STOP OFF ON IN0 [2] BUSY ONOUT01 bit_0 OFF IN1 ON OFF [3] BUSY ON IN2 OFF [4] RESET [5] BUSY OFF [6] BUSY OFFRESET

Pin Clamp Cylinder Series CKQ/CLKQ

1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

C85

7 q !4 !1 w e !3 !