Floating Joint

6.6 9 9 11 11 18 22 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 19 20.5 27 34.5 43.5 52 73.5 86 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 32.5 36 49 61.5 76.5 94 131 152 8 9 13 15 18 24 38 42 0.5 0.5 0.75 1 1.25 2 2.5 3 1100 2500 4400 11000 18000 28000 36000 55000 0.08 0.12 0.28 0.63 1.15 2.07 5.2 9 Semi-standard Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa JAF20-8-100 JAF25-10-150 JAF32-

2/3 Port Valve

55 59 60 62 38.5 47 54 47 48 50 92 95 97 38.5 47 55 59 62 64 , , , VX31 VX32 VX33 1 4 1 8 27.5 27.5 3 8 1 4 3 8 1 4 4.1-51 VXV31/32/33 Vacuum Use/VXV3mmm Specifications QVacuum flow passage has large orifice.

58

5 stroke 17 27 30.5 M30 x 1.5 1/2 98 15 1/ 5 stroke 110 228 75 40 133 251 17 27 30.5 M30 x 1.5 1/2 98 15 1/ 5 stroke 120 246 75 40 141 267 20 34 34.5 M36 x 1.5 3/4 106 17 The minimum stroke with rod boot is 30 mm or more.

MXS Series Air Slide Table

Allowable moment Wmax: Table 2 1=W/Wa Calculate static moment Wa(N) Wa=1 x 1 x 40=40 K=1 =1 Wmax=40 1=10/40=0.25 Calculate load rate 1 of static moment. 3-2 Load rate of static moment Rolling Yawing Calculate static moment M(Nm).

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

9 6.3 37 194 80 Up to 2000 Up to 1000 40 45 17 25 99 G 3/8 38.4 86 M20 x 1.5 30 128 10 16 72 M10 x 1.5 22 4 4 11.5 6 46 218 100 Up to 2000 Up to 1000 40 55 17 25 118 G 1/2 42.9 91 M20 x 1.5 32 138 10 18 89 M10 x 1.5 22 4 4 17 10 51 233 Bore size [mm] H d e f l h 1 to 50 901 to 1000 32 48 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288

Modular F.R.L. Units

Drain cock with barb fitting B B B B B B Dimensions Barb fitting applicable tubing: T0604 Width across flats 17 1/4 Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC20C-B 1/8, 1/4 1/8 126.4 87.6 26.5 41.6 40 28.5 2 1 30 43.2 24 33 5.5 12 3.5 29 AC25C-B 1/4, 3/8 1/8 167.4 115.1 28 30 55.1 50 27.5 0 41

21

Foot 2 CM-L020B CM-L032B CM-L040B 2 foots, 1 mounting nut Flange 1 CM-F020B CM-F032B CM-F040B 1 flange Single clevis 1 CM-C020B CM-C032B CM-C040B 1 single clevis, 3 liners Double clevis (with pin) 1 double clevis, 3 liners, 1 clevis pin, 2 retaining rings 1 trunnion, 1 trunnion nut 1 CM-D020B CM-D032B CM-D040B Caution Trunnion (with nut) CM3-T020B CM3-T032B CM3-T040B 1 1.

ZP

H: M5 x 0.8 H: M6 x 1 Y Model A B C D E F G G Flat Flat with ribs C Y A B Model ZPR10UT 10 11 1 U C U C U C ZPR10 10 12 12 15 5 6 1.7 21 29.9 46 3 ZPR13UT 13 14 ZPR13 13 1.8 1.5 ZPR16UT 16 17 ZPR16 16 18 12.5 21.5 30.4 46.5 3.5 1.2 2.5 ZPR10CT 10 11 0.8 Deep ZPR13CT 13 14 1 ZPR16CT 16 17 H: M5 x 0.8 H: M6 x 1 Model A B C D E F Y G G Dimensions of D are the same.

JA/JAH/JB/JS

11 11 18 22 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 CV MVGQ CC RB Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 JAF20-8-100 JAF25-10-150 JAF32-10-100 JAF40-12-125 JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41

JA/JAH/JB/JS

38 47.5 56.5 68 94.5 112 0.5 0.7 0.8 1 1.25 1.25 1.5 1.5 1.5 1.5 1.5 1.5 8 10 14 14 45 55 12 12 16 16 21 24 31 41 50 59.5 79 96 1.5 1.5 2 2 4.5 5 6 7.5 9.5 11.5 14 16 4 4 6 6 7 8 11 14 19 24 30 36 3.2 4 5 5 7 8 11 13.5 16 20 22 24 5.5 7 10 10 13 17 22 27 32 41 46 55 5 5.5 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 19 54 123 123 1100 2500 6000 11000 18000 28000

ZP

13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.

LEC-OM02704CN

55 15 1.

CLK1

Hs (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Hs Bore size 40 56 54 16 44 77 10 47 14 55 M12 x 1.5 86 112.5 5 39 27.5 114 228 46 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 50 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122 236 56 Unclamp side lock (F) 3-Rc 1/4 Unclamp side port 3-Rc 1/4 Clamp side port Rear cushion valve Top width across

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

AS

17 17 19 21 32 32 34 36 53 55 57 59 53 55 57 59 94 95 14.5 14.3 1 8 14.2 36.1 31.1 30.5 25.5 15.5 18.5 21.0 14.5 15.5 18.5 21.0 15.5 18.5 21.0 22.0 15.5 18.5 21.0 22.0 21.0 22.0 12 15.0 17.2 1 4 17 39.4 34.4 32.0 26.6 18.5 19 1 4 45.9 40.9 38.1 33.1 20.3 23.0 19 45.0 40.0 37.6 32.6 19.4 3 8 19 23.0 1 2 28.6 24 22.4 54.6 47.1 44.5 37.0 Note 1) Reference dimensions Note 2) Reference dimensions

Refrigerated Air Dryers

[C] Correction factor 5 to 30 1.41 35 1.21 40 1 45 0.92 50 0.75 55 0.63 60 0.53 Inlet air temp. [C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp.

LEC-OM07605CN

17 4. (2) 1)OFF 2)[Pr.

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Free Mount Cylinder Series CU

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221