5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Interchargeable Cylinder Ports High Speed Response Time SY3000 double, 0.5MPa 24VDC, without surge voltage suppressor Interchangeable port sizes [ports A, B] Series C4, C6, M5 C4, C6, C8, Rc(PT) 1/8 C8, C10, Rc(PT) 1/4 SY3000 The innovated design of the pilot valve enables the SY to achieve a response time of 10ms while only consuming a half watt of power.

Table of Contents

02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch connection

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

2.8 depth 6.2 PF2M711/721L-N2(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-F2(-L) 88 17 21 2.8 depth 6.2 20 PF2M7(-L) Series Dimensions 76 A PF2M7mS-C4/C6/C8/N7(-L) 76 A 68 68 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 DC(+) 10.2 DC() 1.4 DC(+) 10.2 DC() 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 13 3 13 3 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2

PFxx-OMJ0005CN

C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

Compact Vacuum Unit

(Refer to page 17 for details.)

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(The standard valve has an individual exhaust for the pilot valve.) 1.12-58 Series VQZ Base Mounted Replacement Parts One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting Size Series VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C8 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 VQZ3000 SY VVQ2000-51A-C6 Note) Order is accepted in

smcmaintenancepartslist

6 17 !8 19 Rod seal NBR Component part numbers: !4, !5, !6, !8. Cushion seal Urethane 17 and 19 are non-replaceable parts, so they are not included in the seal kit. Piston seal NBR Seal kit includes a grease pack (40 g). Order with the following part number when only the grease pack is needed.

VZ100/300/500

C6 B3 B7 2 stations 02 M5 x 0.8 1/8 Tube Nil Rc G NPT NPTF F N T 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 A port M5 x 0.8, 1/8, C4, C6, B3, B7 One-touch fitting for 5/32" One-touch fitting for 1/4 Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Mechanically Jointed Rodless Cylinder Series MY1

Seal belt Dust seal band O-ring Side scraper Scraper Piston seal Cushion seal Tube gasket O-ring MY20-16AStroke MY20-16BStroke 5.1 x 3 x 1.05 MY25-16AStroke MY25-16BStroke 5.1 x 3 x 1.05 MY32-16AStroke MY32-16BStroke 7.15 x 3.75 x 1.7 MY40-16AStroke MY40-16BStroke 8.3 x 4.5 x 1.9 MY50-16AStroke MY50-16BStroke C4 MY63-16AStroke MY63-16BStroke C4 16 17 34 44 19 20 21 22 39 1 1 2 2 2 2 2 2 4

Modular F.R.L. Units

1/4 Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC10-A M5 x 0.8 1/16 87 59.9 25.5 28 35 12.5 25 31 20 27 4.5 6.8 3 24.5 AC20-B 1/8, 1/4 1/8 126.4 87.6 35.9 41.6 60 28.5 2 1 30 43.2 24 33 5.5 12 3.5 29 AC25-B 1/4, 3/8 1/8 167.4 115.1 38.1 30 55.1 80 27.5 0 41 57.2 35 7 14 4 41 AC30-B 1/4, 3/8 1

Compact Manifold Regulator Series ARM5

Option 56 17 50 SRF Symbol Description 42 17 Nil 3 None Oil-free ARX20 Note) The oil-free type has non-greased fluid contact areas. 3-way valve common supply block + Pressure switch block (W) VCHR 3-way valve common supply block (V) 5.

VZS

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

Digital Flow Switch (Integrated display type)

11 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-N1(-L) 84.4 12 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-F1(-L) 84.4 13 14 2.8 depth 8.4 PF2M711/721L-01(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-N1(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-F1(-L) 88 17 21 2.8 depth 6.2 -102No.PF-OMW0007-E PF2M7#S-C4/C6/C8/N7(-L) (mm) Model A P Q PF2M705/710S-C4(-L) 87.1 2.8 depth 8.4 2.5 depth 6 PF2M705

7.4

(Stations 7 to 8) SS0752-08C S0712-5G-C4 S0722-5G-C4 S0732-5G-C4 S07A2-5G-C4 Body Ported Manifold Bar Base Voltage Symbol Type 5 24 VDC 6 12 VDC Note) The valve cannot be used as a standalone unit. Prefix the asterisk to the part numbers of the solenoid valve etc. Write sequentially from the 1st station on the D side.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Series VQ Metal Seal/Rubber Seal Body Ported

VQ0140-5MO-C4 4 sets (Single solenoid No.) VQ0240-5MO-C4 4 sets (Double solenoid No.) The mark is an assembling mark. Prefix to parts nos. of solenoid valves, etc. VVQ0-R-4-C4 Individual EXH spacer VVQ0-57A-4 DIN rail mounting bracket KQP-X19 Blank plug 23 04 06 Specify valve and option nos. below the manifold base No.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

3 Port Solenoid Valve

V110-D5CU-C4 3 sets (Double solenoid part no.) V110-D5CZJ-C4 1 set (Double solenoid, with switch part no.) V110-D5MZ-C4 1 set (Double solenoid, individual wiring/ lead wire length 300 mm part no.) 1 2 The asterisk denotes the symbol for assembly. Prefix to the part no. of the solenoid valve, etc. The valve arrangement is numbered as the 1st station from D side.

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C8 C4 C6 C8 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 148 198 248 135.5 125 105 15 160.5 150 137 185.5 175 153 16 210.5 200 185 235.5 225 201 17 260.5 250 233 137.5 121 187.5 169 237.5 217 13.5 11.5 14.5 12.5 15.5 13.5 Stations SS5Y5-45GUBC4 C6 C8 Stations L1 L2 L3 L4 2 148 3 4 5 6 7 8 9 10 173 198 248 185.5 175 155 15 210.5 200 187 235.5 225 203 16 260.5 250 235 285.5 275 251 17 137.5