CL

11 11 11 11 16 16 18.5 8 0 0 0 0 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 51 58 58 71 72 110 110 120 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 11 11 14 17 17 30 24 26 22 19 22 237 245 254 262 296 305 315 324 379.5 402.5 382 405 419 440 9-3-10 43 Series CL1 Lock-up Cylinder Double Acting, Single Rod Rod Side Flange Style (F)/Long

SYJ300/500/700

VQ VKF VQZ L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (WO): SYJ54-WO-01 VZ VS VFN Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.4 74.9 MAX. 10 74.6 49.6 [56.6] 63.6 34.2 48.5 54.1 M8 x 1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 65.5 [67.7] 55.7 [57.9] 75.5 64.6 57.2 50.7 42 42 42 42 34.7

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 DC 30 36 42 NB 5h9 6h9 6h9 DO 34 40 48 NA 8 10 12 B 30 36 42 K 4 5 6 Q 6 7 8 AA 35 38 40 AB 32 35 37 J 10 12 14 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 Model MHS2-16D MHS2-20D MHS2-25D 0 -0.030 0 -0.030 0 -0.030 DVA 2H9 2H9 3H9 TB 5 6 6 SC 8 9.5 10 RB 16 18 22 RA 18 24 26 WA VB 2 2 3 XA 2H9 2H9 3H9 XB 2 2 3 Model MHS2-16D MHS2-20D

Metal Seal/Rubber Seal Series VQ Body Ported

Note) 2-4-47 Body Ported Series VQ0/1000/2000 VQ1000 51.5 (M plug connector) (AC, Latching) 46.5 (M plug connector) 5.2 L4 L3 45 (L plug connector) (AC, Latching) 42 6.2 L2 L1 P = 11 13.2 Indicator light Lead wire length 300 mm 40 (L plug connector) Manual override DIN rail clamp screw 9 93.5 (M plug connector) 99.5 (L plug connector) 65 R4.5 61.5 35 5.5 11 66 26 5 54.5 65 (3 position, M

Vacuum Pad

Dimensions: Pad Unit ZP2-B04MB ZP2-B06MB ZP2-B08MB 4.5 8 8 6 6 3 4 4 2 1.4 1.5 1 2 2 2 2 9 9 9.6 6 4 4 4.6 2.5 2.5 2.5 1.5 3.3 4.7 4.1 6 7 8 4.8 9 8.4 ZP2-B10MB ZP2-B15MB ZP2-B20MB 15 11 10.8 11 7.8 4.6 7.8 4.6 4.6 5.5 3.5 4.5 3.5 3 3.5 13 11 9.5 18 14.4 10.8 9.4 12 6.8 15 20 10 21 16 11 Adapter Mounting Dimensions If an adapter will be made by the customer, design the adapter with the dimensions

Vacuum Pad

Dimensions: Pad Unit ZP2-B04MB ZP2-B06MB ZP2-B08MB 4.5 8 8 6 6 3 4 4 2 1.4 1.5 1 2 2 2 2 9 9 9.6 6 4 4 4.6 2.5 2.5 2.5 1.5 3.3 4.7 4.1 6 7 8 4.8 9 8.4 ZP2-B10MB ZP2-B15MB ZP2-B20MB 15 11 10.8 11 7.8 4.6 7.8 4.6 4.6 5.5 3.5 4.5 3.5 3 3.5 13 11 9.5 18 14.4 10.8 9.4 12 6.8 15 20 10 21 16 11 Adapter Mounting Dimensions If an adapter will be made by the customer, design the adapter with the dimensions

Vacuum Pad

Dimensions: Pad Unit ZP2-B04MB ZP2-B06MB ZP2-B08MB 4.5 8 8 6 6 3 4 4 2 1.4 1.5 1 2 2 2 2 9 9 9.6 6 4 4 4.6 2.5 2.5 2.5 1.5 3.3 4.7 4.1 6 7 8 4.8 9 8.4 ZP2-B10MB ZP2-B15MB ZP2-B20MB 15 11 10.8 11 7.8 4.6 7.8 4.6 4.6 5.5 3.5 4.5 3.5 3 3.5 13 11 9.5 18 14.4 10.8 9.4 12 6.8 15 20 10 21 16 11 Adapter Mounting Dimensions If an adapter will be made by the customer, design the adapter with the dimensions

Vacuum Pad

Dimensions: Pad Unit ZP2-B04MB ZP2-B06MB ZP2-B08MB 4.5 8 8 6 6 3 4 4 2 1.4 1.5 1 2 2 2 2 9 9 9.6 6 4 4 4.6 2.5 2.5 2.5 1.5 3.3 4.7 4.1 6 7 8 4.8 9 8.4 ZP2-B10MB ZP2-B15MB ZP2-B20MB 15 11 10.8 11 7.8 4.6 7.8 4.6 4.6 5.5 3.5 4.5 3.5 3 3.5 13 11 9.5 18 14.4 10.8 9.4 12 6.8 15 20 10 21 16 11 Adapter Mounting Dimensions If an adapter will be made by the customer, design the adapter with the dimensions

Air Slide Table Series MXQ

" " ' 1 " # 2 Mass + ) , . /" * 42 . #) "33 -!* 3 3 # ) +2) 5 6 * 7)!* 73".. ( 42 ! 42 ! 42 ! MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 8 0 0 0 0 0 0 0 8 0 0 0 ( 8 0 0 ( ( ( 8 0 ( ( ( 8 ( ( 8 ( ( ( ( ( Option Specifications Stroke Adjustment Range of Adjuster Option & !) . 2 ! ) , /" /" :)3) ,"33 ) %5 * /" "33 7-!* 3 3 .

