Floating Joint

40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15 2.07 2.07 2.8 9 1100 2500 2500 4400 4400 4400 11000 11000 18000 28000 28000 28000 55000 0.5 0.5 0.5 0.75 0.75 0.75 1 1 1.25 2 2 2 3 8 9 9 13 13 13 15 15 18 24 24 24 42 32.5 36 36 49 49 49 61.5 61.5 76.5 94 94 106 152 1 1.5 1 1.25 1.5 1.75 1.5 2 2.5 3

MGG

Other Warning 1. Consult SMC concerning water resistance, flexibility of lead wires and usage at welding sites, etc. 55 Series MGG Specific Product Precautions 1 Be sure to read before handling. Refer to pages 49 through 55 for safety instructions, actuator precautions and auto switch precautions. Mounting and Adjustment Warning Caution 1.

Table of Contents

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 10-SY3000 SY3000-38-20A 10-SY5000 SY5000-38-1 A 10-SY7000 SY7000-38-1 A EXH port (Both sides) E5 5 10-SY3000 SY3000-39-20A 10-SY5000 SY5000-39-1 A 10-SY7000 SY7000-39-1 A 1 8 1 4 10-SY9000 SY9000-39-1 A 1 4 1 8 1 4 10-SY9000 SY9000-38-1 A 1 4 P1 1 SUP port Note) In case of types 20P and 23P, for protection of the wiring unit section from drainage, piping at the EA

MXS

0 A B NN-M6 X 1 thread 12 deep 6 1 26 5.1 9.5 10.5 10.5 A B 24 10.5 24 10.5 H (NN-1) X H G Cross section AA Cross section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 87 87 87 97 112 162 210 260 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

8 40.5 M Bottom view of MXQ25-75 13228 15 31 K 8 15 31 KA 22 50 65 0.5 52.5 8 55 Z ZZ G (NN 1) x H H 32 11.5 32 11.5 A B 6.6 6.6 11 12 12 35 1.5 A B NN x M8 x 1.25 thread depth 16 7 HA GA 6H9 ( ) depth 6 +0.030 0 6H9 ( ) depth 6 +0.030 0 B-B A-A (mm) Model F 55 46 55 65 75 60 48 60 65 N 4 4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23

2–4

70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 115 x 140 M6 x 55 x 60 x 65 x 70 x 75 x

Free Mount Cylinder

9, @0, @1. Seal kit includes !9, @0, @1.

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFY04-01 KFY04-02 KFY06-01 KFY06-02 KFY06-03 KFY08U-01 KFY08U-02 KFY08U-03 KFY08N-01 KFY08N-02 KFY08N-03 KFY10U-02 KFY10U-03 KFY10U-04 KFY10N-02 KFY10N-03 KFY10N-04 KFY12U-02 KFY12U-03 KFY12U-04 KFY12N-02 KFY12N-03 KFY12N-04 28 32 31 37 51 48 50 55 47 48 53 58 63 89 57 62 88 79 79 93 76 78 92

AC

270 440 590 960 M5 X 0.8 IR 1 2 1 8 3 4 1 4 VEX 3 8 1 4 1 2 1 2 3 4 AW 1 1 1 2 1 4 1 2 AMR Operating air quality Caution AWM Refer to p.5.2-1 in Best Pneumatics 1 for details.

Compact 5-Port Solenoid Valve

A-w Connector gasket SX3000-146-2 Supplied individually A-q Manifold block assembly A-e Manifold block gasket JSY11M-9P-2 JSY31M-9P-2 JSY51M-9P-2 Supplied individually A-r Tie-rod for additional stations*1 JSY11M-49P-1-1-A (6.5 mm pitch) JSY11M-49P-2-1-A (9 mm pitch) JSY31M-49P-1-1-A (11.5 mm pitch) SV2000-55-2A-A (16 mm pitch) 3 pcs. supplied Plug-in Common Dimensions Made to Order t Tie-rod

JA/JAH/JB/JS

As a rule, after the rod bottoms out, back off 1 to 2 turns.

JA/JAH/JB/JS

As a rule, after the rod bottoms out, back off 1 to 2 turns.

CL

8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 10 9 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 15 10 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28

CHKD/CHKG

8 16.5 6 25 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 9.5 depth 5.4 49 1/8 17 8 32 61 51 10 18 14 M12 x 1.75 15 7 47 6.6 11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth

CS1

1 !2 !3 !4 !5 !6 !7 !8 !

High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

1 !3 e !0 q o t w !0 r q o i !1 !3 e 20, 25 w t !2 !4 !1 !3 e !0 q o w t !0 r o q !1 !3 e Component Parts Rod end nut No.

CQM

30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x