AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

1 Vibration frequency 50 60 50 Vibration suppression control 1 Resonance frequency 50 60 50 Vibration suppression control 1 Vibration frequency damping 0.20 0.15 0.20 Vibration suppression control 1 Resonance frequency damping 0.20 0.15 0.20 Vibration suppression control 2 Vibration frequency 20 30 20 Vibration suppression control 2 Resonance frequency 20 30 20 Vibration suppression

LEC-OM07605CN

1A.1 (1) LECSS2T (2) (2) [Pr.

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

VZS

100 VAC, 50/60 Hz 200 VAC, 50/60 Hz Nil N T F Standard Rc Nil Z None With light/surge voltage suppressor NPT 1 110 VAC, 50/60 Hz Option NPTF S With surge voltage suppressor 220 VAC, 50/60 Hz G 2 position double 5 6 9 24 VDC 12 VDC Note) Indicator light is not available for grommet type.

New

VXD40S-3A-1A VXD40S-3A-1A VXD40S-3A-1A VXD40S-3A-1A VXD40S-3A-1A Air operated type VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A VXD40S-3A-2A Solenoid valve type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 Air operated type AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 AN40-04 VXF(A)25BA(B) VXF(A)26BA(B) VXF(A)26CA(B) VXF(A)26DA(B) VXF(A)27BA(B) VXF(A)28BA(B) Note) Spring

VZ100/300/500

Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Made to Order Specifications (For details, refer to page 4-6-46.)

Table of Contents

ZS-20-5A-50 . 1 pc.

Table of Contents

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

VZ1000

Coil rated voltage (V) 24, 6, 12, 48 Allowable voltage fluctuation (%) Power consumption (W) [Current mA] 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Note) DC 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Inrush Note) Apparent power (VA) [Current mA] AC 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz 200

XL-OMY0002

9-1A XLD100-2-9-1A XLD160-2-9-1A XLD63-2-9-1A ** XLD80-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** AS568-020V AS568-020 ** 1) FKM:No.1349-80** AS568-030-XN1 2) 5 P11 3) 7 XL-OMY0002 Barrel ULTIC ARMOR Perfluoro Kalrez Chemraz VMQ FKM for R R R R EPDM PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 1) Barrel Perfluoro

High Vacuum L Type Valve

-2-9-1A ** XLD100-2-9-1A ** XLD160-2-9-1A ** Assy (4) Initial pumping Standard AS568-020V valve seal (5).

3 Port Solenoid Valve

V100-31-1A Part No. V100-77-1A Round head combination screw Place the notch mark on a blank plate to the port 2 side when assembling.

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NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

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Nil/G N/T 2-port 7 MPa 3 MPa SGH100 3 MPa SGH1-16-1A SGH100 7 MPa 3-port 7 MPa 3 MPa EBKX-W4005 EBKY-D8006 SGH200 2-port 7 MPa SGH2-16-1A 7 MPa 3 MPa SGH1-16-1A SGH200 3 MPa 3-port SGH300 7 MPa SGH2-16-1A 7 MPa 2-port 7 MPa SGH3-16-1A EBKX-Z2003 EBKY-D8007 3 MPa SGH400 3 MPa SGH2-16-1A SGH300 7 MPa 3-port 7 MPa SGH3-16-1A 2-port 7 MPa SGH4-16-1A 3 MPa SGH3-16-1A SGH400 3-port 7 MPa SGH4-16

Manifold Specifications

Internal wiring 1 3 5 6 M5 C4 C6 VZ323MOZApplicable valve model Rated voltage 100 VAC 50/60 Hz, 110 VAC 50/60 Hz, 24 VDC, 12 VDC Note ) Withstand voltage specifications of wiring unit part is equivalent to JIS C 0704 class 1.

3 Port Air Operated Valve Series SYJA300 1

Free 300/50 VPA342: VP300-27-1A VPA542: VP500-27-1A VPA742: VP700-27-1A Bracket (With screw) Option N.C. N.O. Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF.

0.55

Body Ported 0.5 MPa = 73 psi Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm Average speed Series (mm/s) 6 10 16 20 25 32 40 40 50 63 80 100 125 140 160 1000 Perpendicular, upward actuation Horizontal