ZP

flats 7 Hexagon width across flats 7 Hexagon width across flats 7 Flat with ribs Flat with ribs Applicable Tubing Flat/Flat with Ribs Flat/Flat with Ribs G: M5 x 0.8 Y G: M6 x 1 G: M6 x 1 Y Applicable tube O.

SMC

Grade 4 M4.5 ISO class 6 10 M5.5 ISO class 7 0.1 0.5 1 1 M6.5 ISO class 8 Particle diameter (mm) Selection procedure (1) Required clean room cleanliness? Class M2.5 or Class M3.5 or Class M4.5? Diagram 1 Air flow (2) Air flow to the workpiece (Refer to Diagram 1.) Workpiece A The air flow is blocked before it reaches the workpiece.

Vacuum System Peripherals:

0.9 MPa VG342 Model 3 position valve Series VEX3 Piping specifications Port size P, A port R port Model Effective area (mm2) (Cv) Flow characteristics C (dm 3/(sbar)) to VEX3 20 1 3 1 8 1 2 160 to 670 160 to 670 160 to 670 2.4 to 9.8 Air operated 1 2 24 VEX3 00 5 7 9 3 4 to 2 VEX3 21 1 3 to 1 8 1 2 2.4 to 9.8 Body ported External pilot solenoid valve 24 1 2 to 2 3 4 VEX3 01 5 7 9 VEX3 22

JXCx-OMU0004

.67 RESET 87 STOP 9 53 97 NO.6 No.6 (3) NO.7 No.7 No.7 (1) NO.7 No.8 NO.8 (4) No.9 NO.9 (2) (1) 6 7 9 7 (2) 8 9 7 (3) 8 7 5 3 (4) 7 9 9 7 *1 PLC I/O 1No.7 (3)No.7 (1)NO.7 (3)NO.7 [1] OUT23 ONIN02 STOP 2 (4) (2) (4) RESET No.8 No.9 ON7 (1) NO.8 NO.9 RESET STOP OFF ON IN0 [2] BUSY ONOUT01 bit_0 OFF IN1 ON OFF [3] BUSY ON IN2 OFF [4] RESET [5] BUSY OFF [6] BUSY OFFRESET

Pin Clamp Cylinder Series CKQ/CLKQ

1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

C85

7 q !4 !1 w e !3 !

7

: Degrees of protection against water 0 1 2 3 4 5 6 7 8 1.

LJ1H

LJ1-7-G/Matsushita Electric Industrial Co., Ltd. 100 Driver Non-standard motor electric actuators LJ1 and LG1 75 90 5 30 (195) AC servomotor short stroke electric actuator LX How to order 13 Compatible model 1 G LJ1 05 B 1 LJ1-7-R/Mitsubishi Electric Corporation Brake G R Y Nil B Matsushita Electric Industrial Co., Ltd.

V100

Ground 4-7-11 12 Series VT317 How to Use DIN Terminal 1.

LEC-OM07605CN

_ _ 1 F 290 7 7 7. 7.1.4 (1) VG2 ([rad/s]) = 1 + GD2 10 Pr.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A Ball bushing bearing #5 @5 #0 @6 @8 !7 !3 #8 !2 @1 !

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

thread depth 13 (Insert) 7 22 Stroke adjuster at retraction end 7 2.5 (With stroke adjuster at extension end) 4.5 (With stroke adjuster at retraction end) 38 92 89 56 70 FF 38 24.5 F 6H9( ) depth 6 +0.030 0 31 6 x M6 x 1 thread depth 10 N 1 x F 2 +0.030 0 6H9 ( ) depth 6 55.5 2 x M8 x 1.25 thread depth 15 40.5 M 0.5 58.5 62 Z ZZ G H (NN 1) x H 16 34 16 34 A B 11 12 6.6 12 38 2 7 A B NN

15

1 1 1 1 1 1 1 1 Description Quantity Motor type NZ NY NX NM1 NM2 Motor side hub 1 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 1 1 1 1 Ring spacer 1 1 1 1 Hexagon socket head cap screw/set screw (for hub fixing)* 1 1 1 1 1 Hexagon socket head cap screw (for motor flange fixing)* 2 2 Ring spacer 1 1 * For screw sizes, refer to the hub mounting dimensions

smcmaintenancepartslist

9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

ZP

Thread dia. 4, 6 tube 4, 6, 8 tube 6, 8 tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Flat 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20 25, 32, 40, 50 Flat with ribs Deep Bellows Pad

RHC

M8 x 1.25 192 22 20 20 1/4 55 46.5 40 6.5 M24 x 1.5 19.6 17 37 36.9 270 32 9 233 M10 x 1.25 193 5.8 to 8.8 27 20 25 1/4 MI W S 60 53 45 7 M30 x 1.5 19.6 17 43.5 43.9 278 38 9 241 M10 x 1.25 195 27 23 32 3/8 75 62 55 7 M33 x 2.0 25.4 22 52.5 47.3 292 41 11 251.5 M14 x 1.5 201.5 30 25 6.8 to 11.3 40 3/8 CEP1 CE1 50 to 100 H EA CE2 EA FA GA A NE Rc P Rc P GA M Effective thread ML2B K WH ND

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

To order connector cable only Connector dimensions 4 Brown: 1 Blue: 3 9 3 1 Black: 4 33.9 L 35 10 Cable length (L) Part no. 300 mm V100-49-1-1 500 mm 1000 mm 2000 mm 5000 mm V100-49-1-2 V100-49-1-3 V100-49-1-4 V100-49-1-7 3000 mm V100-49-1-5 4000 mm V100-49-1-6 Caution Failure to meet IP65 performance may result if using alternative connectors than those shown above, or when insufficiently

ZP

1 A14 M14 x 1 Type Symbol Size Pad diameter [mm] 10 to 16 20 to 32 40, 50 i Lock ring Lock ring unit A5 M5 x 0.8 1 A6 M6 x 1 1 1 1 A8 M8 x 1 1 1 Part no.

Tie-rod Type Hydraulic Cylinder

(same surface) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 2, 4, 6, 8 )Note 1) 1 pc. 100 100 110 120 15 1 or 2 pcs. (different surfaces/same surface) 120 120 130 140 D-F5W, J59W D-F5BA D-F59F D-F5NT 15 140 + 55 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 (n 2) 2 120 + 55 120 + 55 130 + 55 "n" pcs.

LX

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg