JA/JAH/JB/JS

41 50 59.5 79 96 1.5 1.5 2 2 4.5 5 6 7.5 9.5 11.5 14 16 4 4 6 6 7 8 11 14 19 24 30 36 3.2 4 5 5 7 8 11 13.5 16 20 22 24 5.5 7 10 10 13 17 22 27 32 41 46 55 5 5.5 7 7 8 9 13 15 18 24 38 42 0.5 0.5 0.5 0.5 0.5 0.5 0.75 1 1.25 2 2.5 3 19 54 123 123 1100 2500 6000 11000 18000 28000 54000 71000 0.01 0.01 0.02 0.02 0.05 0.07 0.16 0.31 0.58 1.08 2.7 4.7 Option Pneumatic: Up to 1 MPa Hydraulic:

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

UNC #10-32UNF 1/4-28UNF 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 32 38 47 52 5 6 8 10 15.5 20 25.5 28 3.5 3.5 5.4 5.4 #8-32UNF #8-32UNF #10-32UNF 1/4-28 UNF #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC 6 8 10 12 25 29 36 40 For the following bore/stroke sizes, through-hole is threaded over the entire length.

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

C95

4 i yq !3t!8!1!7w !6ui e!5 !

CM2

20 18 8 40 4 25 40 62 15.5 13 26 5 8 28 5 6.8 102 3.2 M8 x 1.25 15 24 M20 x 1.5 1/8 131 25 45 25 8 8 13 55 20 22 10 47 4 28 40 62 19.5 17 32 6 8 33.5 5.5 6.8 102 3.2 M10 x 1.25 15 30 M26 x 1.5 135 1/8 -X 32 45 25 8 8 13 55 20 22 12 47 4 28 40 64 19.5 17 32 6 8 37.5 5.5 6.8 104 3.2 M10 x 1.25 15 34.5 M26 x 1.5 137 1/8 40 50 27 11 10 16 75 23 24 14 54 4 30 55 88 21 22 41 8 10 46.5 7 7 134

CQM

1 !2 !3 !4 !5 !6 !

CJ2

1 !2 !3 !4 !

MY1

0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

Refrigerated Air Dryers

V 6E V V V V V V V V V *4 V 8E V V V V V V V V V *4 V 11E V V V V V V V V V *4 V 15E1 V V V V V V V V V *4 V *1 When multiple options are combined, indicate symbols in alphabetical order.

IDU/IDF

A B C E 141 120 85 1/2 725 410 IDU6D IDF6D 165 445 165 141 915 IDU-BP6C IDF-BP6C 1/2 141 3/4 120 85 755 410 196 IDU8D IDF8D 445 196 141 1045 IDU-BP8C IDF-BP8C 3/4 152 3/4 1 131 91 815 405 IDU11C IDF11C 196 445 196 1155 152 IDU-BP11C IDF-BP11C 3/4 1 175 131 91 890 405 222 IDU15C IDF15C 445 222 175 1230 IDU-BP15C IDF-BP15C 1 1 183 91 70 970 405 IDU22C1 IDF22C1 222 445 222 1445 71 IDU-BP22C

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Table of Contents

8@1@5 tyu@3@4 Order 1 pinion assembly per one unit.

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

SMC

Front matter 12 Particle Generation Grade Cylinder Model Particle generation grade by series 222113121110Standard Description 12-/1321-/223 4 2 4 3 MGPL Compact Guide Cylinder 4 2 10-MGF Guide Table 1, 2, 4 Note) 1, 2, 4 Note) 1122MXP Air Slide Table 11221 1 MXPJ6 1322MXQ 3, 4 Note) 3, 4 Note) Air Slide Table 1322MXS 2 CYP Clean Rodless Cylinder 4 3 12-CY1B Magnetically Coupled Rodless Cylinder

SMC Pneumatic Clean Series

5 8 8 8 50 45 45 41 36 31 31 31 6 6 6 6 6 6 5 M26 x 1.5 M26 x 1.5 M20 x 1.5 108 82 80 80 15 11.5 10.5 8.5 40 32 25 20 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 55 40 40 40 75 55 55 55 27 25 25 21 122 120 120 3.2 3.2 3.2 24 22 22 18 22 17 17 13 41 32 32 26 14 12 10 8 1/8 21 19.5 19.5 15.5 35.5 17.5 4 4 4 11 8 8 16 13 13 1/4 1/8 1/8 7 6.8 6.8 191 155 153 35.5 17.5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRB2 L1= CRBU2 L1= Q1=M Q1=M Q1=M L1= Q1=M L1= CRB1 W1= Q1 MSU L1 Q1 Q1 Q1 L1 L1 J axis X axis L1 K axis T axis CRJ L3= L1= (mm) (mm) X= Size Size 30 50 63 80 100 30 50 63 80 100 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 CRA1 2.5 4 5 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 4 5 6.8 6.8

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 Thread M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 Rc 1/8 Rc 1/4 CRA1 2.5 4 5 2.5 4 5 (mm) 4 5 6.8 6.8 8.5 10.3 8 4 5 6.8 6.8 8.5 10.3 8 X W1 L1 max L3 max Size 30 50 63 80 100 CRQ2 6.8 8.5 10.3 8 11 X 2 X 2.5 X 2.5 X 3 X 4 8.5 to 25 12.5 to 36 13.5 to 41 16.5 to 50 21 to 60 1 to 2 1 to 5.5 1 to 6.5 1 to 8 1.5 to 10.5 L1 2 L1 2 L1

LJ1H

B A C D 3 4 Standard Motor Series LJ1H10 Motor Output Rolled Ball Screw High Rigidity Direct Acting Guide 50W 12mm/12mm lead Horizontal Mount How to Order Stroke LJ1H101 NB 1 F 2 Cable entry direction Top entry Power supply voltage 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Cable entry direction Cable length Left entry 1 2 F R L T B Axial Right Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry

Table of Contents

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2