Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 M3 M5 U10/32 01 02 03 04 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

0.55

DC 5 6 24 VDC 12 VDC Port size AC (50/60 Hz) Symbol Port size VP300 1/8 1/4 3/8 1/2 VP500 VP700 1 2 3 4 7 B 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] 240 VAC 24 VAC 01 02 03 04 Made to Order Nil Electrical entry Pilot exhaust port with piping thread (M3) specification (Refer to page 24).

Silencer Series AN

(1 8 NPT) NAN101-N01 (1 8 NPT) Model NAN101-01 NAN110-01 NAN120-M3 NAN120-M5 Port Size 18* 18* M3 M5 Noise Reduction (dB) 16 21 13 18 Max Operating Pressure 1MPa / 145PSI Ambient & Fluid Temperature 5~150C / 40~300F Effective Orifice mm2 (Cv) 20 (1.1) 35 (1.9) 1 (0.05) 5 (0.27) Weight (gf) 9.5 20 1 3.3 H O W T O O R D E R SERIES AN SILENCER *Tapered thread ISO7/1 AN120-M3 (M3) AN120-M5 (

Mini Free Mount Cylinder

x 27 l M3 x 29 l M3 x 31 l M3 x 33 l M3 x 38 l M3 x 43 l M3 x 48 l M3 x 53 l M3 x 27 l M3 x 29 l M3 x 31 l M3 x 33 l M3 x 38 l M3 x 43 l M3 x 48 l M3 x 53 l M3 x 27 l M3 x 29 l M3 x 31 l M3 x 33 l M3 x 38 l M3 x 43 l M3 x 48 l M3 x 53 l 5 5 18 M3 x 18 l 5 5 18 M3 x 18 l 5 5 18 M3 x 18 l 3 Mini Free Mount Cylinder Series CUJ Clean Series How to Order Double acting 10 6 8 D C D UJB F8N Number

Digital Flow Switches

(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without unit switching function.) Refer to the specifications of display unit for the flow rate value per pulse.

3 Port Air Operated Valve Series SYJA300

(Example) SS3YJA3-41-03-M3 . 1 set SYJA314. 1 set SYJA324. 1 set SYJ300-10-2A . 1 set The asterisk denotes the symbol for assembly.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(Example) 10-SS3YJ3-20-03 . 1 set (manifold base) 10-SS3YJ3-42-03-C4 . 1 set (manifold base) SYJ300-10-7A . 1 set (blanking plate assembly) 10-SYJ312M-5LZ-M3 . 2 sets (valve) 10-SYJ314M-5G . 2 sets (valve) SYJ300-10-7A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

PF2A/PF2W

(Fixed SI unit [l/min, or l, m3 or m3 x 103] will be set for switch types without unit switching function.) Refer to the specifications of display unit for the flow rate value per pulse.

Digital Flow Switches, Series PF2A, Series PF2W

(Fixed SI unit [(l/min, or l, m3 or m3 x 103)] will be set for switch type without the unit switching function.) Note 3) The high flow rate type is CE marked; however, the linearity with applied noise is 5% F.S. or less. Note 4) Switch output and accumulated pulse output selections are made using the button controls.

SYJ300/500/700

VZ VS VFN 4-4-11 12 Series SYJ300 Manifold for Internal Pilot Type Type 20 Applicable solenoid valve SYJ312--M3 SYJ312M--M3 SYJ322--M3 SYJ322M--M3 How to Order A port M3 x 0.5 SS3YJ3 20 05 Stations Bracket Applicable blanking plate assembly SYJ300-10-1A 02 2 stations Nil Without bracket P R R port : : F With bracket M5 x 0.8 20 20 stations P port Note) For more than 10 stations, supply air

3 Port Air Operated Valve Series SYJA300 1

(Example) SS3YJA3-41-03-M3 . 1 set SYJA314. 1 set SYJA324. 1 set SYJ300-10-2A . 1 set The asterisk denotes the symbol for assembly.

Modular F.R.L. Units

-06A 01-A E200-02-A 03-A 02 E300-03-A 04 E500-06-A Piping adapter Note 3) 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Pressure switch with piping adapter Note 3) Y54-03-A 04-A Y24-01-A 02-A Y34-01-A 02-A Cross spacer Note 3) Note 1) in part numbers for a round pressure gauge indicates a type of connection thread.

Valve Single Unit

Grommet (G), (H): SX7140(R)G H 02 03 Polarity indication Manual override (Press and turn for the locking type.)

5 Port Solenoid Valve Series VQZ1000/2000/3000

72.8 + + 57 41.6 26.5 2 x PE port 20.5 20.5 14 X 12 Y 13.5 11.5 M5 x 0.8 (Not used) 21 (18) 21 (18) M5 x 0.8 (External pilot port) 33 1/4, 3/8 [1(P), 5(R1), 3(R2) port] 66 ( ): VQZ325-G1-02 L-type plug connector (L): VQZ325 (R)-L10 1 02 03 DIN terminal (Y): VQZ325 (R)-Y10 1 02 03 136.8 [141.2] Approx. 300 (Lead wire length) 57 [64] 152.6 Max. 10 Applicable cable O.D

A

1/2 72 62 40 62 Y52-03 3/8 14 24 41 Y61-03 3/8 15 30 50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Mounting screw tightening torques 10-SV1000 SV1000-67-1A M2: 0.15 Nm M3: 0.6 Nm M4: 1.4 Nm 10-SV2000 SV2000-67-1A 10-SV3000 SV3000-67-1A 10-SV4000 SV4000-67-1A Plug (White) These are inserted in unused cylinder ports and P, E ports.

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 02: KJH02-M5,04: KJH04-M5 15 With Buffer: Vacuum Inlet Series ZP3 Vertical Pad diameter 1.5 to 3.5 Flat Pad type Vertical Dimensions/With Buffer: Vacuum Inlet 3, 6 mm Stroke With Buffer: Vacuum Inlet Pad Unit ZP3-T015U;J -B3 ZP3-T015U;K -B3 ZP3-T02U;J -B3 ZP3-T02U;K -B3 5 5 7 7 M3 x 0.5 M3 x 0.5 M3 x 0.5 M3 x 0.5 Vertical Width across

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

0.4

2 0 1 " 565 Series VQC4000 Plug-in Unit Base Mounted Manifold Option * + ,),) Blanking plate assembly VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-102 03 Individual EXH spacer VVQ4000-R-1SUP/EXH block plate VVQ4000-16A 02 03 SJ SY !"

Direct Operated

Max. system pressure (MPa) Flow characteristics C[dm3/(sbar)] 0.08 0.15 0.20 0.08 0.15 N.C. 1 0.7 0.3 1 0.7 1.2 1.6 0.3 0.6 1 0.3 0.5 1.2 1.6 0.6 1 0.3 0.5 Cv 0.32 0.25 0.20 0.32 0.25 b VX311-01 VX312-01 VX313-01 VX311-02 VX312-02 VX322-02 VX332-02 VX313-02 VX323-02 VX333-02 VX324-02 VX334-02 VX322-03 VX332-03 VX323-03 VX333-03 VX324-03 VX334-03 0.29 0.60 0.82 0.29 0.60 0.7 0.4 0.2 0.7 0.4