Tie-rod Type Hydraulic Cylinder

30 18 160 43 100 M16 x 2 M33 x 2 42 9 174 240 22 18 28 38 174 45 140 36 140 205 3/4 38 36 40 17 34 20 (mm) Without rod boot With rod boot Bore size (mm) S R T V W H ZZ e f h ZZ l 40 106 7.5 8 37 11 66 188 55 25 92 214 50 112 10 9 43 11 73 207 60 28 99 233 1/4 stroke 63 116 12 10 47 11 80 216 65 30 106 242 80 127 16 13 57 11 90 243 80 32 116 269 100 137 20 16 66 12 100 263 100 35 123 286

CL

11 11 11 11 16 16 18.5 8 0 0 0 0 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 51 58 58 71 72 110 110 120 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 11 11 14 17 17 30 24 26 22 19 22 237 245 254 262 296 305 315 324 379.5 402.5 382 405 419 440 9-3-10 43 Series CL1 Lock-up Cylinder Double Acting, Single Rod Rod Side Flange Style (F)/Long

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Without rod boot With rod boot H ZZ d* e* f h l ZZ 40 11 M14 x 1.5 27 1/4 42 11 20 45 153 60 9 12 80 42 100 51 215 52 43 15 59 1/4 stroke 223 50 11 M18 x 1.5 30 3/8 46 10 21 50 168 70 9 12 90 50 110 58 237 58 52 15 66 1/4 stroke 245 63 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 86 11.5 15 105 59 130 58 254 58 52 17.5 66 1/4 stroke 262 80 17 M22 x 1.5 37 1/2 55 15 23 70 208 102 13.5 18 130 76 160

Electric Actuator

Note 3) The Z phase first detecting position from the stroke end of the motor side. 11-LEFS40;;-200-; 11-LEFS40;;-200B-; 11-LEFS40;;-300-; 11-LEFS40;;-300B-; 11-LEFS40;;-400-; 11-LEFS40;;-400B-; 11-LEFS40;;-500-; 11-LEFS40;;-500B-; 11-LEFS40;;-600-; 11-LEFS40;;-600B-; 11-LEFS40;;-700-; 11-LEFS40;;-700B-; 11-LEFS40;;-800-; 11-LEFS40;;-800B-; 11-LEFS40;;-900-; 11-LEFS40;;-900B-; 11-LEFS40;;

Table of Contents

(Refer to page 14-19-11.)

Mechanically Jointed Rodless Cylinder Series MY1

Grease pack part number: D-X GR-S-010 (10 g), GR-S-020 (20 g) Individual -X Technical data 961 Series MY1B Construction: 16 to 100 MY1B16 to 100 23 33 32 31 30 24 8 4 6 7 5 1 2 11 19 16 3 6 47 30 37 39 26 MY1B16/20 38 40 MY1B80/100 36 MY1B16 45 43 11 13 15 12 17 20 28 26 10 18 SMC SMC 22 27 MY1B63 36 21 46 44 34 MY1B50/63/80/100 S 42 41 16 9 MY1B80/100 17 MY1B16 29 MY1B80/100 25 14 35 29

MY1

For MY1M50, 63 Work piece EY SMC EC a FH a 5 4.5 6 4 9 9.5 W 58 70 88 104 128 152 TT 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 7 12 15 15 25 25 S 46.7 67.3 73.2 73.2 99 99 h 3.5 4.5 5.5 5.5 11 11 FW 66 82 95 FH 16 22 22 FC 14 17 22 22 30 35 FB 52 67 78 F 5 6 8 8 8 8 EY 50 57.5 73 87 115 138.5 EC 7.7 9 11.5 12 18.5 19 EB 32 38 50 57 66 77 E 20 24

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

19 20.6 6 30 1/4 19 40 76.7 42 9 21 22.2 22.2 7.6 3/8 22 48 79.7 11 19 20.6 6 Size Port size Grommet Grommet with PCB Conduit J K J K J K 20 1/8 39.4 28.5 45.2 38 46.8 48.9 1/4 37.9 43.7 45.3 3/8 40.9 46.7 48.3 30 1/4 39 31.1 44.7 41 46.3 51.9 3/8 42 47.7 49.3 19 Direct Operated 2-Port Solenoid Valve JSX Series JSX20, 30 Dimensions: JSX20U, 30U Port Size 1/8, 1/4, 3/8 Body Material Brass

Valve Single Unit

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

BA 0 0.3 CA BA 0 0.3 Drawing of view E MM (mm) Bore size Z A NN S Y LB LC LH LT LX LY LZ X 85.5 6 15 15 17 3 8 12 11 28 16.5 4.5 9 1.6 24 16.5 32 24.5 7 M3 x 0.5 M8 x 1.0 57.5 5 T NA NB BA BB CA CB D F GA GB GC H 3 7 83 82 16 10 54 55 M12 x 1.0 M10 x 1.0 21.5 23 5.5 5.5 14 14 2.3 2.3 33 33 25 25 42 42 20.5 20.5 9.5 9.5 M5 x 0.8 M4 x 0.7 18.3 12 17 20 20 14 5 4 8 8 5 5 5 5 11 11 28 28 15

AC Servo Motor Driver (CC-Link Type ）

2 11.