Table of Contents

, MHZL2-16 (0.4) 0.4 MHW MHZ2-20, MHZL2-20 (0.4) No setting 0.4 0.5 1 0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Vacuum System Peripherals:

Construction Port size Rc Model ZL AR10 AR20 1 16 1 8 1 8 1 8 1 4 1 4 1 4 1 4 100 0.05 to 0.7 600 M5 x 0.8 1 8 1 4 , ZY AR25 , 1200 1 4 3 8 AR30 AR40 AR40-06 AR50 AR60 1 4 3 8 , , , 2900 5000 6000 0.05 to 0.85 Relieving type 1 4 3 8 1 2 ZQ 3 4 3 4 , 1 1 8000 10 ZF Inlet pressure 0.7 MPa, Set pressure 0.5 MPa, Pressure drop 0.1 MPa ZP ZCU Modular, Filter regulator Series AW Flow rate

Table of Contents

4" 5/16" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7 NPT 1/8 26.7 30.7 45.3 52.8 24.4 14.3 NPT 1/4 28.7 34.7 45.3 52.8 24.4 17.5 NPT 3/8 30.4 36.7 45.3 52.8 24.4 17.5 NPT 1/4 33.8 39.8 49.6 55.6 30 17.5 NPT 3/8 35.5 41.8 49.6 55.6 30 22.2 NPT 1/2 37.6 45.8 49.6 55.6 30 15-13

Air Fittings & Tubing

32 3 16 1 4 5 16 3 8 9 16 -18 9 16 -18 3 4 7 8 1-12 1-12 -14 -16 1 2 28.6 22 28.6 9.6 26 Plug: KQ2P, KQP Fitting size d (inch) Part No.

ISO Cylinder

10 12 M12 x 1.25 4 M5 x 0.8 12 5 28 14.2 M4 x 0.7 19 6 15 12 7 16 12 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 16 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 22 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S Z 1 to 50 51 to 100 101 to 150 1 to 50 51 to

2 Phase Stepper Motor/Without Motor Brake Series LXS

B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

LEC-OM02704CN

33 44 55 66 (3) (RES)ON [8][2] [0][0] 1EA5 14 41 14 14.5.11 (1) (a) [4][0][0][1][F][F] 14.4.1 16 0 11 () 22 33 44 55 0 0 0 16 66 1 10 0 1 (b) [5][0][0][1][F][F] 14.4.1 0 16 0 0 0 16 1 10 0 1 14 42 14 (c) [5][4][0][1][F][F] 14.4.1 0 16 0 0 0 16 1 10 0 1 (d) [5][8][0][1][F][F] 14.4.1 0 16 0 0 0 16 1 10 0 1 14 43 14 (e) (DWELL) (DWELL) [6][0][0]

ZP

1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Flat with ribs Deep Bellows Flat 2, 4, 6, 8, 2 x 4, 3.5 x 7, 4 x 10, 10, 13, 16, 20 25, 32, 40, 50 Pad form Thin flat/Thin flat with ribs 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 Pad diameter (mm) 10, 13, 16, 20, 25, 32, 40, 50 10, 13, 16 10, 16, 25, 40 Material (Color) NBR (Black), Silicon rubber (White), Urethane rubber

C85

M6 x 1 M8 x 1.25 M10 x 1.25 dh7 h 27 27 30 30 36 43 d6 18 18 20 20 24 28 b3 b1 l 10 10 12 12 16 20 d7 11 11 13 13 16 19 l3 10 10 10 10 12 14 Bore Model Thread e M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.25 b d 16 16 24 24 32 40 0 8 10 12 16 20 25 8 10 12 16 20 25 KJ4D KJ4D KJ6D KJ6D KJ8D KJ10D GKM4-8 GKM4-8 GKM6-12 GKM6-12 GKM8-16 GKM10-20 8 8 12 12 16 20 6 6 8 8 10 12 8 8 12 12

SMC

thread depth 12 6 10.5 10.5 1 9.5 26 5.1 B A 10.5 24 10.5 24 H G (NN1) x H Section AA Section BB (mm) Model F 35 35 35 40 30 55 65 70 ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 H 40 40 40 50 30 35 35 35 G 16 16 16 16 21 26 39 19 N 4 4 4 4

RHC

, 16 3/8, 16 1/2, 16 1500 2000 2500 3000 28.5 Composed effective area So (mm2) Composed effective area So (mm2) Composed effective area So (mm2) 100 RHC = 0.7 38 47 0.5 56.5 MK(2) 0.1 0.3 10, 12, 16 1/4, 3/8 50 RS Q G 500 15 63 RS H A 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 1000 1500 2000 2500 3000 30 0 45 1,000 2,000 3,000 60 RZQ Maximum speed Vmax (mm/s) 75 89.5 80 MI W S 16 3/8, 1/2 500

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

SMC Pneumatic Clean Series

5 8 8 8 50 45 45 41 36 31 31 31 6 6 6 6 6 6 5 M26 x 1.5 M26 x 1.5 M20 x 1.5 108 82 80 80 15 11.5 10.5 8.5 40 32 25 20 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 55 40 40 40 75 55 55 55 27 25 25 21 122 120 120 3.2 3.2 3.2 24 22 22 18 22 17 17 13 41 32 32 26 14 12 10 8 1/8 21 19.5 19.5 15.5 35.5 17.5 4 4 4 11 8 8 16 13 13 1/4 1/8 1/8 7 6.8 6.8 191 155 153 35.5 17.5

Round Type Hydraulic Cylinder

40 55 M8 x 1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1 !

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

(mm) ZZ 107 107 107 117 132 182 230 280 M 76 76 76 86 101 151 199 249 Z 75 75 75 85 100 150 198 248 K 29 39 49 59 69 94 119 144 J 40 40 40 50 60 85 118 155 I 10 10 10 10 15 40 55 68 NN 2 2 2 2 3 4 5 7 NA 2 2 2 2 2 4 4 4 H 40 40 40 50 30 35 35 35 KA 125 173 223 G 16 16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 Model F 35 35 35 40 30 55 65

Modular F.R.L. Units

H J H J AW10-A M5 x 0.8 1/16 25 59.9 47.4 12.5 M18 x 1 25 12.5 26 26 AW20(K)-B 1/8, 1/4 1/8 40 87.6 72.4 26 M28 x 1 40 26 5 28 27 27.8 37.5 37.5 62.5 37.5 63.5 AW30(K)-B 1/4, 3/8 1/8 53 115.1 85.6 29.4 30 M38 x 1.5 55 29.4 3.5 28 30.4 27.8 40.9 37.5 65.9 37.5 66.9 AW40(K)-B 1/4, 3/8, 1/2 1/8 70 147.1 91.7 37.3 38.4 M42 x 1.5 80 37.3 1.5 28 38.3 27.8 48.8 42.5 74.8 42.5 74.8 AW40(K)-06

CM2

40 15 30 62 22 10 55 20 13 8 8 25 45 25 34.5 37.5 5.5 M10 X 1.25 1to450 19.5 17 32 6 8 6.8 104 3.2 M26 X 1.5 137 47 4 28 40 15 64 22 12 55 20 13 8 8 25 45 32 21 7 7 M14 X 1.5 21.5 M32 X 2 42.5 46.5 1to500 22 41 8 10 134 3.2 171 54 4 30 55 88 24 14 75 23 16 10 11 27 50 40 With rod boot (mm) Symbol h Z l Stroke e f 1 to 50 51 to 100 1 to 50 1 to 50 101 to 150 151 to 200 201 to 300 301 to 400