Mini Free Mount Cylinder

x 27 l M3 x 29 l M3 x 31 l M3 x 33 l M3 x 38 l M3 x 43 l M3 x 48 l M3 x 53 l M3 x 27 l M3 x 29 l M3 x 31 l M3 x 33 l M3 x 38 l M3 x 43 l M3 x 48 l M3 x 53 l M3 x 27 l M3 x 29 l M3 x 31 l M3 x 33 l M3 x 38 l M3 x 43 l M3 x 48 l M3 x 53 l 5 5 18 M3 x 18 l 5 5 18 M3 x 18 l 5 5 18 M3 x 18 l 3 Mini Free Mount Cylinder Series CUJ Clean Series How to Order Double acting 10 6 8 D C D UJB F8N Number

Air Slide Table Series MXS

x 16 16.6 7 15.5 14.6 M3 x 16 1.4 MXS-BS12 (L) 9.5 31 14.5 16 40.8 6 12 M8 x 1 M4 x 15 20.5 10 15 18.5 M4 x 15 1.4 MXP MXS-BS16 (L) 11 37 17.5 19 46.7 7 14 M10 x 1 M5 x 18 23 12 18.5 21 M5 x 18 1.4 MXS-BS20 (L) 13 47 23.5 26 67.3 11 19 M14 x 1.5 M6 x 25 27 13 25.5 25 M6 x 25 12 MXY MXS-BS25 (L) 16 53.5 23.5 26.5 67.3 12 19 M14 x 1.5 M8 x 25 33 17 25.5 31 M8 x 25 12 Size of hexagon socket

MXS

Model CXS A B C D E E1 F H J K L G P* Q* M MXS 8 MXS12 MXS16 MXS20 MXS25 MXS-BS 8 7 23 14 15.5 40.8 5 12 16.6 7 15.5 14.6 1.4 M8 X 1 M3 X 16 M3 X 16 CXT MXS-BS12 9.5 31 14.5 16 40.8 6 12 20.5 10 15 18.5 1.4 M8 X 1 M4 X 15 M4 X 15 MXS-BS16 11 37 17.5 19 46.7 7 14 23 12 18.5 21 1.4 M10 X 1 M5 X 18 M5 X 18 MX MXS-BS20 13 47 23.5 26 67.3 11 19 27 13 25.5 25 12 M14 X 1.5 M6 X 25 M6 X 25 MXS-BS25

Rotary Actuator/Vane Type

[mm] Size A B C D E (g7) F (h9) G1 G2 J K L M N P Q R S T V1 V2 W X Y Q1 Q2 Q3 10 29 15 8 14 40.004 0.016 9 0 0.036 3 1 5 9 0.5 9.5 9.5 24 M3 x 0.5 depth 6 6 M3 x 0.5 14 3.6 30 37 19.8 8.5 14.5 15 34 20 9 18 50.004 0.016 12 0 0.043 4 1.5 6 10 0.5 14 10 29 M3 x 0.5 depth 10 6 M3 x 0.5 depth 5 M3 x 0.5 19 7.6 39.5 47 21 11 17 20 42 29 10 20 60.004 0.016 14 0 0.043 4.5 1.5 7 10 0.5 20 13

Dual Rod Cylinder Series CXSJ/CXS

socket head cap bolt) (Hexagon bolt) (Hexagon nut) 7 2M5 x 0.8 thread depth 4.5 IN (Piping port) 2-M3 x 0.5 (Through-hole) 2-M3 x 0.5 (Through-hole) 4M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side.: Same) 2M5 x 0.8 thread depth 4.5 Note) 4M3 x 0.5 thread depth 4.5 (Opposite side: Same) (15+1/2ST) 19 (Opposite side: Same) 6 3 9.5 27.5 11 (19) (15+1/2ST) 4 Note) 11-, 22: Vacuum suction

Air Cylinder

[mm] Bore size A B C D F FB FC FT FX FY FZ GA GB H MM NA NB NC NN S SA T Z ZA 6 15 12 14 3 8 13 4.5 1.6 24 14 32 14.5 5 28 M3 x 0.5 16 9.5 7 M6 x 1.0 51.5 49 3 79.5 77 10 15 12 14 4 8 13 4.5 1.6 24 14 32 8 5 28 M4 x 0.7 12.5 9.5 M8 x 1.0 46 74 16 15 18.3 20 5 8 19 5.5 2.3 33 20 42 8 5 28 M5 x 0.8 12.5 9.5 M10 x 1.0 47 75 56 Air Cylinder: Standard Type Double Acting, Single Rod CJ2

