5-Port Solenoid Valve

Flat Ribbon B A B A B A B A B A B A B A 14 A 14 A 14 A 14 A 14 A 14 A 14 A 116.7 116.7 143.8 161.8 Max. 21 101.3 94.3 81 56.5 116.7 (21.5) (For 12) 148.7 EX510 Manifold Exploded View (9.6) 55 B 12 B 12 B 12 B 12 B 12 B 12 B 12 Fitting, Plug Part Nos.

Basic type / Direct mount type Series CY3B/CY3R

M2 M3 m2 m3 m4 10 15 25 1 2 1 2 2 2 1.4 CY1F 1.5 3 1.5 5 5 5 2 14 20 14 12 12 12 12 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

ZP

12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.

CQS

X 25 l M3 X 30 l M3 X 35 l M3 X 40 l M3 X 45 l M3 X 50 l M3 50 55 60 65 70 25 30 35 40 45 50 6.5 6.5 Secure the cylinder by using Secure the cylinder by using the OA screws that are the OA screws that are provided with the cylinder provided with the cylinder tube. tube.

NCQ2/CQ2

) B1 C1 H1 L1 MM X 12 16 20 25 8 10 13 17 9 10 12 15 4 5 5 6 14 15.5 18.5 22.5 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 10.5 12 14 17.5 H1 X C1 L1 Standard (mm) A B Bore size (mm) O C D E E1 E2 F H I K L M N W 5st 25.5 27 29 32.5 10st 30.5 32 34 37.5 5st 22 23.5 24.5 27.5 10st 27 28.5 29.5 32.5 12 16 20 25 6 8 7 12 6 8 10 12 23 26 30 33 13 15 17 19.5 14 17 19 22 7 8.5 10.5 12 M3 x 0.5 M4 x

Table of Contents

Note Power supply/Output connection cable Description ZS-28-A D Mounting screw (M3 x 8L) (Accessory) Bracket ZS-28-B With M3 x 5L (2 pcs.) Sensor connector ZS-28-C 1 pc. Panel mount adapter Panel mount adapter ZS-27-C With M3 x 8L (2 pcs.) ZS-27-D With M3 x 8L (2 pcs.)

Table of Contents

x 0.45 x 6l (Hexagon socket head cap screw) M3 x 0.5 x 12.5l (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (12) (5 + Stroke) 2.75 2-M3 x 0.5 through 25 0.2 4 8-28-23 23 Series CXSJ Dimensions: 10 Standard Piping 4-M3 x 0.5 thread depth 4.5 16 12 + Stroke 3.5 8 7.5 2-M5 x 0.8 thread depth 4 (Piping port) 28.5 8 Stroke 15 56 + Stroke 8 3.5 13 1 44.5 + Stroke M5 x 0.8 x 4l (Hexagon socket head

Table of Contents

x 0.93 x 1 x 0.88) = 0.51 m3/min 3 Selecting a model According to the corrected air flow capacity of 0.43 m3/min, IDF4E will be selected which air flow capacity is 0.52 m3/min at 50 Hz.

ZP

32 40 50 ZP50U 53 7 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12

One-touch Fittings

Spare Parts Symbol Size 02 2 23 3.2 04 4 06 6 08 8 10 10 12 12 16 16 Use the part number below to order the gasket for M3, M5, and M6 threads. Gasket for M3 thread: M-3G2 Gasket for M5 thread: M-5G2 Gasket for M6 thread: M-6G For details on applicable tubing O.D. and port size combinations for each model, refer to the charts on the Dimensions page.

Parallel Style Air Gripper Series MHZ

MHZAJ2-6 Double acting/Single acting Basic type 12 10 0.05 (14) 5 2 x M2 x 0.4 thread depth 4 (Mounting thread) 2 x M3 x 0.5 through (Mounting thread) 4 0 0.1 When open 12 1 Prepared hole dia. 2.6 through (Mounting hole) (28) 13.6 12 20 7H8 depth 1.5 +0.022 0 When closed 8 0 0.4 4 16.5 2 x M2 x 0.4 thread depth 4.5 (Mounting thread) 11 19.7 MHZ 44 MHF MHL M3 x 0.5 (Finger closing port) MHR

MHZ

12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 3 2 4 2.5 5 3.3 6.5 3.5 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 MHZ2-10-X51 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. 12-2-58 58 12-2-59 59 Parallel Style

MHZ

12 6 5 8 7 10 9 12 12 M2 x 0.4 M2 x 0.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 3.6 3.6 6 6 8 8 10 10 3 2 4 2.5 5 3.3 6.5 3.5 MHZ2-10-X51 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. 12-2-58 58 Courtesy of Steven Engineering

AS

AS121F-M3-02 AS121F-M3-01 2.4 1/8" 7.2 19.7 26.6 24.1 24 21.5 4 8.4 10.5 M3 x 0.5 5.5 5.2 6 11 24.3 26.8 2 11.4 8.8 M3 x 0.5 16.1 10 12.7 5.5 7.5 6 24.3 21.8 AS121F-M5-02 AS121F-M3-03 3 7 M5 x 0.8 5/32" 9.3 11.5 24.8 27.3 AS121F-M3-23 AS121F-M5-01 3.2 8.4 M5 x 0.8 1/8" 10.5 5.5 7.2 16.1 26.6 24.1 24 21.5 4 19.7 12.7 M3 x 0.5 8.4 22.1 17.3 AS121F-M3-04 AS121F-U10/32-01 4 9.3 1/8" 10 10-32UNF

Vacuum Pad

12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.

Vacuum Pad

12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.

Vacuum Pad

12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.

Vacuum Pad

12 13 12 8 8 12 13 12 14 14 6 18 18 23 23 7 7 19 24 20 Note) When mounting and removing the product, apply a wrench or torque wrench to the place shown in Figure.

5 Port Solenoid Valve

PROFINET SD0 Serial kit without SI Unit VQC 4/5 VQC 4/5 32 M12 1 to 12 stations SNB 16 1 to 8 stations (12 stations, 16 points) SNC 32 D-sub Note 3) 1 to 12 stations SND 16 1 to 8 stations (12 stations, 16 points) SVA CC-Link 32 M12 1 to 12 stations SVB 16 1 to 8 stations (12 stations, 16 points) SDA EtherCAT 32 M12 1 to 12 stations SDB 16 1 to 8 stations (12 stations, 16 points) SFA PROFINET

SX

12 stations Note) For SS5X3: 4 to 12 stations.