Fluoropolymer Piping Equipment

) L2 M3 M3 F F C side A side C side A side 1/4 H3 (E3) G 1 G 25 H3 L3 (L1) (L1) (L3) Class 2 to 5 Class 2 to 5 Type T3 Type T4 Class 6 Metric Size Model A side (Left) B side (Center) C side (Right) B E1 E2 E3 F G H1 H2 H3 L1 L2 L3 M1 M2 M3 Min. port size Applicable tubing O.D.

Hydraulic

-32 BAF-04 BAF-05 BAF-06 BAF-08 BAF-10 BGS1-032 BH2-040 BH2-050 BA-06 BH2-080 BH2-100 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BDS-04M BDS-05M BDS-06M BDS-08M BDS-10M BD1-04M BD1-05M BD1-06M BH1-080 BH1-100 40 25 to 800 1800 (1401 or more with tie-rod reinforcing ring) Note 1) 50

ZP

Weight (g) Pad form Flat/Flat with ribs Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Barb fitting Barb fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 24 26 27 22 22 24 26 27 22 10 to 16 10

A

0.14 5/32 3/8 0.04 0.12 NCRB1_W10-_S 0.55 0.20 0.35 0.02 0.20 25 0.95 1.14 0.59 0.31 0 -0.00015 (0.2) (0.26) M3 NCRB1_W10-_SE 0.33 0.37 -0.0012 -0.00045 5-40UNC 5-40UNC 0.14 10-32UNF M3 3/16 15/32 0.06 0.16 NCRB1_W15-_S 0.71 0.24 0.39 0.02 1.14 0.20 25 1.34 0.79 0.35 0 -0.00015 (0.2) (0.39) (0.24) M3 NCRB1_W15-_SE 0.43 0.39 -0.0016 -0.00045 8-32UNC 8-32UNC 0.18 10-32UNF 15/64 9/16 0.06 0.18

90

Air consumption (per unit) 0.058 m3/min (ANR) 0.085 m3/min (ANR) J (= Unit of conversion of A) Air consumption (for total operation) 6,525 m3/year 95,625 m3/year K = J x 60 x I Power consumption 2 0.19 kW 0.27 kW L (Theoretical value obtained from A and B) Power consumption cost per year 5,344 yen/year 75,938 yen/year M = C x I x L 1 Adsorption time is the time in a cycle when the ejector

A

-06 3/4 75 172.5 20 70 14 50 54 25 8.5 10.5 70 2.3 73 198 Float type Courtesy of Steven Engineering, Inc. !

5 Port Solenoid Valve Series VQZ1000/2000/3000

AN120-M5 T0604 x 1m AS3001F-06 INA-25-46 T1075 x 1m AS4001F-10 AN101-01 T0604 x 1 m AS3001F-06 AN110-01 T0604 x 1 m AS3001F-06 VQZ1151-01 VQZ1121-C6 T0806 x 1 m AS3001F-08 VQZ2151-02 VQZ2121-C6 AN200-02 T1075 x 1 m AS4001F-10 AN300-03 T0604 x 1 m AS3001F-06 T1209 x 1 m AS4001F-12 VQZ3121-C6 VQZ3151-03 909 Series VQZ Model Selection Sonic conductance C [dm3/(sbar)] Type of actuation Voltage

Clean Room Rodless Cylinder Series CYP ø15, ø32

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

Metal Seal/Rubber Seal Series VQ Body Ported

M3 screw For details on specifications and handling, refer to the separate technical instruction manual.

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Series SV

SV1000-05SV2000-00SV2000-M1SV3000-00SV1000-M1SV1000-06(For mounting on even numbered station) (For mounting on odd numbered station) SV3000-M1SV4000-M1SV4000-00Accessory Round head combination screw SX3000-22-9 (M2 x 39.5) Series Gasket SV1000 SX3000-57-4 SV2000-21-7 (M3 x 53) SV2000 SX5000-57-6 2 4 (B) Symbol SV3000-21-4 (M4 x 57) 2 4 SV3000 SX7000-57-5 4 2 SV2000-21-8 (M3 x 69.5) SV4000

Secondary Batteries

With bracket a Option w Note) Applicable to 90-AF40-06, 90-AFM40-06 and 90-AFD-40-06.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Tightening torque Model Thread size Be careful not to squeeze it in the wrong direction, as problems such as pin damage may occur. 10-SY3000 M2 0.8 Nm 0.16 Nm 10-SY5000 10-SY7000 10-SY9000 M3 1.4 Nm 0.8 Nm M4 M3 176 Series 10-SY Specific Product Precautions 8 Be sure to read this before handling.

Proposals for Energy Saving

-150 KNL3-06-200 KNL3-08-200 KNL3-08-250 KNL3-10-250 KNL3-10-300 KNL6-06-150 KNL6-06-200 KNL6-08-200 KNL6-08-250 KNL6-10-250 KNL6-10-300 O.D.

Silencer Series AN

(1 8 NPT) NAN101-N01 (1 8 NPT) Model NAN101-01 NAN110-01 NAN120-M3 NAN120-M5 Port Size 18* 18* M3 M5 Noise Reduction (dB) 16 21 13 18 Max Operating Pressure 1MPa / 145PSI Ambient & Fluid Temperature 5~150C / 40~300F Effective Orifice mm2 (Cv) 20 (1.1) 35 (1.9) 1 (0.05) 5 (0.27) Weight (gf) 9.5 20 1 3.3 H O W T O O R D E R SERIES AN SILENCER *Tapered thread ISO7/1 AN120-M3 (M3) AN120-M5 (

Prevents Micro-Bubbles

LVQ Metric sizes 4 04 06 4 6 N.C.

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 4 Port/Base Mounted Common SUP Common EXH, Stations: 6 Stations, A B Port Size: M3X0.5 Type 31, S31, P R Port Thread: -

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Series CS1 SGP20A x 1 m AS500-06 AN500-06 Tube bore x Length Speed controller Silencer VFS5100-06 Double Check Spacer/Specifications Specifications Check Valve Operation Can hold an intermediate cylinder position for an extended time If the double check spacer with a built-in double check valve is combined, it will enable

CYP

-06 2.