2

Thread type Nil R N NPT G G INDEX 498 Series AS-FS Needle Valve/Flow-rate Characteristics AS1201FS-M5, AS1211FS-M5 AS2201FS-01, AS2211FS-01 AS2201FS-02, AS2211FS-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 06, 07, 08, 09, 10 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (

Table of Contents

(mm) <M5> <M5> Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

CATALOG

x 0.8 M5 x 0.8 M5 x 0.8 Rc (PT) 18 Rc (PT) 18 Fluid Air Action Double Acting Op.

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Air Fittings & Tubing

<M5, M6> <M5, M6> Weight (g) H (Hex.) Part No.

4/5 Port Air Operated Valve SYJA3000 Series

SYJA3 20 1 M3 Body ported Base mounted (4 port) (Manifold use only) SYJA3 30 2 Base mounted (5 port) SYJA3 40 2 Port size Type of actuation Nil Without sub-plate 4 3 2 position double 2 position single 2 1 M5 port With sub-plate M5 3 position closed center Symbol 5 port 4 port 3 position exhaust center 5 3 position pressure center 2 position single 2 position single (B)2 4(A) (B)2 4(A) 1

1

P.T. 1 (P) 3 (R) (A) 10.5 30 (L) XT34 With miniature indicator Pneumatic indicator 10 12 17 44 25.4 2 x 4.6 mounting hole 19.5 8.5 14 2 x M5 x 0.8 depth 4 * 0.5 MPa supply Model L A VM122-M5-00A 32.5 7.5 F.O.F.* 26 N VM132-M5-00A P .T. 1.5 mm VM123-M5-00A 28.5 3.5 O.T. 1.5 mm VM133-M5-00A T.T. 3 mm Roller lever VM123-M5-01A VM133-M5-01A VM123-M5-01SA VM133-M5-01SA 10 Polyacetal or hard steel

Table of Contents

1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows Thin flat/Thin flat with ribs Flat 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 2, 4, 6, 8, 2 x 4, 3.5 x 7, Pad dia.

KQ2

(mm) Mass (g) Model D1 D2 L Application KQ2C-04 4 0.1 KQH, KQ2H04-M5, M6 KQS, KQ2S04-M5, M6 10.1 5.2 2.9 4 KQ2C-04A8.5 5 2.2 0.1 Applicable tubing KQL, KQ2L04-M5, M6 KQT, KQ2T04-M5, M6 KQY, KQ2Y04-M5, M6 4 KQ2C-04B9.7 5 2.2 0.1 KQ2C-06 6 0.1 2.9 12.1 7.2 KQH, KQ2H06-M5, M6 KQS, KQ2S06-M5, M6 6 KQ2C-06A10.5 7 0.1 2.2 KQL, KQ2L06-M5, M6 KQT, KQ2T06-M5, M6 KQY, KQ2Y06-M5, M6 6 KQ2C-06B12.0 7

KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

M1 AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 3.2 8.4 1/8" 8.4 17.5 28.7 28.7 12.7 17.5 7 12.7 AS131FG-M5-04 AS131FG-U10/32-03 28.6 M5 0.8 25.8 20.3 20.3 4 9.3 5/32" 9.3 9.6 9.3 7 8 25 22.2 10.8 28.6 25.8 10-32 UNF 22.2 25 9.6 9.3 10.8 8 AS131FG-M5-06 AS131FG-U10/32-05 20.6 31.8 34.5 13.5 23.3 21.4 21.3 6 11.6 3/16" 11.4 16.5 8 AS231FG-01-23 AS131FG-U10/32-07 31.9 20.7 24.4 21.6 3.2 8.4 1

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

M1 AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 3.2 8.4 1/8" 8.4 17.5 28.7 28.7 12.7 17.5 7 12.7 AS131FG-M5-04 AS131FG-U10/32-03 28.6 M5 0.8 25.8 20.3 20.3 4 9.3 5/32" 9.3 9.6 9.3 7 8 25 22.2 10.8 28.6 25.8 10-32 UNF 22.2 25 9.6 9.3 10.8 8 AS131FG-M5-06 AS131FG-U10/32-05 20.6 31.8 34.5 13.5 23.3 21.4 21.3 6 11.6 3/16" 11.4 16.5 8 AS231FG-01-23 AS131FG-U10/32-07 31.9 20.7 24.4 21.6 3.2 8.4 1

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3

VM

-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-30G VM

AS-FG/ASD-FG

M1 AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 1/8" 3.2 8.4 8.4 17.5 28.7 28.7 12.7 17.5 7 12.7 28.6 M5 x 0.8 25.8 AS131FG-M5-04 AS131FG-U10/32-03 20.3 20.3 5/32" 4 9.3 9.3 9.6 9.3 7 8 25 22.2 10.8 28.6 25.8 10-32UNF 22.2 25 10.8 9.6 9.3 8 20.6 31.8 34.5 13.5 AS131FG-M5-06 AS131FG-U10/32-05 23.3 21.4 21.3 3/16" 6 11.6 11.4 16.5 8 31.9 AS231FG-01-23 AS131FG-U10/32-07 20.7 24.4 21.6 1/4" 3.2

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3