High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

VQZ1000/2000/3000

55 X 13.6 R1 R2 5 3 1 P R1 R2 5 3 1 P (29) 20 6 8.5 PE port 4-Rc 1/8 3(R2), 5(R1) port 15 16.5 16.5 15.5 15.5 33 57 7 (30.5) 2-Rc 1/8 2-M5 x 0.8 external pilot port 1(P) port 54 6.5 External pilot specifications The broken lines indicate the DIN rail mounting style [-D].

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

CLA

i.\4 L, Material: Free cutting sulfer sleel Malenal: Cast lion -NX A 1 ~ 1-05 50-63 74 27 28 60 M18X 1.5 15.5 2Q 121'0711 1 ~ Y-04d 40 22 24 55 M1 4X 1.S 13 25 12171) 1 6'j-~ 38 p .OS 80 91 37 36 71 M22Xl.5 225 26 18,&070 281l V. SO-63 27 28 60 M' 8Xl .5 15 27 12'870 1 6 ~f 38 ~10 100 105 37 40 83 M26Xl .S 24.5 28 20-8-08< 3():gJ Y-08d 80 37 36 71 M22Xl .S 19 28 181. 010 28!

MB1

M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 4 4 5 9 11 .5 17 6.5 9 10.5 12 14 15 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(Pitch) VT L1 4 L2 VT VP VG Manual override (Non-locking) VP 48.5 [55] 36.1 29.5 VQ 20 VQZ [ ] for AC VZ L plug connector (L) M plug connector (M) VS 12 12 8.5 8.5 17.5 1 1.5 17.5 11.5 P R 53.2 [54.5] P R 36 36 49.2 62.8 (Lead wire length) 4-Rc(PT)1/8 4-Rc(PT)1/8 48.5 [55] 300 (P/R port) (P/R port) 300 59.6 [66.1] (Lead wire length) 36.1 48.5 [55] [ ] for AC Other dimensions are the same

F

17 14 31.5 15.5 13 15.5 3.4/2.9 5/32 1/4 KQE03-35 1/2-20 17.46 17.46 31.5 15 14 16 3 4 18 KQE04-01 M12x1 14 14 27.5 11 13 16 5.6 3/16 1/8 KQE05-34 9/16-18 17.46 17.46 28.5 13 15 16.5 3.5 4 14 KQE04-02 M12x1 17 14 31 15 13 16 5.6 1/4 1/4 KEQ07-35 9/16-18 17.46 17.46 30.5 14.5 15 17 4.6 6 18 KEQ06-01 M14x1 17 17 28 11 15 17 13.1 5/16 3/8 KQE09-36 3/4-16 22.23 22.23 35.5 15 20 18.5 6 6 14 KQE06

51

Different surfaces Different surfaces Same surface Same surface (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9 5 15 Note 1) 40 Note 1) (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) 20 + 35 D-M9W 15 Note 1) 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) 25 + 35 D-M9A 25 40 Note 1) 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) 15 + 35

CLK1

26 41.2 169 + Stroke Unclamp side lock (F) 3-Rc 1/8 Unclamp side port 3-Rc 1/8 Clamp side port 25 60 34 + Stroke 20 Rear cushion valve 12 4 53 12 6 5 47 45 45 19 9.5 M10 x 1.25 12 40 26 26 10 Width across flats 10 R12 Width across flats 36 Shaft: 10d9 0.040 0.076 +0.022 0 Hole: 10H8 12 +0.5 +0.2 169 + Stroke 102 + Stroke 55 6 12 26 41.2 49 Note) Refer to pages 13 and 14 for accessories.