Smooth Cylinder/Low Speed Cylinder

21.5 24.5 27.5 B 13 16 19.5 22.5 27 33.5 B 15.5 19 16.5 19 22 25 A 20.5 24 21.5 24 27 30 A A B 15.5 18.5 22 25 29.5 36 B A B 32 40 50 63 80 100 10 13 16.5 19.5 24 30.5 7.5 10.5 14 17 21.5 28 3.5 6.5 9.5 12.5 17 24 15 18.5 16 18.5 21.5 24.5 10.5 13.5 17 20 24.5 31 12.5 16 13.5 16 19 22 8 11.5 9.5 12 15 18 MQ RHC RZQ Note) Adjust the auto switch after confirming the operating conditions in

Air Slide Table

19 19 19 27 84 75 84 75 84 75 36 47 47 47 47 66 57 Note) Use the average speed when calculating static moment.

CQS

X 25 l M3 X 30 l M3 X 35 l M3 X 40 l M3 X 45 l M3 X 50 l M3 50 55 60 65 70 25 30 35 40 45 50 6.5 6.5 Secure the cylinder by using Secure the cylinder by using the OA screws that are the OA screws that are provided with the cylinder provided with the cylinder tube. tube.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Table of Contents

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Compact Cylinder Series CQS

x 30L M3 x 35L M3 x 40L M3 x 45L M3 x 50L M3 x 55L M3 x 60L M3 x 65L M3 x 70L 25 30 35 40 45 50 M3 x 25L M3 x 30L M3 x 35L M3 x 40L M3 x 45L M3 x 50L M3 6.5 6.5 Mounting bolt Secure the cylinder by using the OA screws that are provided with the cylinder tube.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

[Option] Type 20 Applicable solenoid valve 10-SYJ312M--M3(-Q) 10-SYJ322M--M3(-Q) How to Order SS3YJ3 05 20 10 A port M3 x 0.5 Clean series Applicable blanking plate assembly Refer to page 610.

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Valve + Release valve spacer (VVQ4000-24A1 5 D) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve Spacer Valve + SUP stop valve spacer (VVQ4000-37A1 5 ) q AXT632-17-10 (M3 x 62) 3 1 w AXT632-17-19 (M3 x 26) 2 Not necessary when mounting the sub-plate.

Compact Rotary Actuator Series CRQ2

CRBU2 CRB1 L1 + (3 x P) L1 + (3 x P) Q1 = M Q1 = M MSU L2 + (3 x P) L2 + (3 x P) L1 = L1 = CRJ L2 = L2 = Q2 = M Q2 = M CRA1 Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 CRQ2 (mm) (mm) Q1 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Q2 M3 M3, M4 M3, M4 M3, M4, M5 M4, M5, M6 Size 10 15 20 30 40 Size 10 15 20 30 40 MSQ MSZ CRQ2X MSQX Symbol: A4 Symbol: A5 Symbol: A3 The long shaft can be

Table of Contents

VFS VS4 Series VFR2000 VQ7 Pilot valve assembly Tightening Torque for Mounting Bolt EVS Thread M3 (2 pcs.) M3 (3 pcs.) M3 (3 pcs.) M4 (4 pcs.)

CY1

x 0.5 3.5 M5 x 0.8 64 10 10.5 20 9.5 6 10 35.5 72 19 17.5 CY1R10 9 38 3.5 4 M3 x 0.5 4.5 M5 x 0.8 68 14 14 20 13 8 15 39.5 76 26 17.5 CY1R15 14 53 4.3 5 M4 x 0.7 6 M5 x 0.8 84 18 17 25 16 7 18 54.5 94 32 19 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/8 Rc(PT) 1/4 Rc(PT) 1/4 Rc(PT) 1/4 CY1R20 11 62 5.6 5 M4 x 0.7 7 95 17 20 40 19 7 22 64 107 38 20.5 CY1R25 15 70 5.6 6 M5 x 0.8 6.5 105 20 22.5 40 21.5