Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1 25.3 32.4 16 25.2 34.4 4 10.4 5/16" 15.2 18.5 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 17 25.2 17.7 34.4 6 12.8 5/32" 10.4 16 18.5 29.4 34.9 39.9 17 34.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02

VM

Straight plunger VM220-02-05 VM230-02-05 JIS Symbol 2 port Hexagon nut thick 6, across flats 27 EXH port (3 port only) 3 port Panel mount hole 0.5 MPa supply 3.5 mm P.T. 56 N F.O.F. 2-5.5 mounting hole 2.0 mm O.T. 5.5 mm T.T. 5-6-22 21 2/3 Port Mechanical Valve Series VM200 Series VM200 Roller plunger VM220-02-06 VM230-02-06 VM220-02-06S VM230-02-06S JIS Symbol 2 port 17 polyacetal or hard

VFR

VFN Pilot type Nil R External pilot Internal pilot Plug-in VFR5000 P 06 Non plug-in VFS5000 S 06 Thread type Nil Rc Plug-in VFR5000 P B 06 G F N NPT Non plug-in VFS5000 S B 06 NPTF T Note) Bottom ported is not available for external pilot.

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1 25.3 32.4 16 25.2 34.4 4 10.4 5/16" 15.2 18.5 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 17 25.2 17.7 34.4 6 12.8 5/32" 10.4 16 18.5 29.4 34.9 39.9 17 34.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02

5 Port Solenoid Valve Series SV1000/2000/3000/4000

SV1000-M1(For mounting even number stations) SV1000-06(For mounting odd number stations) SV1000-05SV2000-00SV2000-M1SV3000-00SV3000-M1SV4000-M1SV4000-00Accessory Series Round head combination screw SX3000-22-9 (M2 x 39.5) Gasket SX3000-57-4 SV1000 SV2000-21-7 (M3 x 53) SX5000-57-6 SV2000 (B) 2 (A) 4 SV3000-21-4 (M4 x 57) SX7000-57-5 SV3000 JIS Symbol (B) 2 (A) 4 (A) 4 (B) 2 SV2000-21-8 (M3

ZP

Weight (g) Pad form Flat/Flat with ribs Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Barb fitting Barb fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 26 27 24 22 22 24 26 27 22 10 to 16 10

AC

AW4000 AL4000, AFM4000, AFD4000 3/8 33 35 42.2 1/2 50 35 42.2 3/4 AC400-06 AF4000-06, AR4000-06, AW4000-06 AL4000-06, AFM4000-06, AFD4000-06 3/4 E50-06 36 44 46.2 To order piping adapter with bracket, the parts number as shown below.

Speed Controller with Indicator

, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Modular F.R.L. Unit

3/4 E500-06 3/4 32 40 44 AC40-06, AF40-06, AR40-06, AW40-06 AL40-06, AFM40-06, AFD40-06 E600-06 3/4 35 48 53 AC50, AC55, AC60, AC50B, AC55B, AC60B AF50, AR50, AL50, AF60, AR60, AL60 E600-10 1 Notes) in model numbers indicates a thread type.

Table of Contents

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

Micro Mechanical Valve Series VM1000

) NC 18 36 4.5 13.5 18 VM4 SMC NO 22.5 OUT 13.5 25 3 x 1/8 21 35 T.T. 20 N F.O.F. 4 x 4.5 mounting hole 90 2312 3 Port Mechanical Valve Series VM400 Series VM400 Key selector (2 position) VM430-01-36 Panel mounting hole ON T.T. 40 OFF 39 Max. 6 38 21 30.5 Symbol 1.5 1.5 (OUT) 2 (126.6) 53 22.1 3 10 12 (105.6) 3 (N.C.) 1 (N.O.) (75.1) NC 36 4.5 13.5 18 13.5 18 VM4 SMC NO 22.5 OUT 35 25 21

Magnetically Coupled Rodless Cylinder

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

KR

(mm) Note) Applicable tubing L1 M1 Weight (g) D1 L2 Q D2 M2 Model a b Urethane Nylon Applicable tubing KGT04-06 KGT06-08 16.4 16.4 7.1 6.5 6 4 10.4 12.8 16 17 19.5 22.5 18 20 4.5 5.3 21 22 17 18.5 18.5 20.9 12.8 15.2 56 44.5 36 27.2 8 5 10 8 8 6 KGT08-10 26.5 28.5 15.2 18.5 18.5 21 23 26.5 6 6.8 14 21 KGT10-12 12 10 Note) D1: Max. diameter K Applicable tubing M H Male Run Tee: KGY D H (width

5 Port Solenoid Valve Series VQZ1000/2000/3000

AN120-M5 T0604 x 1m AS3001F-06 INA-25-46 T1075 x 1m AS4001F-10 AN101-01 T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage

V

Silencer 04 4mm 06 6mm Imperial 00 Built-in Silencer 07 1/4 Models O.D size d D1 D2 L1 L2 L3 L4 M1 Weight AQ240F-04-04 4 9.5 8.9 39.3 5 13.7 23.4 13 5.7 AQ240F-06-06 6 11.5 11 43.9 6 14.7 26.5 14 7.3 AQ340F-06-06 6 11.5 11 45.2 6.3 19.6 31.7 14 12.5 Courtesy of Steven Engineering, Inc. !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

-10 AS221FG-N01-07 23.9 31 21 21 32.1 14.1 39.2 10 18.5 1/4" 13.2 17 19 AS221FG-02-04 AS221FG-N01-09 14.1 25.3 32.4 16 25.2 34.4 4 10.4 5/16" 15.2 18.5 21 32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 17 25.2 17.7 34.4 6 12.8 5/32" 10.4 16 18.5 29.4 34.9 39.9 17 34.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02

Modular F.R.L. Unit

, AC40A-06 AC40B-06, AC40C-06 AC40D-06 40 72 62 62 Note 1) in the model numbers indicates a thread type.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

6 x 1m AS3001F-06 (Nl/min = 353.3) AS3001F-06 (Nl/min = 353.3) AN200-02 (Nl/min = 1904.1) AN110-01 (Nl/min = 1904.1) 10 x 1m AS4001F-10 (Nl/min = 873.5) 6 x 1m AS3001F-06 (Nl/min =127.2) 10 x 1m AS4001F-10 (Nl/min = 873.5) 12 x 1m AS4001F-12 (Nl/min = 1148.4) 6 x 1m AS3001F-06 (Nl/min = 1148.4) 12 x 1m AS4001F-12 (Nl/min = 1148.4) AN200-02 (Nl/min = 1904.1) AN200-02 (Nl/min = 1904.1) Conditions

ZP

Weight (g) Pad form Flat/Flat with ribs Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Barb fitting Barb fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 24 26 27 22 22 24 26 27 22 10 to 16 10