MY1

0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

CQM

3.5 20 3.5 6.5 7.5 7 4 0.5 20 6 17 12 4.5 25.5 5.4 9 9 10 7 1 26 8 22 15.6 5 28 5.4 9 11 10 7 1 30 8 Note) For the following bore/stroke sizes, the through-hole is threaded.

CS1

1 !2 !3 !4 !5 !6 !7 !8 !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

Model: 2000 (SV2000), Valve Manifold Stations: 16

Model: 2000 (SV2000), Valve Manifold Stations: 19

Model: SV2000, Valve Manifold Stations: 19

Model: SV2000, Valve Manifold Stations: 17

Model: SV2000, Valve Manifold Stations: 18

Model: SV2000, Valve Manifold Stations: 4

Model: SV2000, Valve Manifold Stations: 6

Model: SV2000, Valve Manifold Stations: 2

Model: SV2000, Valve Manifold Stations: 16

Model: SV2000, Valve Manifold Stations: 9

Model: SV2000, Valve Manifold Stations: 3

Model: SV2000, Valve Manifold Stations: 5

Model: SV2000, Valve Manifold Stations: 10

Model: SV2000, Valve Manifold Stations: 7

Model: SV2000, Valve Manifold Stations: 11