C95

160 12 16 16 20 20 25 12 16 16 20 20 25 50 63 75 90 110 132 49 58 71 87 110 136 64 72 90 100 126 150 79 90 110 120 153 178 50 55 70 80 100 120 32 40 50 63 80 100 Rod boot (gaiter) e max f I h Bore (mm) Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 42 43 52 52 58 65 23 23 25 25 29 29 12.5 12.5 12.5 12.5 12.5 12.5 25 25 25 25

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Do not use any cable other than this cable. 2500 10 to 20 (33) 3000 (20) 4.0 6 (55) (100) 775 LECYM/LECYU Series AC Servo Motor Driver/ Specific Product Precautions 1 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 3 to 8 for Electric Actuator Precautions. Design/Selection Handling Warning Warning 1. Use the specified voltage.

Refrigerated Air Dryers

[C] Correction factor 5 to 30 1.41 35 1.21 40 1 45 0.92 50 0.75 55 0.63 60 0.53 Inlet air temp. [C] Correction factor 5 to 45 1.15 50 1.07 55 1 60 0.95 65 0.9 70 0.86 75 0.82 80 0.79 Inlet air temp. [C] Correction factor 5 to 45 1.21 50 1.10 55 1 60 0.87 65 0.76 70 0.74 75 0.72 80 0.70 Inlet air temp. [C] Correction factor 5 to 30 1.3 35 1 40 0.82 45 0.68 50 0.57 Inlet air temp.

Table of Contents

, MHZL2-20 (0.4) No setting 0.4 0.5 1 0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

High Vacuum Angle Valve

12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

SMC Pneumatic Clean Series

M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 55 40 40 40 75 55 55 55 27 25 25 21 122 120 120 3.2 3.2 3.2 24 22 22 18 22 17 17 13 41 32 32 26 14 12 10 8 1/8 21 19.5 19.5 15.5 35.5 17.5 4 4 4 11 8 8 16 13 13 1/4 1/8 1/8 7 6.8 6.8 191 155 153 35.5 17.5 37.5 35.5 17.5 M32 x 2 23 10 8 3.2 154 42.5 46.5 41.5 21.5 18 Air cylinder CM2 2122CM2/ 101110112122Rod side flange

IDU/IDF

Rc 1 1/2 Rc 2 Auto drain Rc 1/4 INA-20-41-04 Note 5) 100 to 200VAC 220 to 240VAC 50 47 50 53 60 60 72 72 114 125 126 135 Weight (kg) Coating color Applicable compressor (screw type) kW Munsell 10Y8/0.5 (White) 11 15 22 37 75 55 Note 1) Select an air dryer according to the selection method and not the rated conditions.

LJ1H

Motor Mounting 143 Deflection Data 145 Part Number Designations N 1 1 B G LJ1 H 10 100 F W X10 Guide type High rigidity direct acting guide H X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 None B contact specification 2 pcs.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

F 6.8 4 LC LZ X Y Z ZZ 1/8 8 8 8 42.5 34.5 30 24 46.5 37.5 33.5 28 7 5.5 5.5 5 88 64 62 62 22 17 17 13 41 32 32 26 6 6 5 50 45 45 41 40 32 25 20 24 22 22 18 14 12 10 8 171 137 135 131 21 19.5 19.5 15.5 M26 x 1.5 M26 x 1.5 M20 x 1.5 27 25 25 21 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M10

ISO Cylinder

32 20 22 15 33 43 1.0 Foot: M Rod flange: G Head flange: G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.3 G G (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.5 W W Rod (side) W (40)1 (40)1 (40)1 (40)1 (100)1 (100)1 0.7 (40)1 (40)1 (40)1 (100)1 0.3 38 79 0.1 (40)1 (40)1 Head ( side ) 0.5 37 29 60 76 600 500 400 300 1000 1100 900 800 700 200 100 0 Cylinder stroke [mm] (40)1 0.7 34 30 23 50 63 1 The data

SMC

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Standard type Nil PNote 1) Axial piping type Note 1) The combination of axial piping type and both ends adjusters or retraction end adjusteris not

7

4, 3/8 1/2 88 (93.5) 22.5 30 U U V 22 27 55.5 (61) 27 42 (47.5) 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 30 47.5 (53) 3 A VXD2 64.5 52.5 Model Mounting bracket dimensions Port size P a b d e f 1/4, 3/8 1/2 48.5 47 55 53.5 67 52 28 27 VXD2 3 A ( ): Denotes the Normally Open (N.O.) dimensions.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1 !

CM2

5 5 24 M20 X 1.5 18 8 28 12 15.5 8 M8 X 1.25 20 15 12 13 20 8 41 20 1 to 300 17 6 5.5 30 M26 X 1.5 22 10 33.5 12 19.5 8 M10 X 1.25 22 15 12 13 25 8 45 26 34.5 1 to 300 17 6 5.5 M26 X 1.5 22 12 37.5 15 19.5 10 M10 X 1.25 27 15 20 13 32 8 45 26 21.5 42.5 1 to 300 22 8 7 M32 X 2 24 14 46.5 15 21 10 M14 X 1.5 33 20 16 40 11 50 32 With rod boot h Symbol Bore S U Z ZZ P 1/8 1/8 1/8 1/4 RR Stroke

Table of Contents

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS121F-M3 AS131F-M3 M3 x 0.5 6, 10, 16, 20 AS121F-M5 AS131F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

Vacuum System Peripherals:

0.85 (1) Compact 2 port solenoid valve Series VX2 (2) (1) to 1 8 3 8 0.58 to 11 Vol. 4 3 port solenoid valve Series VT VT325/307/317 to 1 8 3 8 Vol. 4 0.63 to 5.5 3 port solenoid valve Series VP VP300/500/700 to Vol. 4 1 8 1 2 2.9 to 15 3 port solenoid valve Series VS to Vol. 4 1 8 3 4 3.8 to 20 3 position valve Series VEX3 (Closed center) to 1 8 1 2 2.4 to 24 Vol. 5 3 4 to 2 160

Air Fittings & Tubing

7 20 3.5 10 11 20 12 21 4.4 11 21 34 15 23 35 31 29 38 64 34 43 69 10-32UNF 12.7 13.7 15.4 9.3 15.6 2.5 1 16 23 22 11.11 5 32 16 10.4 10 18 3 1 8 1 4 1 8 1 4 26 25 14.29 11.11 24 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 3.5 11.4 10 16.5 3 16 19.5 26 14.29 10-32UNF 13.6 18.1 2.5 12 16.1 7 26 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1

Modular F.R.L. Units

Example) AC30-F03DE1-KSTV-136NR-B q Nq Body size 20 25 30 40 50 55 60 Symbol Description Nw Pipe thread type Nil Rc N1 NPT F2 G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without auto drain C4 N.C. (Normally closed) Drain port is closed when pressure is not applied. D5 N.O.

Round Type Hydraulic Cylinder

(n 2) 2 20 + 35 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9 5 20 CHQ 55 (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 D-M9W 10 20 55 CHK (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) (n = 2, 3, 4, 5) 25 + 35 D-M9A 10 25 60 CHN (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9 5 15 50 CHM CHM (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) (n = 2,