Clamp Cylinder with Lock Series CLK1

) Refer to pages 13 and 14 for accessories. 5 Clamp Cylinder with Lock Series CLK1 Dimensions (mm) CLK140, 50, 63/Standard Type 1in = 25.4mm Cl id l k (B) Clamp side lock (B) 3-Rc 1/4 Rear cushion valve Top width across flats 3 L + Stroke N GB W 52 17 1010 14 GA 4-M6 x 1 Thread depth 12 Clamp side port 3-Rc 1/4 45 45 3 BX Unclamp side port M IA 25 43 BY Max.Wc 40 Ws 35 13 30 D 36 Width across

MGP

Nm = 0.7375 ftlb 1kg = 2.2046lb 20 Compact Guide Cylinder With Air Cushion Series MGP Model Selection Selecting Conditions Vertical Horizontal l l m Mounting orientation m Maximum speed (mm/s) Graph (Slide bearing type) Graph (Ball bushing type) 400 200 400 200 1 7 , 1 8 1 , 2 3 , 4 1 5, 1 6 21 , 22 1 9 , 20 5 to 9 1 0 to 1 4 Selection Example 1 (Vertical Mounting) Selection Example 2 (Horizontal

Square Tube Type Air Cylinder Series MB1

M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 4 4 5 9 11 .5 17 6.5 9 10.5 12 14 15 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

38 16 14 19 11 13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6

70astamb1

14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 22 30 35 35 40 40 47 51 58 58 72 72 135 139 156 156 190 190 84 84 94 94 114 114 1/8 1/4 1/4 3/8 3/8 1/2 26.5 26.5 31 31 37.5 37.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 4 4 5 5 5 5 Up to 500 Up to 500 Up to 600 Up to

mb1

14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 22 30 35 35 40 40 47 51 58 58 72 72 135 139 156 156 190 190 84 84 94 94 114 114 1/8 1/4 1/4 3/8 3/8 1/2 26.5 26.5 31 31 37.5 37.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 4 4 5 5 5 5 Up to 500 Up to 500 Up to 600 Up to

KR

(mm) Note) Weight (g) D Applicable tubing KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 1 8 4 15 23 11 16 14 11 13 15 17 13.1 10.4 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 5.6 10 Connection thread 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14

Round Type Low Pressure Hydraulic Cylinder Series CH
M

26 10 16 12 8 41 5 8 30 5 M8 x 1.25 1/8 81 M22 x 1.5 13 26 19 15 138 23 f8 15.5 to 800 25 22 17 32 12 16 12 8 46 6 8 32 5.5 M10 x 1.25 1/8 81 M24 x 1.5 13 28 19 15 143 25 f8 19.5 to 800 32 24 22 38 16 19 12 8 53 8 9 40 7.5 M14 x 1.5 1/8 87 M30 x 1.5 13 36 19 15 159 31 f8 21 to 800 40 24 24 41 18 21 14 11 54 10 11 48 7.5 M16 x 1.5 1/4 108 M33 x 2 19 44 24 21 183 34 f8 21 to 800 Axial foot

•

:U 42 boc~~ze . d 1-1 B C D 27 28~oe. 72ji Y-14A 140 8 48 105 M30 x 1.5 47 36:21 NT-12 125, 140lM30 x 1.5 18 46 53.1 44 30 NT16 160 /M36x1.5 21 55 63.5 53 M36x 1.5 32 ~~' 4072J Y-16A 110 80~J 34 46 ' 1 160 8 55 * Use a single knuckle 101n1 or a double knuckle JOint Individually.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

15 B 8 9.5 9.5 11 11 HT 17 24 23.5 29 36 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 C 4.2 5.2 5.2 6.5 6.5 HB 17 21 23.5 29 36 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 L 53 62 70 76 90 W 25 40 40

CG5-S

12 6 14 4 M14 x 1.5 44 1/8 93 143 50 to 1200 109 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 55 1/4 167 63 to 1200 109 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 69 1/4 167 80 to 1400 130 40 37 32 17 M10 x 1.5 19 50 25 33 3 28 20 71 13 89 M10 x 1.5 depth 22 10 22 7 M22 x 1.5 80 3/8 201 100 to 1500